JP3670177B2 - Glass disk polishing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a glass disk polishing apparatus for polishing the surface of a glass disk.
[0002]
[Prior art]
Conventionally, the disk surface of a glass disk is a pre-polishing process (pre-polishing process), which is a pre-polishing process (polishing process), using a lapping device as a primary polishing of parallelism, flatness and surface roughness to the disk surface. After satisfying the required accuracy and passing through the previous process with this lapping machine, mirror finishing was performed in the polishing finishing process.
[0003]
[Problems to be solved by the invention]
However, the disk surface polishing by the conventional lapping apparatus has the following various problems.
(A) In the disk surface polishing by the lapping apparatus, there is a limit to the accuracy of the surface roughness. Therefore, it takes time to bring the mirror surface finish to the next polishing finishing process, and the running cost increases.
(B) In the lapping apparatus, it is necessary to cause the glass disk, which is a workpiece, to perform a complicated movement, and it is very difficult to automate the polishing process.
(C) The size of the device increases, the device cost increases, and the space efficiency is poor.
(D) Slurry abrasives are used for lapping, but in order to improve the surface roughness in order, it is necessary to prepare various types of abrasives according to the surface roughness, and management of the abrasives is very difficult It is. In addition, it takes time to replace the abrasive and the workability is poor.
[0004]
This invention has been proposed in view of the above, can reduce the running cost in the next process, can reduce the size of the device, facilitate the introduction of automation, can further reduce the device cost and save space, An object of the present invention is to provide a glass disk polishing apparatus capable of improving workability.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, the invention according to claim 1 is a glass disk polishing apparatus for polishing a surface of a glass disk, wherein an arm part for rotatably holding the glass disk at an outer peripheral end surface thereof, and the arm part A polishing tool disposed on each side of the disk of the glass disk gripped in step 1; a feed driving unit that allows the polishing tool to be brought into and out of contact with the opposing disk surface; a rotation driving unit that rotationally drives the polishing tool; and the arm. The vertical movement part of the arm for moving the glass disk held by the part up and down, and the glass disk held by the arm part can be swung between a polishing position between the polishing tools and a separation position away from the polishing tool. An arm swinging portion, and the arm swinging portion is provided with an arm portion at the top and mounted and fixed on the upper surface of the arm vertical moving portion. The arm part moves up and down through the arm swinging part that moves up and down integrally, and the arm swinging part is inclined to a separated position away from the polishing tool so that the arm part moves in the posture. A glass disk is rotatably gripped by the outer peripheral end surface thereof, and then the arm swinging portion is kept upright to keep it in the polishing position, and a polishing tool disposed facing each of both surfaces of the gripped glass disk is fed by a feed driving unit. It is characterized in that both surfaces of the disk are polished simultaneously while being moved and brought into contact with the disk surface, rotating the polishing tool, and vibrating the glass disk up and down .
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0011]
FIG. 1 is a front view schematically showing the overall configuration of the glass disk polishing apparatus of the present invention, and FIGS. 2 and 3 are partial side views of the glass disk polishing apparatus of the present invention. In these drawings, the glass disk polishing apparatus 1 is an apparatus for polishing the surface of the glass disk 10, and the glass disk 10 is gripped by the arm section 21 and the arm section 21 that grips the glass disk 10 at its outer peripheral end surface. Polishing tools 3a and 3b disposed on both surfaces of the glass disk 10, a feed drive unit 4 that allows the polishing tools 3a and 3b to be brought into and out of contact with the opposing disk surfaces, and rotation for rotationally driving the polishing tools 3a and 3b. And a drive unit 5, and an arm vertical movement unit 23 that moves the glass disk 10 held by the arm unit 21 up and down, and a glass disk 10 held by the arm unit 21 between the polishing tools 3 a and 3 b. And an arm swinging portion 22 that can swing between the position and a standby position away from the polishing tools 3a and 3b. The arm portion 21, the arm up-and-down moving portion 23, and the arm swinging portion 22 are integrally configured as a disk support portion 20.
