JPH01115562A - Superfinish device - Google Patents

Superfinish device

Info

Publication number
JPH01115562A
JPH01115562A JP62267945A JP26794587A JPH01115562A JP H01115562 A JPH01115562 A JP H01115562A JP 62267945 A JP62267945 A JP 62267945A JP 26794587 A JP26794587 A JP 26794587A JP H01115562 A JPH01115562 A JP H01115562A
Authority
JP
Japan
Prior art keywords
roller
polishing film
workpiece
contact roller
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62267945A
Other languages
Japanese (ja)
Inventor
Tetsuya Shirota
代田 哲也
Toshio Kikuchi
利夫 菊地
Masahiro Yamaguchi
雅弘 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyosan Electric Manufacturing Co Ltd
Original Assignee
Kyosan Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyosan Electric Manufacturing Co Ltd filed Critical Kyosan Electric Manufacturing Co Ltd
Priority to JP62267945A priority Critical patent/JPH01115562A/en
Publication of JPH01115562A publication Critical patent/JPH01115562A/en
Pending legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To ensure the straightforwardness of worked surface of a workpiece and improve the finished surface by providing a means for holding the supply side polishing film and the take-up side polishing film respectively with pinching frictional forces on a vibration head for vibrating axially a hard roller. CONSTITUTION:A polishing film 40 is trained over a hard contact roller 50 and pressed against a workpiece W rotating clockwise. Then, the roller 50 is axially vibrated by a vibration head while the polishing film 40 is taken up to vibrate and polish the worked surface of workpiece W while maintaining the straightforwardness of workpiece. Then, push rollers (frictional holding means) 51, 52 provided on the vibration head are pressed against the contact roller 50 so that the polishing film 40 semicircularly passing by the contact roller 50 contacts completely intimately the hard contact roller 50 to increase the contact resistance force of both 40, 50 larger than the polishing resistance force of workpiece W. Thus, the worked surface can be always ground into a satisfactory finished surface without directional properties.

Description

【発明の詳細な説明】 「産業上の利用分野」 本発明は、ワークがゴム等の軟質であって、特に被加工
面が丸い面の超仕上げに使用する超仕上装置に関する。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a superfinishing apparatus used for superfinishing a workpiece made of soft material such as rubber, and particularly a round surface to be machined.

「発明の背景」 超仕上装置は、常に安定した加工能率と精度とか得られ
ると共に、取扱いが容易な使い捨て工具方式であるため
熟練を要しない特徴がある。
``Background of the Invention'' Superfinishing equipment has the characteristic that it always provides stable machining efficiency and precision, and does not require any skill because it is a disposable tool system that is easy to handle.

一般的な超仕上装置としては、例えば第10図および第
11図に示すようなものがある。
As a general superfinishing device, there is one shown in FIGS. 10 and 11, for example.

すなわち、ワークである丸材lを臨む位置に、研磨フィ
ルム2を巻き掛けたコンタクトローラ3が配設されてお
り、研磨フィルム2は薄いポリエステルフィルム上に十
分に管理された砥粒が均一に分散塗布されており、コン
タクトローラ3は一般にはゴム質弾性体でつくられてい
る。研磨フィルム2の裏面より被加工面へ軽く押し付け
て、第10図における丸材lのA方向の回転、コンタク
トローラ3と研磨フィルム2とのB方向の振動および研
磨フィルム2のC方向の巻き取りにより面仕上げは進め
られ、動作時の研磨フィルム2の研削粒子の軌跡1aは
第1θ図において破線で示すような波形であり、従って
仕上げ面には方向性がない。
That is, a contact roller 3 wrapped with an abrasive film 2 is placed at a position facing the round material l that is the workpiece, and the abrasive film 2 is a thin polyester film coated with well-controlled abrasive grains that are uniformly dispersed. The contact roller 3 is generally made of a rubber elastic body. By lightly pressing the back surface of the polishing film 2 against the surface to be processed, rotating the round material l in the A direction in FIG. 10, vibrating the contact roller 3 and the polishing film 2 in the B direction, and winding the polishing film 2 in the C direction. Surface finishing is progressing, and the locus 1a of the abrasive particles of the polishing film 2 during operation has a waveform as shown by the broken line in FIG. 1θ, and therefore the finished surface has no directionality.

