JPS6211174U - - Google Patents
Info
- Publication number
- JPS6211174U JPS6211174U JP10288785U JP10288785U JPS6211174U JP S6211174 U JPS6211174 U JP S6211174U JP 10288785 U JP10288785 U JP 10288785U JP 10288785 U JP10288785 U JP 10288785U JP S6211174 U JPS6211174 U JP S6211174U
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- trap
- valve
- plasma cvd
- monitoring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 239000007788 liquid Substances 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 7
- 238000012806 monitoring device Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims 3
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10288785U JPH0111720Y2 (enExample) | 1985-07-08 | 1985-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10288785U JPH0111720Y2 (enExample) | 1985-07-08 | 1985-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211174U true JPS6211174U (enExample) | 1987-01-23 |
| JPH0111720Y2 JPH0111720Y2 (enExample) | 1989-04-06 |
Family
ID=30974938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10288785U Expired JPH0111720Y2 (enExample) | 1985-07-08 | 1985-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0111720Y2 (enExample) |
-
1985
- 1985-07-08 JP JP10288785U patent/JPH0111720Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0111720Y2 (enExample) | 1989-04-06 |
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