JPH02102651U - - Google Patents
Info
- Publication number
- JPH02102651U JPH02102651U JP988289U JP988289U JPH02102651U JP H02102651 U JPH02102651 U JP H02102651U JP 988289 U JP988289 U JP 988289U JP 988289 U JP988289 U JP 988289U JP H02102651 U JPH02102651 U JP H02102651U
- Authority
- JP
- Japan
- Prior art keywords
- dispersive
- ray
- analysis
- sample
- solid angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 2
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 238000004458 analytical method Methods 0.000 claims 1
- 238000000921 elemental analysis Methods 0.000 claims 1
- 238000000605 extraction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の動作原理を説明する断面図、第
２図は本案の一実施例を示す断面図である。
１……電子ビーム、２……対物レンズ、３……
試料、４……試料台、５……特性Ｘ線、６……Ｘ
線取出し穴、７……分光結晶、８……非分散形Ｘ
線分析装置、９……Ｘ線検出器、１０……アパー
チヤー、１１……立体角、１２……Ｘ線取出し穴
、１３……可動軸、１４……試料室、１５……フ
ランジ、１６……ストツパー、１７……ツマミ。
FIG. 1 is a sectional view illustrating the operating principle of the present invention, and FIG. 2 is a sectional view showing an embodiment of the present invention. 1...Electron beam, 2...Objective lens, 3...
Sample, 4...Sample stage, 5...Characteristic X-ray, 6...X
Line extraction hole, 7...Spectroscopic crystal, 8...Non-dispersive type X
Ray analyzer, 9...X-ray detector, 10...aperture, 11...solid angle, 12...X-ray extraction hole, 13...movable axis, 14...sample chamber, 15...flange, 16... ...stopper, 17...knob.
Claims (1)
鏡の非分散形Ｘ線分析装置において、試料からＸ
線検出器を見込むＸ線信号取り込む立体角を可変
できる絞りを設けたことを特徴とする非分散形Ｘ
線分析用絞り装置。 ２ 請求範囲第１項において、真空外より立体角
を可変できる構造を有することを特徴とする非分
散形Ｘ線分析用絞り装置。[Scope of claim for utility model registration] 1. In a non-dispersive X-ray analyzer of a scanning electron microscope that performs elemental analysis of minute parts of a sample,
A non-dispersive type
Squeezing device for line analysis. 2. A diaphragm device for non-dispersive X-ray analysis according to claim 1, characterized in that it has a structure that allows the solid angle to be varied from outside the vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988289U JPH02102651U (en) | 1989-02-01 | 1989-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP988289U JPH02102651U (en) | 1989-02-01 | 1989-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102651U true JPH02102651U (en) | 1990-08-15 |
Family
ID=31217022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP988289U Pending JPH02102651U (en) | 1989-02-01 | 1989-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102651U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8905844B2 (en) | 2007-10-05 | 2014-12-09 | Nintendo Co., Ltd. | Storage medium storing load detecting program and load detecting apparatus |
| US9289680B2 (en) | 2007-04-20 | 2016-03-22 | Nintendo Co., Ltd. | Game controller, storage medium storing game program, and game apparatus |
-
1989
- 1989-02-01 JP JP988289U patent/JPH02102651U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9289680B2 (en) | 2007-04-20 | 2016-03-22 | Nintendo Co., Ltd. | Game controller, storage medium storing game program, and game apparatus |
| US8905844B2 (en) | 2007-10-05 | 2014-12-09 | Nintendo Co., Ltd. | Storage medium storing load detecting program and load detecting apparatus |
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