JPH0541397Y2 - - Google Patents

Description

[Detailed description of the invention] (a) Industrial application field The present invention relates to a sample holder for a photoelectron analyzer.
In particular, the present invention relates to a sample holder for a photoelectronic analyzer used when analyzing a microscopic part of a sample by irradiating a light beam such as X-rays or ultraviolet rays that is difficult to focus.

(B) Prior Art A sample holder of a conventional photoelectronic analyzer that performs analysis using X-rays, etc. is configured by attaching a sample stage 102 on a sample probe 101, as shown in the cross-sectional view of FIG. General photoelectron analysis is performed by measuring photoelectrons emitted from the surface of the sample 103 when the sample 103 adhesively fixed on the sample stage 102 is irradiated with X-rays.

(c) Problems that the invention attempts to solve However, with light beams such as soft It was usually not possible to do so. Sample 10 by all means
In the case of measuring the minute part of the sample 103, a cover 105 having a hole 104 only in the part facing the minute part of the sample 103 is attached on top of the sample 103. That is, irradiation light from the X-ray source 106 is applied to a minute part of the sample 103 exposed through the hole 104 of the cover 105, and photoelectrons emitted from that part and passed through the converging lens 107 are analyzed by an analyzer.

However, in the case of the conventional example having such a configuration, in reality, photoelectrons are also emitted from the cover 105 during irradiation with X-rays from the X-ray source 106, and the signal becomes large in the background and is measured. However, there was a drawback that accurate analysis of the desired part could not be performed.

Furthermore, there was also a drawback that the surface of the sample 103 was easily damaged by the cover 105.

Additionally, much of what is required for surface analysis using X-ray photoelectron analyzers, etc. is analysis (defect analysis or comparative analysis) of how abnormal areas differ from normal areas due to corrosion, contamination, etc. be. in this case,
We would like to analyze at least two locations in one sample installation, but this was not possible with conventional equipment.

The present invention was developed in view of these circumstances, and is designed to lead photoelectrons from only one microscopic part of a sample to be measured to the analyzer side, thereby enabling highly accurate photoelectron analysis of the microscopic part. At the same time,
The purpose of the present invention is to enable analysis at two locations to be easily performed by setting the sample in a sample holder once and introducing the sample into an ultra-high vacuum once.

(d) Means for solving the problem The present invention consists of a sample stand on which a sample is placed, a structure that is provided to cover the sample stand while maintaining a certain space from the sample stand, and a side surface of which is irradiated with light from a light source. A plurality of irradiation openings for introducing light onto the sample stage, a plurality of pipes for extracting electrons from the sample at positions facing the sample stage, and a separating plate for isolating the pipes are provided respectively. The sample stage includes a cover body for the sample stage, and a rotating shaft that rotates the cover body and the sample stage as one unit.

(e) Effect The present invention is designed to irradiate the surface of a sample with light from a light source through the irradiation aperture, and when photoelectrons are emitted from the surface of the sample, most of the photoelectrons are blocked by the cover body.
Only the photoelectrons from the microscopic part are passed through the pipe, and the photoelectrons are guided to the analyzer. To measure other sides of the sample, rotate the shaft 180° so that the other side of the sample faces the light source. Similarly, photoelectrons passing through another pipe are guided to an analyzer.

(F) Embodiments The present invention will be described in detail below based on embodiments shown in the drawings. FIG. 1 is a sectional view showing a holder A for a photoelectron analyzer according to an embodiment of the present invention.
1 is a sample stage on which the sample 2 is placed;
A male threaded portion 3 is provided on the lower surface so as to protrude downward.

Reference numeral 4 denotes a box-shaped cover body provided to cover the sample stage 1 at a constant interval, and is composed of a lower component part 5 and an upper component part 6 that is fitted and attached onto the lower component part 5. It's on. A female screw portion 7 is provided at the bottom of the lower component 5, and the sample stage 1 is attached to the sample table 1 by screwing the male screw portion 3 into the female screw portion 7 so as to be height adjustable.

