JPS62201639U - - Google Patents
Info
- Publication number
- JPS62201639U JPS62201639U JP1986089241U JP8924186U JPS62201639U JP S62201639 U JPS62201639 U JP S62201639U JP 1986089241 U JP1986089241 U JP 1986089241U JP 8924186 U JP8924186 U JP 8924186U JP S62201639 U JPS62201639 U JP S62201639U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- vacuum chuck
- guide pins
- receiving
- rocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986089241U JPS62201639U (en:Method) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986089241U JPS62201639U (en:Method) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62201639U true JPS62201639U (en:Method) | 1987-12-22 |
Family
ID=30948052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986089241U Pending JPS62201639U (en:Method) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62201639U (en:Method) |
-
1986
- 1986-06-13 JP JP1986089241U patent/JPS62201639U/ja active Pending