JPS6385860U - - Google Patents
Info
- Publication number
- JPS6385860U JPS6385860U JP18225386U JP18225386U JPS6385860U JP S6385860 U JPS6385860 U JP S6385860U JP 18225386 U JP18225386 U JP 18225386U JP 18225386 U JP18225386 U JP 18225386U JP S6385860 U JPS6385860 U JP S6385860U
- Authority
- JP
- Japan
- Prior art keywords
- scan stage
- sample holder
- angle scan
- electron
- axes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す装置の構成図
、第２図は同上装置に於る試料回動機構の一実施
例を示す斜視図、及び第３図は、電子マイクロプ
ローブ分析装置における従来の角度スキヤンステ
ージを示す説明図である。
５……二次電子検出器、６……吸収電流検出器
、１０……角度スキヤンステージ、１２，１４…
…回動枠、１５……試料ホルダ、１６……平行移
動台。
Fig. 1 is a configuration diagram of an apparatus showing an embodiment of the present invention, Fig. 2 is a perspective view showing an embodiment of the sample rotation mechanism in the same device, and Fig. 3 is an electron microprobe analysis device. FIG. 2 is an explanatory diagram showing a conventional angle scan stage. 5...Secondary electron detector, 6...Absorption current detector, 10...Angle scan stage, 12, 14...
... Rotation frame, 15 ... Sample holder, 16 ... Parallel movement table.
Claims (1)
持する機構と、電子ビームの照射点の位置変化を
補正する機構を備えてなる電子マイクロプローブ
分析装置用角度スキヤンステージ。 An angle scan stage for an electron microprobe analyzer, comprising a mechanism for rotatably supporting a sample holder in at least two axes, and a mechanism for correcting changes in the position of an irradiation point of an electron beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18225386U JPS6385860U (en) | 1986-11-26 | 1986-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18225386U JPS6385860U (en) | 1986-11-26 | 1986-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6385860U true JPS6385860U (en) | 1988-06-04 |
Family
ID=31127879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18225386U Pending JPS6385860U (en) | 1986-11-26 | 1986-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6385860U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042955A (en) * | 1990-04-19 | 1992-01-07 | Shimadzu Corp | Surface analyzer |
| JPH0424544A (en) * | 1990-05-18 | 1992-01-28 | Motohiro Iwami | Soft x-ray spectrochemical analysis apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039749A (en) * | 1983-08-12 | 1985-03-01 | Jeol Ltd | Scanning electron microscope |
-
1986
- 1986-11-26 JP JP18225386U patent/JPS6385860U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6039749A (en) * | 1983-08-12 | 1985-03-01 | Jeol Ltd | Scanning electron microscope |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH042955A (en) * | 1990-04-19 | 1992-01-07 | Shimadzu Corp | Surface analyzer |
| JPH0424544A (en) * | 1990-05-18 | 1992-01-28 | Motohiro Iwami | Soft x-ray spectrochemical analysis apparatus |