第11図は超仕上げ装置の構成の略図で、研磨フィルム
5か供給スプール4から案内ローラ6゜7,8.9を経
て巻取りスプールlOに巻き回されており、可動支持金
具11にコンタクトローラ12が取付けられ、空圧シリ
ンダ19で動作するようになっている。振動ヘッドフレ
ーム17が案内軸13.14,15.16に移動可能に
支持され、モータ18により振動駆動される。工作丸材
Wか旋盤に取付けられており、工作丸材Wを臨んで旋盤
のテーブルTのクロススライドに超仕上装置が装着され
ている。
FIG. 11 is a schematic diagram of the configuration of the superfinishing device, in which the polishing film 5 is wound from the supply spool 4 to the take-up spool IO via guide rollers 6°7, 8.9, and the contact roller is attached to the movable support 11. 12 is attached and operated by a pneumatic cylinder 19. A vibrating head frame 17 is movably supported on guide shafts 13.14, 15.16 and is vibrated and driven by a motor 18. A round work piece W is attached to a lathe, and a super finishing device is attached to a cross slide of a table T of the lathe facing the round work piece W.

前記超仕上装置においては、コンタクトローラ12と研
磨フィルム5との振動動作の一致が要求され、工作丸材
Wの被工作面との研磨抵抗力よりコンタクトローラ12
と研磨フィルム5裏面との接触抵抗力の方が大きいこと
が条件となる。
In the above-mentioned super finishing device, the contact roller 12 and the polishing film 5 are required to match their vibrational movements, and the contact roller 12 is
The condition is that the contact resistance between the surface and the back surface of the polishing film 5 is greater.

従来は金属材料等の硬質のワークの超仕上げの要求が多
く、コンタクトローラ12としてゴム等の軟質のものを
使用することにより、上記の条件を満足していた。
Conventionally, there have been many demands for super finishing of hard workpieces such as metal materials, and the above conditions have been satisfied by using a soft material such as rubber as the contact roller 12.

近年、軟質のワークの超仕上げが求められるようになっ
てきた。
In recent years, there has been a demand for super finishing of soft workpieces.

「発明か解決しようとする問題点」 しかしながら、従来の一般的な超仕上!置では、コンタ
クトローラ12がゴム等の軟質であるので、ワークが軟
質のものであると、被工作面の真直度を確保することが
できないという問題点かあった。
``Invention or problem to be solved'' However, conventional general super finishing! In this case, since the contact roller 12 is made of soft material such as rubber, there is a problem that if the workpiece is soft, the straightness of the work surface cannot be ensured.

また、単にコンタクトローラ12を硬質のものにすると
、前記研磨抵抗力と接触抵抗力との大小関係が不安定と
なるので、適切な超仕上をすることができないという問
題点があった。
Furthermore, if the contact roller 12 is simply made of a hard material, the magnitude relationship between the polishing resistance force and the contact resistance force becomes unstable, which poses the problem that appropriate superfinishing cannot be achieved.

本発明はこのような問題点に着目してなされたもので、
ワークの被工作面の真直度を確保するとともに、適切な
研磨をすることができる超仕上装置を提供することにあ
る。
The present invention was made by focusing on these problems.
It is an object of the present invention to provide a super-finishing device that can ensure the straightness of the work surface of a workpiece and perform appropriate polishing.

「問題点を解決するための手段」 かかる目的を達成するための本発明の要旨とするところ
は。
"Means for Solving the Problems" What is the gist of the present invention to achieve these objects?

