JPH02146U - - Google Patents
Info
- Publication number
- JPH02146U JPH02146U JP7765488U JP7765488U JPH02146U JP H02146 U JPH02146 U JP H02146U JP 7765488 U JP7765488 U JP 7765488U JP 7765488 U JP7765488 U JP 7765488U JP H02146 U JPH02146 U JP H02146U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- point
- tilt correction
- fixed
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図は本考案の一実施例の側断面図、第２図
は従来例の側断面図である。
ア…光学顕微鏡、イ…Ｘ線分光器、Ｓ…試料、
Ａ…試料面、Ｂ…移動面、１…対物レンズ、２…
補正ピン、３…試料ホルダー、４…傾斜補正台、
５…試料ホルダー、６…移動台、７…移動ガイド
。
FIG. 1 is a side sectional view of an embodiment of the present invention, and FIG. 2 is a side sectional view of a conventional example. A... Optical microscope, B... X-ray spectrometer, S... Sample,
A...Sample surface, B...Movement surface, 1...Objective lens, 2...
Correction pin, 3...sample holder, 4...tilt correction table,
5...Sample holder, 6...Movement table, 7...Movement guide.
Claims (1)
点を位置させて、試料面のその点の分析を行う分
析装置において、試料を直交３軸方向に移動させ
る移動手段と、上記装置に固定され上記移動手段
の直交２軸方向移動面と平行な基準面を形成する
当り部材と、上記移動手段に保持され上記直交２
軸を軸として回動可能に試料を保持する傾斜補正
手段とよりなることを特徴とする試料傾斜補正装
置。 In an analyzer that has a focal point at a fixed point, places a point on the sample surface at the focal point, and analyzes that point on the sample surface, a moving means for moving the sample in three orthogonal axes directions; a contact member that is fixed and forms a reference plane that is parallel to the orthogonal two-axis movement plane of the moving means;
A sample tilt correction device comprising a tilt correction means for holding a sample rotatably about a shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7765488U JPH02146U (en) | 1988-06-10 | 1988-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7765488U JPH02146U (en) | 1988-06-10 | 1988-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146U true JPH02146U (en) | 1990-01-05 |
Family
ID=31302627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7765488U Pending JPH02146U (en) | 1988-06-10 | 1988-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250758A (en) * | 2008-04-04 | 2009-10-29 | Nippon Steel Corp | Leveling tool of hardness measuring surface, and leveling method of hardness measuring surface |
-
1988
- 1988-06-10 JP JP7765488U patent/JPH02146U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009250758A (en) * | 2008-04-04 | 2009-10-29 | Nippon Steel Corp | Leveling tool of hardness measuring surface, and leveling method of hardness measuring surface |