JPH01130539U - - Google Patents
Info
- Publication number
- JPH01130539U JPH01130539U JP2700588U JP2700588U JPH01130539U JP H01130539 U JPH01130539 U JP H01130539U JP 2700588 U JP2700588 U JP 2700588U JP 2700588 U JP2700588 U JP 2700588U JP H01130539 U JPH01130539 U JP H01130539U
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- boat
- held
- pusher unit
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700588U JPH0310672Y2 (en:Method) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2700588U JPH0310672Y2 (en:Method) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01130539U true JPH01130539U (en:Method) | 1989-09-05 |
| JPH0310672Y2 JPH0310672Y2 (en:Method) | 1991-03-15 |
Family
ID=31249135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2700588U Expired JPH0310672Y2 (en:Method) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310672Y2 (en:Method) |
-
1988
- 1988-02-29 JP JP2700588U patent/JPH0310672Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0310672Y2 (en:Method) | 1991-03-15 |
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