供給された研磨フィルムを硬質のローラに巻き掛け、該
巻き掛けた部分を軟質のワークに押し付けるとともに、
前記ローラの軸方向に振動してワークを研磨し、使用済
の研磨フィルムを巻き取るようにした超仕上装置であっ
て、 前記ローラを軸方向に振動する振動ヘッドに、前記ロー
ラを中心にして供給側の研磨フィルムと巻取り側の研磨
フィルムとをそれぞれ挟み込んで摩擦力で保持する摩擦
保持手段を配設したことを特徴とする超仕上装置に存す
る。
The supplied polishing film is wrapped around a hard roller, and the wrapped portion is pressed against a soft workpiece,
A super-finishing device that polishes a workpiece by vibrating the roller in the axial direction and winding up the used polishing film, the apparatus comprising: a vibrating head that vibrates the roller in the axial direction; The present invention resides in a super-finishing device characterized by being provided with friction holding means for sandwiching and holding the polishing film on the supply side and the polishing film on the winding side by frictional force.

「作用」 ローラを硬質のものにしたので、ワークの被工作面の振
動研磨における真直度を確保することがてきる。
``Operation'' Since the roller is made of a hard material, the straightness of the surface to be worked on during vibration polishing can be ensured.

また摩擦保持手段により、軟質のワークの振動研磨に際
して、研磨フィルムが硬質のローラに密着し、ローラと
研磨フィルムとの接触抵抗が増大し、ワークの研磨抵抗
より大きくなり、研磨フィルムがローラからずれること
なく振動動作が一致するので、仕上げ面に方向性がない
振動研磨の効果が保たれるものである。
In addition, due to the friction holding means, during vibration polishing of a soft workpiece, the polishing film comes into close contact with the hard roller, and the contact resistance between the roller and the polishing film increases and becomes greater than the polishing resistance of the workpiece, causing the polishing film to shift from the roller. Since the vibration motions coincide without any deviation, the effect of vibration polishing, which has no directionality on the finished surface, can be maintained.

「実施例」 以下、第8図および第9図に基づき本発明の実施例にお
ける超仕上装置の基本的な構成を説明する。
"Embodiment" The basic configuration of a superfinishing apparatus in an embodiment of the present invention will be described below with reference to FIGS. 8 and 9.

第8図ξよび第9図に示すように、本体フレーム46に
は、転動軸38により供給スプール37が回転可能に枢
着され、駆動軸39により巻き取りスプール36が回転
可能に枢着されている。研磨フィルム40が案内ローラ
22,23,24゜25を経て巻き取りスプール36に
巻き回されており、駆動軸39に固着したベルト歯車3
5とモータ33側とに歯付ベルト34が巻き掛けられて
おり、研磨フィルム40はモータ33により低速度で巻
き取られるようになっている。
As shown in FIGS. 8 and 9, a supply spool 37 is rotatably connected to the main frame 46 by a rolling shaft 38, and a take-up spool 36 is rotatably connected to the main body frame 46 by a drive shaft 39. ing. A polishing film 40 is wound around a take-up spool 36 via guide rollers 22, 23, 24° 25, and a belt gear 3 fixed to a drive shaft 39.
A toothed belt 34 is wound around the polishing film 5 and the motor 33 side, and the polishing film 40 is wound up by the motor 33 at a low speed.

本体フレーム46と軸端固定板47との間に架設した4
木の案内軸27.28,29.30に。
4 installed between the main body frame 46 and the shaft end fixing plate 47
Wooden guide shafts 27.28, 29.30.

