JPS63170472U - - Google Patents
Info
- Publication number
- JPS63170472U JPS63170472U JP6212487U JP6212487U JPS63170472U JP S63170472 U JPS63170472 U JP S63170472U JP 6212487 U JP6212487 U JP 6212487U JP 6212487 U JP6212487 U JP 6212487U JP S63170472 U JPS63170472 U JP S63170472U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- horizontal quartz
- single crystal
- support member
- gallium arsenide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000003779 heat-resistant material Substances 0.000 claims 1
- 239000003708 ampul Substances 0.000 description 3
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212487U JPS63170472U (is) | 1987-04-24 | 1987-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6212487U JPS63170472U (is) | 1987-04-24 | 1987-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170472U true JPS63170472U (is) | 1988-11-07 |
Family
ID=30896099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6212487U Pending JPS63170472U (is) | 1987-04-24 | 1987-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170472U (is) |
-
1987
- 1987-04-24 JP JP6212487U patent/JPS63170472U/ja active Pending