JPH01143119U - - Google Patents
Info
- Publication number
- JPH01143119U JPH01143119U JP3764588U JP3764588U JPH01143119U JP H01143119 U JPH01143119 U JP H01143119U JP 3764588 U JP3764588 U JP 3764588U JP 3764588 U JP3764588 U JP 3764588U JP H01143119 U JPH01143119 U JP H01143119U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- transfer device
- mounting plate
- wafer support
- fixing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Furnace Charging Or Discharging (AREA)
Description
第１図は、本考案の実施例を示すａ正面図、ｂ
側面図、ｃ平面図、第２図は、本考案の他の実施
例を示す平面図、第３図は、搬送装置の従来例を
示すａ正面図、ｂ側面図、ｃＡ―Ａ矢視断面図で
ある。
１…ボート（ウエハ支持具）、２…搬送装置、
３…ボート受け台、４…突起物、５…ボート載置
板、６…ボート固定部材、７…ボート支柱、８…
円柱、９…底板、１０…天板、１１…平板。
Figure 1 is a front view and b is a front view showing an embodiment of the present invention.
2 is a plan view showing another embodiment of the present invention, and FIG. 3 is a front view, b side view, and c A-A cross section showing a conventional example of the conveyance device. It is a diagram. 1...Boat (wafer support), 2...Transfer device,
3...Boat cradle, 4...Protrusion, 5...Boat mounting plate, 6...Boat fixing member, 7...Boat support, 8...
Cylinder, 9...bottom plate, 10...top plate, 11...flat plate.
Claims (1)
支持具を載せて搬送するボート載置板とボート固
定部材とボート支柱とから構成される搬送装置で
あつて、前記ボート載置板を平行な２つの長辺を
有する少なくとも１枚の平板で構成することを特
徴とするウエハ支持具の搬送装置。 A transfer device comprising a boat mounting plate, a boat fixing member, and a boat strut on which a wafer support to be accommodated in a vertical heat treatment furnace for semiconductor manufacturing is placed and transported, the boat mounting plate being mounted on two parallel 1. A wafer support transfer device comprising at least one flat plate having two long sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3764588U JPH01143119U (en) | 1988-03-24 | 1988-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3764588U JPH01143119U (en) | 1988-03-24 | 1988-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143119U true JPH01143119U (en) | 1989-10-02 |
Family
ID=31264224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3764588U Pending JPH01143119U (en) | 1988-03-24 | 1988-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143119U (en) |
-
1988
- 1988-03-24 JP JP3764588U patent/JPH01143119U/ja active Pending
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