JPH0111720Y2 - - Google Patents

Info

Publication number
JPH0111720Y2
JPH0111720Y2 JP10288785U JP10288785U JPH0111720Y2 JP H0111720 Y2 JPH0111720 Y2 JP H0111720Y2 JP 10288785 U JP10288785 U JP 10288785U JP 10288785 U JP10288785 U JP 10288785U JP H0111720 Y2 JPH0111720 Y2 JP H0111720Y2
Authority
JP
Japan
Prior art keywords
trap
airtight container
plasma cvd
liquid nitrogen
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10288785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211174U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10288785U priority Critical patent/JPH0111720Y2/ja
Publication of JPS6211174U publication Critical patent/JPS6211174U/ja
Application granted granted Critical
Publication of JPH0111720Y2 publication Critical patent/JPH0111720Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10288785U 1985-07-08 1985-07-08 Expired JPH0111720Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10288785U JPH0111720Y2 (enExample) 1985-07-08 1985-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10288785U JPH0111720Y2 (enExample) 1985-07-08 1985-07-08

Publications (2)

Publication Number Publication Date
JPS6211174U JPS6211174U (enExample) 1987-01-23
JPH0111720Y2 true JPH0111720Y2 (enExample) 1989-04-06

Family

ID=30974938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10288785U Expired JPH0111720Y2 (enExample) 1985-07-08 1985-07-08

Country Status (1)

Country Link
JP (1) JPH0111720Y2 (enExample)

Also Published As

Publication number Publication date
JPS6211174U (enExample) 1987-01-23

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