JPH01136180U - - Google Patents
Info
- Publication number
- JPH01136180U JPH01136180U JP2671688U JP2671688U JPH01136180U JP H01136180 U JPH01136180 U JP H01136180U JP 2671688 U JP2671688 U JP 2671688U JP 2671688 U JP2671688 U JP 2671688U JP H01136180 U JPH01136180 U JP H01136180U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- fine adjustment
- thin film
- susceptor
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 8
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 4
- 230000003028 elevating effect Effects 0.000 claims 2
- 230000007246 mechanism Effects 0.000 claims 2
- 239000012071 phase Substances 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 239000006200 vaporizer Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000004718 Panda Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2671688U JPH01136180U (is) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2671688U JPH01136180U (is) | 1988-02-29 | 1988-02-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01136180U true JPH01136180U (is) | 1989-09-18 |
Family
ID=31248594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2671688U Pending JPH01136180U (is) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01136180U (is) |
-
1988
- 1988-02-29 JP JP2671688U patent/JPH01136180U/ja active Pending
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