JPH01130562U - - Google Patents
Info
- Publication number
- JPH01130562U JPH01130562U JP2731788U JP2731788U JPH01130562U JP H01130562 U JPH01130562 U JP H01130562U JP 2731788 U JP2731788 U JP 2731788U JP 2731788 U JP2731788 U JP 2731788U JP H01130562 U JPH01130562 U JP H01130562U
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline silicon
- film
- resistor
- resistance element
- resistance value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 15
- 230000001681 protective effect Effects 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 239000012212 insulator Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Non-Adjustable Resistors (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2731788U JPH01130562U (enrdf_load_stackoverflow) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2731788U JPH01130562U (enrdf_load_stackoverflow) | 1988-03-01 | 1988-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130562U true JPH01130562U (enrdf_load_stackoverflow) | 1989-09-05 |
Family
ID=31249701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2731788U Pending JPH01130562U (enrdf_load_stackoverflow) | 1988-03-01 | 1988-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130562U (enrdf_load_stackoverflow) |
-
1988
- 1988-03-01 JP JP2731788U patent/JPH01130562U/ja active Pending
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