JPH01146525U - - Google Patents
Info
- Publication number
- JPH01146525U JPH01146525U JP4185388U JP4185388U JPH01146525U JP H01146525 U JPH01146525 U JP H01146525U JP 4185388 U JP4185388 U JP 4185388U JP 4185388 U JP4185388 U JP 4185388U JP H01146525 U JPH01146525 U JP H01146525U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- light
- guide fiber
- light guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図はこの考案におけるウエハ周辺露光装置
の一実施例の主要部の概略構成を示す斜視図、第
２図ａは第１図における導光フアイバの出射部の
側断面図、同図ｂは同図ａのＸ―Ｘにおける断面
図、第３図は半導体ウエハに塗布されたレジスト
に光を照射する場合の斜視図、第４図ａ，ｂは第
３図の方法で露光するための光照射の状態を示す
図、第５図は導光フアイバの出射部先端にレンズ
を設けてウエハ周辺を露光する状態を示した図で
ある。
図中、１：ウエハ、５：搬送ベルト、６：処理
ステージ、７：オリフラ部検出搬送アーム、８：
導光フアイバ、８ａ：出射部、１０：ローダ、１
０′：アンローダ、２７：投影レンズ、Ｈ：スポ
ツト光照射装置。
FIG. 1 is a perspective view showing a schematic configuration of the main parts of an embodiment of the wafer peripheral exposure apparatus in this invention, FIG. 2a is a side sectional view of the output part of the light guide fiber in FIG. 3 is a perspective view of irradiating light onto a resist coated on a semiconductor wafer, and FIGS. 4 a and b are sectional views taken along line X--X in Figure 3. FIG. 5 is a diagram showing a state of irradiation, and shows a state in which a lens is provided at the tip of the emission part of a light guide fiber to expose the periphery of a wafer. In the figure, 1: wafer, 5: transport belt, 6: processing stage, 7: orientation flat detection transport arm, 8:
Light guide fiber, 8a: Output section, 10: Loader, 1
0': unloader, 27: projection lens, H: spot light irradiation device.
Claims (1)
構と、搬送されたウエハを所定位置に位置決めす
る位置決め機構と、ウエハを載置するための昇降
かつ回転可能な処理テーブルと、ウエハ周辺部に
スポツト光を照射するスポツト光照射機構とより
なり、前記スポツト光照射機構は、水銀ランプか
らの光を導く導光フアイバを有し、この導光フア
イバの出射側には少なくとも１つのレンズが設け
られ、該レンズの全ての光学面に、前記レジスト
の感光露光波長の光を透過する反射防止膜を設け
たことを特徴とするウエハ周辺露光装置。 A transport mechanism that transports the wafer coated with resist, a positioning mechanism that positions the transported wafer at a predetermined position, a processing table that can be raised and lowered and rotated to place the wafer, and a spot light that illuminates the periphery of the wafer. The spot light irradiation mechanism includes a light guide fiber that guides light from a mercury lamp, and at least one lens is provided on the output side of the light guide fiber, A wafer peripheral exposure apparatus characterized in that an antireflection film that transmits light having a photosensitive exposure wavelength of the resist is provided on all optical surfaces of the resist.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185388U JPH01146525U (en) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4185388U JPH01146525U (en) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146525U true JPH01146525U (en) | 1989-10-09 |
Family
ID=31268279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4185388U Pending JPH01146525U (en) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146525U (en) |
-
1988
- 1988-03-31 JP JP4185388U patent/JPH01146525U/ja active Pending
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