Reference numeral 8 denotes a rotating shaft, and the lower component 5 is mounted and fitted onto the upper part of the rotating shaft 8, and a motor 14 is attached to the lower part. Irradiation openings 10 are provided on both side surfaces of the upper component 6 to guide the irradiation light from the X-ray source 9 onto the sample stage 1, and in the center of the upper surface there is a member (pipe) for deriving photoelectrons, which will be described later. A separator plate 12 is provided which separates the pipe from the pipe.

All of the members constituting the sample holder A described above are made of metal materials.

Next, the operation of this embodiment will be explained together with the method of using this sample holder A, using the configuration diagrams of the photoelectron analyzer 18 shown in FIG. 1 and FIG. 2.

First, outside the apparatus 18, the sample holder A
Attach sample 2 using the following procedure. First, the sample 2 is adhesively fixed onto the sample stand 1 using an adhesive that releases little gas, and the sample stand 1 is screwed into the lower component 5 of the cover body, and the male threaded part 3 is screwed into the female threaded part 7. Attach by advancing. Then, the upper component 6 is fitted onto the lower component to which the sample stage 1 is attached. The sample 2 placed on the sample stage 1 is lifted upward by the screw 3 to the very bottom of the separator 12 (long in the direction of the front and back of the page).
Place the cover body 4 on an optical microscope, look into the sample through the upper end opening 15 of the pipe 13, and adjust with a plurality of retaining screws 11 so that the minute analysis point 0 as shown in FIG. 1b is at the center of the pipe 13. At this time, it is confirmed that the part P (which occupies a relatively large area) other than the analysis point (altered part) is at the center of another pipe 13. While checking this state, use the retainer screw 11 and screw 3 to prevent the sample from moving.

In this way, the sample holder A with the sample 2 attached is moved between the lid 20 of the sample introduction chamber 19 and the bellows 21.
The sample holder operating rod 22 is clamped onto the operating end 23 of the sample holder operating rod 22, which is integrally attached (shown with dotted lines), and the sample holder operating rod 22 is attached to the sample introduction chamber 19, and with the opening/closing valve 24 closed, the sample is introduced. Room 1
Vacuum the inside of 9. After completing the evacuation of the sample introduction chamber 19, the opening/closing valve 24 is opened and the operating section 25 of the operating rod 22 is operated to contract the bellows 21 and move the operating end 23 to the device 18.
The sample holder A, which is inserted into the main body of the probe and clamped by the operating end 23, is placed and fitted onto the top of the sample probe 8 with its irradiation opening 10 facing the X-ray source 9.

When the above preparations are completed, the X-ray source 9 is operated to irradiate the sample with X-rays. Electrons are generated from the sample surface on the left side of the separator 12 in FIG. 26.

When measuring the P section, the shaft 8 is connected to the motor 14.
The analyzer is rotated 180° and the right opening 10 is directed toward the X-ray source 9 for analysis.

In the above explanation, the sample was analyzed only at two locations, but the present invention is not limited to this, and by providing a plurality of irradiation openings, pipes, etc., multiple locations can be analyzed in the same way.

(g) Effects According to the present invention, multiple locations can be analyzed by simply introducing a simple sample holder into a vacuum without taking the sample out into the atmosphere. In particular, it is possible to easily analyze abnormal and normal areas, which are frequently requested.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view of an embodiment of the sample holder of the present invention, FIG. 2 is a configuration diagram of an optoelectronic device showing the state of use of the present invention, and FIG. 3 is a cross-sectional view of a conventional sample holder. 1 is a sample stage, 2 is a sample, 4 is a cover body, 8 is a rotating shaft, 10 is an irradiation opening, 13 is a lead-out member (pipe), and 14 is a motor.

Claims (1)

[Claims for Utility Model Registration] A sample stand on which a sample is placed; and a side surface of the sample stand that is provided so as to cover the sample stand while maintaining a certain space from the sample stand, and that emits light from a light source on a side surface onto the sample stand. multiple irradiation apertures to introduce the
a cover body for the sample stage, which is provided with a plurality of pipes for extracting electrons from the sample at a position facing the sample stage, and a separator plate for isolating the pipes from each other; the cover body and the sample; A sample holder for a photoelectron analyzer consisting of a rotating shaft that rotates the table as a unit.