振動ヘッドフレーム26が軸方向へ移動可能に支えられ
ている。振動ヘットフレーム26の中央には、空圧シリ
ンダ31.ピストンロッド連結金具32およびコンタク
トローラ取付は可動金具21が連結して配設されており
、コンタクト口−ラ20は空圧により所定動程たけ突出
し、被工作面との間隔および押圧状態が自動的に調節さ
れるようになっている。
A vibrating head frame 26 is supported so as to be movable in the axial direction. At the center of the vibrating head frame 26, a pneumatic cylinder 31. The piston rod connecting fitting 32 and the contact roller mounting are connected with the movable fitting 21, and the contact hole 20 is protruded a predetermined distance by air pressure, and the distance from the work surface and the pressing state are automatically adjusted. It is designed to be adjusted to

本体フレーム46の上板に振動駆動用モータ41か下向
きに置かれ、カップリング42を介して中間軸43に接
続されており、中間軸43の下方軸端は偏心軸となって
おり、連結稈44が外嵌されている。連結稈44と振動
ヘッドフレーム26の側面に取付けた接続金具45とが
ピン結合されており、それにより振動ヘットフレーム2
6か振動駆動され、コンタクトローラ20も振動するよ
うに構成されている。
A vibration drive motor 41 is placed facing downward on the upper plate of the main body frame 46 and is connected to an intermediate shaft 43 via a coupling 42. The lower shaft end of the intermediate shaft 43 is an eccentric shaft, and the connecting culm 44 is fitted on the outside. The connecting culm 44 and a connecting fitting 45 attached to the side surface of the vibrating head frame 26 are connected by pins, so that the vibrating head frame 2
6 is driven to vibrate, and the contact roller 20 is also configured to vibrate.

以上超仕上装置においては、前記第11図で説明の如く
、本体フレーム46の基板が図示省略した旋盤テーブル
のクロススライドに固定され、ワークWか旋盤で回転さ
れるので、旋盤の付属工具であるか、量産に対しては専
用機化されるものである。
In the above-mentioned super-finishing apparatus, as explained in FIG. 11, the base plate of the main body frame 46 is fixed to the cross slide of the lathe table (not shown), and the workpiece W is rotated by the lathe, so it is an accessory tool of the lathe. Or, it will be made into a special machine for mass production.

次に、第1図〜第7図に基づき本発明の実施例に係る超
仕上装置の特徴となる構成を説明する。
Next, the characteristic structure of the superfinishing apparatus according to the embodiment of the present invention will be explained based on FIGS. 1 to 7.

第1図〜第5図は本発明の第1実施例を示している。1 to 5 show a first embodiment of the present invention.

第1実施例に係る超仕上装置は、第8図及び第9図を用
いて前述した基本的な構成のコンタクトローラ20の近
傍を改造したものである。
The superfinishing apparatus according to the first embodiment has the basic structure described above with reference to FIGS. 8 and 9, but the vicinity of the contact roller 20 has been modified.

すなわち、第3図に示すように基本的な構成は、研磨フ
ィルム40が供給スプール37から案内ローラ22,2
3,24.25を経て巻き取りスプール36に巻き回さ
れており、可動金具53にコンタクトローラ50が取付
けられている。
That is, as shown in FIG.
3, 24, and 25, and is wound around a take-up spool 36, and a contact roller 50 is attached to a movable metal fitting 53.

コンタクトローラ50は研磨フィルム40を真直に受担
する目的で金属製のいわゆる剛体である。
The contact roller 50 is a so-called rigid body made of metal for the purpose of supporting the polishing film 40 in a straight manner.

第4図に示すように、可動金具53はコ字状の腕部を有
しており、腕部にコンタクトローラ50が回転可能に支
持され、コンタクトローラ50は所定動程をもつ。
As shown in FIG. 4, the movable metal fitting 53 has a U-shaped arm portion, and a contact roller 50 is rotatably supported by the arm portion, and the contact roller 50 has a predetermined movement range.

第1図に示すように、可動金具53の腕部は1字状に形
成され、上下方向に張り出したアーム53a、53bの
各端部にはU字状の切り込み溝53c、53dか刻設さ
れている。切り込み溝53cには押しローラ51の両端
部の切り込み51aが嵌められ、切り込み溝53dには
押しローラ52の両端部の切り込み52aが嵌められ。
As shown in FIG. 1, the arm portion of the movable metal fitting 53 is formed in a single character shape, and U-shaped notch grooves 53c and 53d are carved in each end of the vertically projecting arms 53a and 53b. ing. The notches 51a at both ends of the push roller 51 are fitted into the cut grooves 53c, and the notches 52a at both ends of the push roller 52 are fitted into the cut grooves 53d.

