JP3064335B2 - Transmission electron microscope - Google Patents
Transmission electron microscopeInfo
- Publication number
- JP3064335B2 JP3064335B2 JP2152741A JP15274190A JP3064335B2 JP 3064335 B2 JP3064335 B2 JP 3064335B2 JP 2152741 A JP2152741 A JP 2152741A JP 15274190 A JP15274190 A JP 15274190A JP 3064335 B2 JP3064335 B2 JP 3064335B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- objective lens
- lens
- electron microscope
- analysis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は透過型電子顕微鏡に係り、特に元素分析など
の分析機能と、原子配列などの微細構造の超高分解能透
過像観察に好適な材物レンズ、試料室および試料微動装
置に関する。Description: BACKGROUND OF THE INVENTION The present invention relates to a transmission electron microscope, and more particularly to a material suitable for an analysis function such as elemental analysis and observation of an ultra-high resolution transmission image of a fine structure such as an atomic arrangement. The present invention relates to an object lens, a sample chamber, and a sample fine movement device.
従来の透過型電子顕微鏡は対物レンズ、試料室、試料
微動装置、各一式から成つている。また、分析を主体と
した装置の対物レンズと、超高分解能透過像観察用のそ
れとは本質的に異なつた形状を持ち、異なつた方式と機
構の試料微動装置を要する。従つて従来の装置では、分
解能をある程度犠牲にした分析指向の装置にまとめる
か、もしくは分析機能を犠牲にした超高分解能指向の装
置にまとめるかのどちらかであつた。一台の装置でその
両者を満足させるためには、対物レンズ、試料室、試料
微動装置を分析用と超高分解能用の各一式用意しておき
必要に応じ、交換する方法もある。しかしこの作業には
交換および交換後の微調整のための知識が必要である。
さらに、交換操作のため、高真空に保つておいた鏡体内
構造物を大気中にさらすことにより交換後の測定試料の
試料汚染が著しく増加した。A conventional transmission electron microscope includes an objective lens, a sample chamber, a sample fine movement device, and each set. In addition, an objective lens of a device mainly for analysis and a sample fine movement device having an essentially different shape from that for observation of an ultra-high-resolution transmission image and having a different method and mechanism are required. Therefore, in the conventional apparatus, it is either integrated into an analysis-oriented apparatus in which the resolution is sacrificed to some extent, or integrated into an ultra-high resolution-oriented apparatus in which the analysis function is sacrificed. In order to satisfy both of them with one apparatus, there is a method of preparing an objective lens, a sample chamber, and a sample fine-movement apparatus for analysis and for ultra-high resolution, and replacing them as necessary. However, this operation requires knowledge for replacement and fine-tuning after replacement.
Further, by exposing the internal structure maintained at a high vacuum to the atmosphere for the replacement operation, the sample contamination of the measurement sample after the replacement was significantly increased.
上記従来技術はナノメータ領域の分析と超高分解能透
過像観察の両立については配慮がされおらず、ユーザー
はそれぞれの機能に妥協を強いられるか、もしくは煩雑
な対物レンズ、試料室、試料微動装置の交換操作を強い
られるかのどちらかであつた。また、うまく交換操作が
行なえても、その後に生じる試料汚染の問題についても
配慮されず、交換後しばらくは観察中の試料汚染に悩ま
されるという問題があつた。In the above prior art, no consideration is given to compatibility between analysis in the nanometer region and observation of ultra-high-resolution transmission images, and the user is forced to compromise each function or to use a complicated objective lens, sample chamber, sample fine movement device. Either the exchange operation was forced. In addition, even if the replacement operation can be performed successfully, the problem of sample contamination that occurs thereafter is not considered, and there is a problem that the sample is contaminated during observation for a while after the replacement.
本発明の目的は対物レンズなどの複雑で繊細な部品の
交換操作、交換操作による試料汚染の増加などの問題を
起こさずにナノメータ領域の分析と原子配列などの超高
分解能透過像の観察の両立を実現することにある。An object of the present invention is to simultaneously analyze a nanometer region and observe an ultra-high-resolution transmission image such as an atomic arrangement without causing a problem such as an operation of replacing a complicated and delicate part such as an objective lens and an increase in sample contamination due to the operation of the replacement. It is to realize.
上記目的を達成するために、従来、電子顕微鏡体中に
一組しか組み込まれていなかつた対物レンズ、試料室、
試料微動装置を分析に適したものと超高分解能透過像観
察に適したものの二組もしくはそれ以上組み込むことに
したものである。In order to achieve the above object, conventionally, only one set of the objective lens, the sample chamber,
Two or more sets of sample fine movement devices, one suitable for analysis and one suitable for ultrahigh-resolution transmission image observation, are to be incorporated.
