JPS6355532U - - Google Patents
Info
- Publication number
- JPS6355532U JPS6355532U JP14785286U JP14785286U JPS6355532U JP S6355532 U JPS6355532 U JP S6355532U JP 14785286 U JP14785286 U JP 14785286U JP 14785286 U JP14785286 U JP 14785286U JP S6355532 U JPS6355532 U JP S6355532U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- protrusions
- sealing plate
- supporting
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785286U JPH0143860Y2 (is) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785286U JPH0143860Y2 (is) | 1986-09-29 | 1986-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355532U true JPS6355532U (is) | 1988-04-14 |
| JPH0143860Y2 JPH0143860Y2 (is) | 1989-12-19 |
Family
ID=31061597
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14785286U Expired JPH0143860Y2 (is) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0143860Y2 (is) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07297145A (ja) * | 1995-03-02 | 1995-11-10 | Tokyo Electron Tohoku Ltd | 熱処理装置 |
-
1986
- 1986-09-29 JP JP14785286U patent/JPH0143860Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07297145A (ja) * | 1995-03-02 | 1995-11-10 | Tokyo Electron Tohoku Ltd | 熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0143860Y2 (is) | 1989-12-19 |