JPH01136913U - - Google Patents

Info

Publication number
JPH01136913U
JPH01136913U JP3232688U JP3232688U JPH01136913U JP H01136913 U JPH01136913 U JP H01136913U JP 3232688 U JP3232688 U JP 3232688U JP 3232688 U JP3232688 U JP 3232688U JP H01136913 U JPH01136913 U JP H01136913U
Authority
JP
Japan
Prior art keywords
objective lens
reference mirror
optical path
predetermined position
tilting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3232688U
Other languages
Japanese (ja)
Other versions
JP2520950Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988032326U priority Critical patent/JP2520950Y2/en
Publication of JPH01136913U publication Critical patent/JPH01136913U/ja
Application granted granted Critical
Publication of JP2520950Y2 publication Critical patent/JP2520950Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の原理を説明するための光学系
の要部を示す図、第２図は本考案の実視例の断面
図、第３図は第２図のＡ―Ａ矢視断面図である。 主要部分の符号の説明、１……対物レンズ、２
……光路分割プリズム、３……標本、４……参照
ミラー、１１……外筒、１２……プリズム保持部
材、１４……ミラー保持部材、１６……円筒。 Fig. 1 is a diagram showing the main parts of an optical system for explaining the principle of the present invention, Fig. 2 is a cross-sectional view of an actual example of the present invention, and Fig. 3 is a cross-section taken along the line A--A in Fig. 2. It is a diagram. Explanation of symbols of main parts, 1...Objective lens, 2
... Optical path splitting prism, 3 ... Specimen, 4 ... Reference mirror, 11 ... Outer cylinder, 12 ... Prism holding member, 14 ... Mirror holding member, 16 ... Cylinder.

Claims (1)

【実用新案登録請求の範囲】 (1) 対物レンズと、該対物レンズ前方に配設し
た光路分割部材と、該光路分割部材の一方の分割
光路中に配設された参照ミラーと、該参照ミラー
の反射光と前記光路分割部材による他方の分割光
路中に配設された標本からの反射光とから生ずる
干渉縞の間隔、方向を調整するために前記参照ミ
ラーを傾角する装置とを有する二光束干渉用対物
レンズ装置において、前記傾角装置は、前記参照
ミラー表面の所定位置を前記対物レンズの合焦位
置に一致するように支持する支持部材を有し、前
記所定位置を中心として前記参照ミラーを回転す
るために、前記参照ミラーの保持部材と前記支持
部材との間に、前記所定位置を中心とした回転案
内面を形成したことを特徴とする二光束干渉用対
物レンズ装置。 (2) 前記所定位置は前記対物レンズの光軸と前
記参照ミラー表面との交点近傍であることを特徴
とする請求項(1)に記載の二光束干渉用対物レン
ズ装置。 (3) 前記対物レンズ装置は、さらに観察装置本
体への取付用部材を有すると共に、少なくとも前
記光路分割部材と前記参照ミラーと前記傾角装置
とを保持する保持鏡体が前記対物レンズの光軸を
中心として回転自在に前記取付用部材に係合して
いることを特徴とする請求項(1)に記載の二光束
干渉用対物レンズ装置。[Claims for Utility Model Registration] (1) An objective lens, an optical path splitting member disposed in front of the objective lens, a reference mirror disposed in one split optical path of the optical path splitting member, and the reference mirror. and a device for tilting the reference mirror in order to adjust the interval and direction of interference fringes generated from the reflected light from the sample and the reflected light from the specimen arranged in the other split optical path by the optical path splitting member. In the interference objective lens device, the tilting device includes a support member that supports a predetermined position on the surface of the reference mirror so as to coincide with a focal position of the objective lens, and the tilting device tilts the reference mirror around the predetermined position. An objective lens device for two-beam interference, characterized in that a rotation guide surface centered at the predetermined position is formed between the reference mirror holding member and the support member for rotation. (2) The objective lens device for two-beam interference according to claim 1, wherein the predetermined position is near the intersection of the optical axis of the objective lens and the surface of the reference mirror. (3) The objective lens device further includes a member for attachment to the observation device main body, and a holding mirror body that holds at least the optical path splitting member, the reference mirror, and the tilting device aligns the optical axis of the objective lens. 2. The objective lens device for two-beam interference according to claim 1, wherein the objective lens device is engaged with the mounting member so as to be rotatable about the center.
JP1988032326U 1988-03-11 1988-03-11 Objective lens for two-beam interference Expired - Lifetime JP2520950Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988032326U JP2520950Y2 (en) 1988-03-11 1988-03-11 Objective lens for two-beam interference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988032326U JP2520950Y2 (en) 1988-03-11 1988-03-11 Objective lens for two-beam interference

Publications (2)

Publication Number Publication Date
JPH01136913U true JPH01136913U (en) 1989-09-19
JP2520950Y2 JP2520950Y2 (en) 1996-12-18

Family

ID=31258750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988032326U Expired - Lifetime JP2520950Y2 (en) 1988-03-11 1988-03-11 Objective lens for two-beam interference

Country Status (1)

Country Link
JP (1) JP2520950Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193891A (en) * 1998-12-25 2000-07-14 Mitsutoyo Corp Two-beam interference objective lens device
JP2005156417A (en) * 2003-11-27 2005-06-16 Mitsutoyo Corp Optical interference unit, optical interference objective lens device and measuring apparatus
JP2018155836A (en) * 2017-03-16 2018-10-04 株式会社ミツトヨ Optical device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5574226B2 (en) * 2010-03-23 2014-08-20 株式会社ニコン Interference objective lens and microscope apparatus having the same
JP6461609B2 (en) 2015-01-05 2019-01-30 株式会社ミツトヨ Interference objective lens and optical interference measurement apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS533807U (en) * 1976-06-29 1978-01-13
JPS61149803A (en) * 1984-12-24 1986-07-08 Matsushita Electric Ind Co Ltd Interference measuring instrument

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS533807U (en) * 1976-06-29 1978-01-13
JPS61149803A (en) * 1984-12-24 1986-07-08 Matsushita Electric Ind Co Ltd Interference measuring instrument

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000193891A (en) * 1998-12-25 2000-07-14 Mitsutoyo Corp Two-beam interference objective lens device
JP2005156417A (en) * 2003-11-27 2005-06-16 Mitsutoyo Corp Optical interference unit, optical interference objective lens device and measuring apparatus
JP2018155836A (en) * 2017-03-16 2018-10-04 株式会社ミツトヨ Optical device

Also Published As

Publication number Publication date
JP2520950Y2 (en) 1996-12-18

Similar Documents

Publication Publication Date Title
JPH01136913U (en)
JPH0335510U (en)
JPH0227109U (en)
JPH046818U (en)
JPH0220821U (en)
JPH02146U (en)
JPH0211521U (en)
JPS6451854U (en)
JPS6335036U (en)
JPH02129811U (en)
JPS61203427U (en)
JPS62167210U (en)
JPH0319931U (en)
JPS6391818U (en)
JPH0246915U (en)
JPH01177724U (en)
JPS6218831U (en)
JPS62112233A (en) Optical pickup device
JPS6321901U (en)
JPH0160791U (en)
JPS6424529U (en)
JPS649208U (en)
JPH0187241U (en)
JPH01117610U (en)
JPS61195515U (en)