JPH01118435U - - Google Patents

Info

Publication number
JPH01118435U
JPH01118435U JP1258388U JP1258388U JPH01118435U JP H01118435 U JPH01118435 U JP H01118435U JP 1258388 U JP1258388 U JP 1258388U JP 1258388 U JP1258388 U JP 1258388U JP H01118435 U JPH01118435 U JP H01118435U
Authority
JP
Japan
Prior art keywords
optical system
projection lens
exposure apparatus
wavelength plate
target mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1258388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1258388U priority Critical patent/JPH01118435U/ja
Publication of JPH01118435U publication Critical patent/JPH01118435U/ja
Pending legal-status Critical Current

Links

JP1258388U 1988-02-03 1988-02-03 Pending JPH01118435U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1258388U JPH01118435U (US06623731-20030923-C00012.png) 1988-02-03 1988-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1258388U JPH01118435U (US06623731-20030923-C00012.png) 1988-02-03 1988-02-03

Publications (1)

Publication Number Publication Date
JPH01118435U true JPH01118435U (US06623731-20030923-C00012.png) 1989-08-10

Family

ID=31222148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1258388U Pending JPH01118435U (US06623731-20030923-C00012.png) 1988-02-03 1988-02-03

Country Status (1)

Country Link
JP (1) JPH01118435U (US06623731-20030923-C00012.png)

Similar Documents

Publication Publication Date Title
JPH01118435U (US06623731-20030923-C00012.png)
JPS6468926A (en) Measurement of image distortion in projection optical system
JPH044479U (US06623731-20030923-C00012.png)
JPS63150920U (US06623731-20030923-C00012.png)
KR960026075A (ko) 웨이퍼 스텝퍼에서 정렬광의 경사조명에 의한 웨이퍼 정렬방법과 그 장치
JPH0374310U (US06623731-20030923-C00012.png)
JPH01115236U (US06623731-20030923-C00012.png)
JPH02102720U (US06623731-20030923-C00012.png)
JPS6382933U (US06623731-20030923-C00012.png)
JPS60166144U (ja) 投影露光装置
JPS6473617A (en) Aligning method of projection system
JPS6082208U (ja) 被測定面の位置測定装置
JPS6432624A (en) Aligner
JPS607006U (ja) 偏光分光計による膜厚測定装置
JPS60173913U (ja) 焦点検出装置
JPS6059104U (ja) 光学式機械量測定装置
JPH0224843U (US06623731-20030923-C00012.png)
JPH03119816U (US06623731-20030923-C00012.png)
JPH0164007U (US06623731-20030923-C00012.png)
JPH0392029U (US06623731-20030923-C00012.png)
JPS6033342U (ja) フィルム拡大装置
JPS62201741U (US06623731-20030923-C00012.png)
JPS63150921U (US06623731-20030923-C00012.png)
JPS5885339U (ja) 縮小投影露光装置
JPS6236532U (US06623731-20030923-C00012.png)