それにより押しローラ51,52が支持されており、コ
ンタクトローラ50の中心方向への移動余裕が設けられ
ている。
The push rollers 51 and 52 are thereby supported, and a margin for movement of the contact roller 50 toward the center is provided.

第1図〜第4図に示すように、押しローラ51.52か
上下方向より差し込まれ、共通のビンボルト57が端部
取付は孔51b、52bに貫通され、押しローラ51,
52をコンタクトローラ50の中心方向へ付勢する圧縮
ばね54が座金55および蝶ねじ56で組み付けられて
いる。
As shown in FIGS. 1 to 4, the push rollers 51 and 52 are inserted from above and below, and the common pin bolts 57 are passed through the holes 51b and 52b for end attachment, and the push rollers 51 and 52 are inserted from the top and bottom.
A compression spring 54 that urges the contact roller 52 toward the center of the contact roller 50 is assembled with a washer 55 and a thumbscrew 56.

第5図に示すように、押しローラ51,52はそれぞれ
円筒状の本体にゴム等の弾性体が外嵌して成る。
As shown in FIG. 5, each of the push rollers 51 and 52 has a cylindrical body and an elastic body such as rubber is fitted onto the outside of the body.

すなわち、摩擦保持手段は、圧縮ばね54が押しローラ
51,52をコンタクトローラ50の中心方向へ付勢し
て成る。
That is, the friction holding means is formed by a compression spring 54 urging the push rollers 51 and 52 toward the center of the contact roller 50.

次に作用を説明する。Next, the effect will be explained.

第1図に示すように、コンタクトローラ5oに研磨フィ
ルム40を巻きかけ、時計方向に回転するワークWに押
し付け、コンタクトローラ5oの軸方向に振動するとと
もに、矢印方向に巻き取り研磨を行なう。
As shown in FIG. 1, the polishing film 40 is wound around the contact roller 5o, pressed against the workpiece W rotating clockwise, vibrated in the axial direction of the contact roller 5o, and wound and polished in the direction of the arrow.

コンタクトローラ50を硬質のものにしたので、軟質の
被工作面の振動研磨においても面の真直度が保たれ、振
動効果すなわち無方向性仕上げ面を得ることができる。
Since the contact roller 50 is made of a hard material, the straightness of the surface can be maintained even during vibration polishing of a soft work surface, and a vibration effect, that is, a non-directional finished surface can be obtained.

研磨中において、押しローラ51,52をコンタクトロ
ーラ50に押圧するようにしたのて、研磨フィルム40
が挟み込まれ、コンタクトローラ50を半円状に通過す
る研磨フィルム4oはこの間は完全に硬質のコンタクト
ローラ5oに密着し、コンタクトローラ50と研磨フィ
ルム4oとの接触抵抗力か増大し、ワークWの研磨抵抗
力より大きくなり、ワークWの振動研磨中に研磨フィル
ム40がコンタクトローラ50側に引き込まれることか
なく、仕上げ面に方向性がない振動研磨の効果を保つこ
とができる。
During polishing, the push rollers 51 and 52 are pressed against the contact roller 50, and then the polishing film 40 is
During this period, the polishing film 4o, which is sandwiched between the contact rollers 50 and 50 and passing through the contact roller 50 in a semicircular manner, is in close contact with the completely hard contact roller 5o, and the contact resistance between the contact roller 50 and the polishing film 4o increases, and the workpiece W is The polishing resistance force becomes larger than the polishing resistance force, and the polishing film 40 is not drawn toward the contact roller 50 during vibration polishing of the workpiece W, and the effect of vibration polishing without directionality on the finished surface can be maintained.