分析用の対物レンズ、試料室、試料微動装置が動作中
にた超高分解能透過像用の対物レンズはその電流が弱め
られ、その対物レンズ用の試料微動装置も動作が解除さ
れる。また、超高分解能透過像観察用対物レンズが動作
中は分析用の対物レンズは弱められ、試料微動装置の動
作が解除される。このように一つのレンズが動作中は他
のレンズは弱められ、試料微動装置は動作が解除される
ので誤動作することがない。The current of the objective lens for ultra-high-resolution transmission image during the operation of the objective lens for analysis, the sample chamber, and the sample fine movement device is weakened, and the operation of the sample fine movement device for the objective lens is also released. During the operation of the objective lens for observing the transmitted image with ultra-high resolution, the objective lens for analysis is weakened, and the operation of the sample fine movement device is released. As described above, while one lens is in operation, the other lens is weakened, and the sample fine movement device is released from operation, so that there is no malfunction.
以下、本発明の一実施例を第１図〜第３図により説明
する。透過型電子顕微鏡１には電子銃２およびそれから
発せられる電子線３を収束する収束レンズ４が配置され
ている。その収束レンズ４の下に第１対物レンズ5,第１
試料室6,第１試料微動装置７と試料８を支持している第
１試料ホールダ９と試料８の元素分析を行なうための分
析器10、その下に第２対物レンズ11,第２試料室12,第２
試料微動装置13,第２試料ホールダ14,中間レンズ15,投
射レンズ16,観察室17,蛍光板18がある。An embodiment of the present invention will be described below with reference to FIGS. The transmission electron microscope 1 is provided with an electron gun 2 and a converging lens 4 for converging an electron beam 3 emitted therefrom. The first objective lens 5 and the first objective lens 5
A sample chamber 6, a first sample holder 9 supporting a first sample fine movement device 7 and a sample 8, and an analyzer 10 for performing elemental analysis of the sample 8, a second objective lens 11, a second sample chamber under the analyzer. 12, second
There are a sample fine movement device 13, a second sample holder 14, an intermediate lens 15, a projection lens 16, an observation room 17, and a fluorescent plate 18.
第２図は本実施例のうち、試料８の微小部元素分析を
行なう場合を示す。電子線３は収束レンズ４および強励
磁した第１対物レンズ５の前方磁界によつてナノメータ
領域まで縮小され試料面上に照射される。試料８から発
生するＸ線などの信号は分析器10によつて受けられる。
第２対物レンズは弱励磁され、長焦点の拡大レンズとし
て作用する。第２試料ホールダ14は第２試料室12から抜
き取られる。第２試料微動装置は動作が停止される。FIG. 2 shows a case in which element analysis of a minute portion of the sample 8 is performed in this embodiment. The electron beam 3 is reduced to a nanometer region by the forward magnetic field of the converging lens 4 and the strongly excited first objective lens 5, and is irradiated on the sample surface. Signals such as X-rays generated from the sample 8 are received by the analyzer 10.
The second objective lens is weakly excited and acts as a long focal length magnifying lens. The second sample holder 14 is withdrawn from the second sample chamber 12. The operation of the second sample fine movement device is stopped.
第３図は試料中の原子配列などの超高分解能透過像を
観察する場合を示す。試料８は第２試料微動装置13に連
結された第２試料ホールダ14に固定される。第２対物レ
ンズによつて焦点合わせされた透過像は中間レンズ15に
よつて拡大される。第１試料ホールダ９は動作の停止し
た第１試料微動装置７から抜き取られる。第１対物レン
ズ５は試料８の電子線３による照射領域の調整に用い
る。FIG. 3 shows a case of observing an ultra-high resolution transmission image such as an atomic arrangement in a sample. The sample 8 is fixed to a second sample holder 14 connected to a second sample fine movement device 13. The transmitted image focused by the second objective lens is enlarged by the intermediate lens 15. The first sample holder 9 is removed from the first sample fine movement device 7 whose operation has been stopped. The first objective lens 5 is used for adjusting the irradiation area of the sample 8 with the electron beam 3.
第１対物レンズ５と第２対物レンズ11との使い分けは
上記の通りであるが、第１試料室６、第１試料ホールダ
９、第１試料微動装置７は反射Ｘ線や照射電子線などの
分析上弊害となるノイズの発生が少ないもので構成され
ている。また第一試料室６は分析器10を最適の位置に取
付けられるような構成を有している。Although the use of the first objective lens 5 and the second objective lens 11 is as described above, the first sample chamber 6, the first sample holder 9, and the first sample fine-movement device 7 are used for reflecting X-rays, irradiation electron beams, and the like. It is configured by a device that generates less noise that is harmful to the analysis. The first sample chamber 6 has such a structure that the analyzer 10 can be mounted at an optimum position.
これに対し第２対物レンズ11は像の分解能を最優先し
たものとなつており、第２試料ホールダ14,第２試料微
動装置13は試料８の機械的安定性を最優先した構造とな
つている。On the other hand, the second objective lens 11 has the highest priority given to the resolution of the image, and the second sample holder 14 and the second sample fine movement device 13 have the structure giving the highest priority to the mechanical stability of the sample 8. I have.
