JPH01124924U - - Google Patents
Info
- Publication number
- JPH01124924U JPH01124924U JP1916288U JP1916288U JPH01124924U JP H01124924 U JPH01124924 U JP H01124924U JP 1916288 U JP1916288 U JP 1916288U JP 1916288 U JP1916288 U JP 1916288U JP H01124924 U JPH01124924 U JP H01124924U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- film forming
- forming chamber
- disk
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 3
- 238000004544 sputter deposition Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000010409 thin film Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1916288U JPH01124924U (enExample) | 1988-02-16 | 1988-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1916288U JPH01124924U (enExample) | 1988-02-16 | 1988-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124924U true JPH01124924U (enExample) | 1989-08-25 |
Family
ID=31234428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1916288U Pending JPH01124924U (enExample) | 1988-02-16 | 1988-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124924U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144475A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Sputtering apparatus |
-
1988
- 1988-02-16 JP JP1916288U patent/JPH01124924U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53144475A (en) * | 1977-05-23 | 1978-12-15 | Hitachi Ltd | Sputtering apparatus |
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