押しローラ51.52を設けたことにより研磨フィルム
40の巻き取り力は少し増加し、また圧縮ばね54の調
整により増減する。
The winding force of the polishing film 40 is slightly increased by providing the push rollers 51, 52, and can be increased or decreased by adjusting the compression spring 54.

第6図および第7図は本発明の第2実施例を示している
6 and 7 show a second embodiment of the invention.

第1実施例に係る超仕上装置との相違点は、摩擦保持手
段にあり、供給側の研磨フィルム40を案内ローラ22
と押しローラ61とて押え、巻取り側の研磨フィルム4
0を案内ローラ23と押しローラ62とで押さえた点に
ある。
The difference from the super-finishing apparatus according to the first embodiment lies in the friction holding means, and the polishing film 40 on the supply side is moved between the guide rollers 22 and 22.
Press the pressing roller 61 and press the polishing film 4 on the winding side.
0 is held down by the guide roller 23 and the push roller 62.

振動ヘットの側板67には、案内ローラ22゜23に相
当する位置から上下方向にそれぞれ張り出し部67a、
67bが形成され、張り出し部67a、67bには0字
状の切り込み@ 67 c 。
The side plate 67 of the vibrating head has projecting portions 67a and 67a extending vertically from positions corresponding to the guide rollers 22 and 23, respectively.
67b is formed, and a 0-shaped notch @67c is formed in the overhanging portions 67a and 67b.

67dか刻設されており、切り込み溝67cには押しロ
ーラ61の両端部の切り込み61aが嵌められ、切り込
み溝67dには押しローラ62の両端部の切り込み62
aが嵌められている。
The notches 61a at both ends of the push roller 61 are fitted into the cut grooves 67c, and the notches 62 at both ends of the push roller 62 are fitted into the cut grooves 67d.
A is fitted.

案内ローラ22に押しローラ61を押圧すべく圧縮ばね
65がピンボルト64および蝶ねじ66で装着されてお
り、同じように案内ローラ23に押しローラ62を押圧
すべく圧縮ばね65かピンボルト64および蝶ねじ66
で装着されている。
A compression spring 65 is attached to the guide roller 22 with a pin bolt 64 and a thumb screw 66 to press the push roller 61, and similarly, a compression spring 65 or a pin bolt 64 and a thumb screw are attached to the guide roller 23 to press the push roller 62. 66
It is installed with.

押しローラ61,62の調整は別々に行われるようにな
っている。コンタクトローラ60は可動保持金具63に
取付けられ、金属製のいわゆる剛体である。
The push rollers 61 and 62 are adjusted separately. The contact roller 60 is attached to a movable holding fitting 63 and is a so-called rigid body made of metal.

これにより、巻き取り時および振動動作時において、コ
ンタクトローラ60と研磨フィルム4゜との密着は一組
の押しローラ61.62により常に適切に保たれるもの
である。
Thereby, during winding and vibration operation, the contact roller 60 and the polishing film 4° are always kept in close contact with each other by the pair of push rollers 61 and 62.

