JPH01144852U - - Google Patents
Info
- Publication number
- JPH01144852U JPH01144852U JP3020689U JP3020689U JPH01144852U JP H01144852 U JPH01144852 U JP H01144852U JP 3020689 U JP3020689 U JP 3020689U JP 3020689 U JP3020689 U JP 3020689U JP H01144852 U JPH01144852 U JP H01144852U
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- ray
- sample surface
- scanning
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の一実施例装置の要部側面図、
第２図は本考案装置の機能を説明するグラフ、第
３図は本考案の一実施装置における制御装置の動
作のフローチヤート、第４図は更に他の実施例に
おける制御装置のフローチヤートである。
３…電子線、５…Ｘ線分光器の器枠、６…器枠
５を枢支するピン、Ｆ…ねじ、７…自在軸、Ｓ…
試料、Ｃ…分光結晶、Ｄ…Ｘ線検出器。
FIG. 1 is a side view of essential parts of an embodiment of the device of the present invention.
FIG. 2 is a graph explaining the functions of the device of the present invention, FIG. 3 is a flowchart of the operation of the control device in one embodiment of the device, and FIG. 4 is a flowchart of the control device in yet another embodiment. . 3... Electron beam, 5... X-ray spectrometer frame, 6... Pin that pivots the instrument frame 5, F... Screw, 7... Free shaft, S...
Sample, C... spectroscopic crystal, D... X-ray detector.
Claims (1)
るＸ線を分光結晶により波長分散する型のＸ線分
光器とを有し、上記Ｘ線分光器の器枠を、検出Ｘ
線の波長を一定に保つて、同Ｘ線分光器の入射ス
リツト相当位置が試料面において移動可能なよう
に、器枠上部において装置本体部に対し傾動可能
に枢支した電子線走査型Ｘ線分析装置。 It has means for scanning the sample surface with excitation rays, and an X-ray spectrometer that wavelength-disperses the X-rays emitted from the sample using a spectroscopic crystal.
The electron beam scanning X-ray is pivoted at the top of the instrument frame so that it can tilt relative to the main body of the device so that the wavelength of the beam remains constant and the position corresponding to the entrance slit of the X-ray spectrometer can be moved on the sample surface. Analysis equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3020689U JPH0345176Y2 (en) | 1989-03-16 | 1989-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3020689U JPH0345176Y2 (en) | 1989-03-16 | 1989-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01144852U true JPH01144852U (en) | 1989-10-04 |
| JPH0345176Y2 JPH0345176Y2 (en) | 1991-09-24 |
Family
ID=31255068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3020689U Expired JPH0345176Y2 (en) | 1989-03-16 | 1989-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345176Y2 (en) |
-
1989
- 1989-03-16 JP JP3020689U patent/JPH0345176Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345176Y2 (en) | 1991-09-24 |
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