本発明によれば、１対の透過型電子顕微鏡にナノメー
タ領域の極微小部の元素分析などが可能な、いわゆる分
析電子顕微鏡と、原子配列などの超微細胞構造を観察す
るための超高分解能電子顕微鏡の、ふたつの装置の機能
を持たせることができる。これは装置購入費用、運転コ
スト、設置に必要な場所の広さなどを半減して、且つ従
来と同じ成果が得られることを意味する。According to the present invention, a so-called analytical electron microscope capable of performing elemental analysis of an extremely small portion in a nanometer region on a pair of transmission electron microscopes, and an ultra-high resolution for observing an ultrafine cell structure such as an atomic arrangement. It can have the functions of two devices of an electron microscope. This means that the equipment purchase cost, operation cost, space required for installation, and the like are halved, and the same results as in the past can be obtained.
また、従来の装置でも対物レンズ、試料室、試料微動
装置などを１式交換すれば１台の装置で分析用と超高分
解能用の両方に使い分けることができるが、レンズなど
の交換操作は複雑で、しかも両機能を十分発揮させるに
は熟練した技術者による調整が必要であり、一般ユーザ
ーの行なえる操作ではなかつた。本発明はそのような複
雑な操作からユーザーを開放する効果もある。In addition, if one set of the objective lens, sample chamber, sample fine movement device, etc. is replaced with a conventional device, one device can be used for both analysis and ultra-high resolution, but the operation of replacing lenses etc. is complicated. In addition, in order to fully exhibit both functions, it is necessary to make adjustments by a skilled technician, which is not an operation that can be performed by a general user. The present invention also has the effect of releasing the user from such complicated operations.
第１図は本発明の構成による透過型電子顕微鏡のレイア
ウトを示す図、第２図は分析用に用いられる場合の対物
レンズとその周辺の部品，装置のレイアウトを示す図、
第３図は超高分解能観察に用いられる場合のレイアウト
を示す図である。 ５……第１対物レンズ（分析用）、９……第１試料ホー
ルダ（分析用）、10……分析器（元素分析）、11……第
２対物レンズ（超高分解能用）、14……第２試料ホール
ダ（超高分解能用）。FIG. 1 is a diagram showing a layout of a transmission electron microscope according to the configuration of the present invention, FIG. 2 is a diagram showing a layout of an objective lens and its peripheral parts and devices when used for analysis,
FIG. 3 is a diagram showing a layout when used for ultra-high resolution observation. 5 First objective lens (for analysis), 9 First sample holder (for analysis), 10 Analyzer (elemental analysis), 11 Second objective lens (for ultra-high resolution), 14 ... Second sample holder (for ultra-high resolution).
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭52−128053（ＪＰ，Ａ) 特開 昭52−155961（ＪＰ，Ａ) 特開 昭52−10667（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 37/26 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-52-128053 (JP, A) JP-A-52-155961 (JP, A) JP-A-52-10667 (JP, A) (58) Field (Int.Cl. 7 , DB name) H01J 37/26
Claims (1)
子線を収束する収束レンズと、その下に置かれた試料室
と、当該試料室内に配置される試料への照射される電子
線の焦点合わせおよび像の拡大のための対物レンズと、
試料を透過した電子線を観察面に投射する投射レンズと
を備えた透過型電子顕微鏡において、前記収束レンズと
前記投射レンズとの間に、前記試料を移動させる試料微
動装置を２つ配置すると共に、当該２つの試料移動機構
によって移動される試料の夫々に対応する２つの対物レ
ンズが設けられてなることを特徴とする透過型電子顕微
鏡。An electron beam emitted from an electron gun, a converging lens for converging the electron beam, a sample chamber placed thereunder, and an electron beam irradiated to a sample placed in the sample chamber An objective lens for focusing and magnifying the image,
In a transmission electron microscope including a projection lens for projecting an electron beam transmitted through a sample onto an observation surface, two sample fine movement devices for moving the sample are arranged between the converging lens and the projection lens. A transmission electron microscope, comprising two objective lenses respectively corresponding to the samples moved by the two sample movement mechanisms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152741A JP3064335B2 (en) | 1990-06-13 | 1990-06-13 | Transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152741A JP3064335B2 (en) | 1990-06-13 | 1990-06-13 | Transmission electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0447653A JPH0447653A (en) | 1992-02-17 |
| JP3064335B2 true JP3064335B2 (en) | 2000-07-12 |
Family
ID=15547147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2152741A Expired - Fee Related JP3064335B2 (en) | 1990-06-13 | 1990-06-13 | Transmission electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3064335B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5449679B2 (en) * | 2008-02-15 | 2014-03-19 | 株式会社日立製作所 | Electron beam observation apparatus and sample observation method |
| JP2016112408A (en) * | 2014-12-10 | 2016-06-23 | 王子ホールディングス株式会社 | Absorbent article |
-
1990
- 1990-06-13 JP JP2152741A patent/JP3064335B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447653A (en) | 1992-02-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |