JPH01173943U - - Google Patents
Info
- Publication number
- JPH01173943U JPH01173943U JP7094888U JP7094888U JPH01173943U JP H01173943 U JPH01173943 U JP H01173943U JP 7094888 U JP7094888 U JP 7094888U JP 7094888 U JP7094888 U JP 7094888U JP H01173943 U JPH01173943 U JP H01173943U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- base
- semiconductor wafers
- disposed
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094888U JPH01173943U (en:Method) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094888U JPH01173943U (en:Method) | 1988-05-27 | 1988-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173943U true JPH01173943U (en:Method) | 1989-12-11 |
Family
ID=31296161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7094888U Pending JPH01173943U (en:Method) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173943U (en:Method) |
-
1988
- 1988-05-27 JP JP7094888U patent/JPH01173943U/ja active Pending
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