「発明の効果」 本発明に係る超仕上装置によれば、軟質のワークの超仕
上げにおける真直度を確保するとともに、振動研磨にお
ける無方向性仕上げ面を得ることができ、所定の品質の
製品を安定して得ることができる。
"Effects of the Invention" According to the super-finishing device of the present invention, it is possible to ensure straightness in super-finishing a soft workpiece, and to obtain a non-directional finished surface in vibration polishing, thereby producing a product of a predetermined quality. can be obtained stably.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第5図は本発明の第1実施例を示しており、第
1図はコンタクトローラの近傍を示す部分側面図、第2
図は同じく部分正面図・第3図は超仕上装置の側面図、
第4図はコンタクトローラの近傍を示す部分平面図、第
5図は押しローラの詳細断面図、第6図および第7図は
本発明の第2実施例を示しており、第6図はコンタクト
ローラの近傍を余す部分側面図、第7図は同じく部分正
面i、第8図および第9図は本実施例の基本的構成を示
しており、第8図は超仕上装置の側面図。 第9図は同じく正面図、第10図および第11図は従来
の超仕上装置の説明図である。 W・・・ワーク 12.20,50.60・・・コンタクトローラ10.
36・・・巻き取りスプール 4.37−・・供給スプール 2.5.40−・・研磨フィルム 51.52,61.62−・・押しローラ第3図 第4図 第5図
1 to 5 show a first embodiment of the present invention, in which FIG. 1 is a partial side view showing the vicinity of the contact roller, and FIG.
The figure is also a partial front view, and Figure 3 is a side view of the super finishing equipment.
FIG. 4 is a partial plan view showing the vicinity of the contact roller, FIG. 5 is a detailed sectional view of the push roller, FIGS. 6 and 7 are a second embodiment of the present invention, and FIG. 6 is a contact roller. FIG. 7 is a partial front view of the rollers, FIG. 7 is a partial front view of the roller, and FIGS. 8 and 9 show the basic configuration of this embodiment. FIG. 8 is a side view of the superfinishing device. FIG. 9 is a front view, and FIGS. 10 and 11 are explanatory diagrams of a conventional superfinishing apparatus. W...Work 12.20,50.60...Contact roller 10.
36... Take-up spool 4.37-- Supply spool 2.5.40-... Polishing film 51.52, 61.62-... Push roller Fig. 3 Fig. 4 Fig. 5

Claims (1)

【特許請求の範囲】 供給された研磨フィルムを硬質のローラに巻き掛け、該
巻き掛けた部分を軟質のワークに押し付けるとともに、
前記ローラの軸方向に振動してワークを研磨し、使用済
の研磨フィルムを巻き取るようにした超仕上装置であっ
て、 前記ローラを軸方向に振動する振動ヘッドに、前記ロー
ラを中心にして供給側の研磨フィルムと巻取り側の研磨
フィルムとをそれぞれ挟み込んで摩擦力で保持する摩擦
保持手段を配設したことを特徴とする超仕上装置。
[Claims] The supplied polishing film is wound around a hard roller, and the wound portion is pressed against a soft workpiece,
A super-finishing device that polishes a workpiece by vibrating the roller in the axial direction and winding up the used polishing film, the apparatus comprising: a vibrating head that vibrates the roller in the axial direction; A super-finishing device characterized by being provided with frictional holding means for sandwiching and holding the polishing film on the supply side and the polishing film on the winding side using frictional force.
JP62267945A 1987-10-23 1987-10-23 Superfinish device Pending JPH01115562A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62267945A JPH01115562A (en) 1987-10-23 1987-10-23 Superfinish device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62267945A JPH01115562A (en) 1987-10-23 1987-10-23 Superfinish device

Publications (1)

Publication Number Publication Date
JPH01115562A true JPH01115562A (en) 1989-05-08

Family

ID=17451786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62267945A Pending JPH01115562A (en) 1987-10-23 1987-10-23 Superfinish device

Country Status (1)

Country Link
JP (1) JPH01115562A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014058038A (en) * 2013-10-28 2014-04-03 Tokyo Seimitsu Co Ltd Wafer edge processing apparatus and edge processing method thereof
WO2015122456A1 (en) * 2014-02-17 2015-08-20 株式会社 荏原製作所 Polishing apparatus and polishing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014058038A (en) * 2013-10-28 2014-04-03 Tokyo Seimitsu Co Ltd Wafer edge processing apparatus and edge processing method thereof
WO2015122456A1 (en) * 2014-02-17 2015-08-20 株式会社 荏原製作所 Polishing apparatus and polishing method
EP3108998A4 (en) * 2014-02-17 2017-11-01 Ebara Corporation Polishing apparatus and polishing method
US10144103B2 (en) 2014-02-17 2018-12-04 Ebara Corporation Polishing apparatus and polishing method
US10414013B2 (en) 2014-02-17 2019-09-17 Ebara Corporation Polishing method and polishing apparatus

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