JPH0158930U - - Google Patents
Info
- Publication number
- JPH0158930U JPH0158930U JP15498287U JP15498287U JPH0158930U JP H0158930 U JPH0158930 U JP H0158930U JP 15498287 U JP15498287 U JP 15498287U JP 15498287 U JP15498287 U JP 15498287U JP H0158930 U JPH0158930 U JP H0158930U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- cylindrical surface
- resistance heater
- cvd apparatus
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498287U JPH0158930U (is) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15498287U JPH0158930U (is) | 1987-10-09 | 1987-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0158930U true JPH0158930U (is) | 1989-04-13 |
Family
ID=31432196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15498287U Pending JPH0158930U (is) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0158930U (is) |
-
1987
- 1987-10-09 JP JP15498287U patent/JPH0158930U/ja active Pending