[0012]
The rotational drive unit 5 is disposed from the upper stage 9a to the middle stage 9b of the support frame 9 in which the glass disk polishing apparatus 1 is constructed, and includes a motor 51 serving as a drive source, a transmission mechanism 52, and a driven body 54a. , 54b and two rotating bodies 53a, 53b provided to face each other, the two rotating bodies 53a, 53b receive the rotational drive of the motor 51 via the transmission mechanism 52 and the driven bodies 54a, 54b, If, for example, one of the rotating bodies 53a rotates in the same direction in synchronism with the same rotation center axis, the other rotating body 53b rotates in the counterclockwise direction. Further, polishing tools 3a and 3b made of a grindstone are detachably attached to the rotating bodies 53a and 53b, respectively, and the polishing tools 3a and 3b also rotate in the same direction around the same rotation center axis.
[0013]
Next, the configuration of the feed drive unit 4 will be described with reference to FIG. As shown in FIG. 3, the feed drive unit 4 is arranged symmetrically in the drawing, so only the configuration of the feed drive unit 4A on the right side in the figure will be described here, and the left side feed drive unit 4 Regarding the configuration of 4B, only the subscript a attached to each component of the feed drive unit 4A on the right side is rewritten to b, and the description thereof is omitted.
[0014]
The feed drive unit 4 is arranged from the middle stage 9b to the lower stage 9c of the support frame 9 (FIG. 1), and the right feed drive unit 4A is a position adjustment unit 43a for finely adjusting the positions of the cylinder part 41a and the stopper 42a. And a moving table 44a on which the rotating body 53a is mounted so as to be able to reciprocate.
[0015]
The cylinder portion 41a is of a type that reciprocates the piston 411a with, for example, hydraulic pressure, and a cylinder body 410a is fixed to a support wall 9d fixed to the lower stage 9c. The moving table 44a and the position adjusting portion 43a are integrally connected to the piston 411a of the cylinder portion 41a via an interposed piece 49a. When the piston 411a expands and contracts in the left-right direction in FIG. Accordingly, the interposition piece 49a, the moving table 44a, and the position adjusting unit 43a move in the left-right direction by the same distance as the distance of expansion and contraction.
[0016]
The cylinder portion 41a may be of a type that operates by air pressure instead of hydraulic pressure. In addition, the processing method has been described as a movement method under a constant pressure such as hydraulic pressure or pneumatic pressure. However, a processing method with a constant cutting amount may be adopted by combining a ball screw and a servo motor.
[0017]
The position adjustment unit 43a includes an operation handle 431a, a gear mechanism 432a, and a screw shaft 433a. When the gear mechanism 432a rotates according to the rotation of the operation handle 431a at a predetermined angle, the screw shaft 433a moves forward at a predetermined pitch. By retreating, the position of the stopper 42a provided at the tip of the screw shaft 433a can be finely adjusted.
[0018]
When the piston 411a moves forward from the retracted state of FIG. 3 to the extended state of FIG. 5 in the above-described feed drive unit 4A, the intervening piece 49a and the intervening piece 49a are moved in accordance with the forward movement (movement to the left) of the piston 411a. The whole of the moving table 44a and the position adjusting unit 43a advances integrally (moves in the left direction), and accordingly, the rotating body 53a provided on the moving table 44a via the driven body 54a advances, and the polishing tool 3a. Advances toward the glass disk 10 located in the middle of the opposing polishing tool 3b. In this case, the final stage (for example, a belt) of the transmission mechanism 52 slides the driven body 54a along the axial direction in accordance with the movement of the moving table 44a. When the stopper 42a comes into contact with the receiving portion 48a, the piston 411a stops at that position. At this time, the other polishing tool 3b also moves forward toward the glass disk 10 in accordance with the operation of the feed drive unit 4B, and both polishing tools 3a and 3b are placed on the glass disk 10 with the glass disk 10 sandwiched therebetween. Abut and stop moving. Conversely, when the piston 411a retreats from the extended state of FIG. 5 to the retracted state of FIG. 3, the polishing tool 3a retreats according to the retreat (movement in the right direction) of the piston 411a, while the other The polishing tool 3b also moves backward in the same manner. In this way, the feed drive unit 4 advances and retreats the polishing tools 3a and 3b so as to approach the glass disk 10 and make it contact or separate.
