JPH01130538U - - Google Patents

Info

Publication number
JPH01130538U
JPH01130538U JP2700488U JP2700488U JPH01130538U JP H01130538 U JPH01130538 U JP H01130538U JP 2700488 U JP2700488 U JP 2700488U JP 2700488 U JP2700488 U JP 2700488U JP H01130538 U JPH01130538 U JP H01130538U
Authority
JP
Japan
Prior art keywords
boat
wafer
semiconductor wafer
semiconductor
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2700488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249717Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2700488U priority Critical patent/JPH0249717Y2/ja
Publication of JPH01130538U publication Critical patent/JPH01130538U/ja
Application granted granted Critical
Publication of JPH0249717Y2 publication Critical patent/JPH0249717Y2/ja
Expired legal-status Critical Current

Links

JP2700488U 1988-02-29 1988-02-29 Expired JPH0249717Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2700488U JPH0249717Y2 (OSRAM) 1988-02-29 1988-02-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2700488U JPH0249717Y2 (OSRAM) 1988-02-29 1988-02-29

Publications (2)

Publication Number Publication Date
JPH01130538U true JPH01130538U (OSRAM) 1989-09-05
JPH0249717Y2 JPH0249717Y2 (OSRAM) 1990-12-27

Family

ID=31249133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2700488U Expired JPH0249717Y2 (OSRAM) 1988-02-29 1988-02-29

Country Status (1)

Country Link
JP (1) JPH0249717Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0249717Y2 (OSRAM) 1990-12-27

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