[0019]
Next, the disk support part 20 will be described with reference to FIGS.
[0020]
The disk support part 20 is provided between the feed drive parts 4A and 4B arranged symmetrically (FIG. 3), and is composed of the arm part 21, the arm swinging part 22 and the arm vertical movement part 23 as described above. Has been. The arm vertical movement part 23 includes a cylinder 231 fixed in the vertical direction along the hanging piece 9e of the lower stage 9c of the support frame 9, and the piston 232 moves up and down in accordance with the driving of the cylinder 231.
[0021]
The arm swinging part 22 includes a base 221, a cylinder 222, and a swinging piece 223, and the base 221 is placed and fixed on the top surface of the piston 232 of the arm vertical movement part 23. The cylinder 222 is disposed on the side of the base portion 221, and the piston 222 a can enter and leave the base portion 221 substantially horizontally by driving the cylinder 222. The swing piece 223 has its tip end pivoted to the tip of the piston 222 a and the center in the length direction pivoted to the side wall of the base 221. In the arm swinging portion 22 having such a configuration, when the cylinder 222 retracts the piston 222a, as shown in FIG. 6, the swinging piece 223 is attracted and stopped against the projecting portion 221a. On the contrary, when the cylinder 222 extends the piston 222a, as shown in FIG. 7, the swinging piece 223 is pushed out and stops at the projecting portion 221b to take an inclined posture.
[0022]
The arm portion 21 is composed of two arm pieces 211 and 212 arranged on the axis. The lower portions of the arm pieces 211 and 212 are pivotally supported on the top of the swing piece 223 and are symmetric by a spring force. It is biased in the axial (center) direction. On the other hand, bolts 213 and 214 are screwed into the lower half portions of the arm pieces 211 and 212, and the tip ends of the bolts 213 and 214 come into contact with the regulation wall 215 standing on the top of the swing piece 223. . In the arm portion 21 having such a configuration, when the arm pieces 211 and 212 are urged toward the center by a spring force and approach each other, the tips of the bolts 213 and 214 abut against the restriction wall 215 and stop. The posture at the contact position is taken. The arm pieces 211 and 212 move up and down integrally with the arm up-and-down moving unit 23 and swing together with the swinging piece drive by the arm swinging unit 22.
[0023]
A procedure for polishing the glass disk 10 in the glass disk polishing apparatus 1 having the above-described configuration will be described. In order to polish the glass disk 10, first, the piston 222a of the arm swinging portion 22 is extended to tilt the swinging piece 223 in the posture shown in FIG. 7, and the arm piece 211 opened by a predetermined angle under this posture. , 212, the glass disk 10 to be polished is inserted and held between the arm pieces 211, 212. At this time, the outer peripheral surface of the glass disk 10 is rotatably supported by the two rollers 211a and 211b of the arm piece 211 and the two rollers 212a and 212b of the arm piece 212 (FIG. 9A).
[0024]
Next, the piston 222a of the arm swinging portion 22 is retracted to keep the swinging piece 223 in an upright posture (FIGS. 5 and 6), and its position is slightly raised upward by the cylinder 231 of the arm vertical moving portion 23. At this time, the glass disk 10 is set in the center between the polishing tools (grinding stones) 3a and 3b at the retreat position in advance (FIG. 9B). Then, the motor 51 of the rotation drive unit 5 is driven to rotate the rotating bodies 53a and 53b, and the polishing tools 3a and 3b are rotated in the same direction around the same rotation center axis.
[0025]
Subsequently, the cylinders 41a and 41b of the feed drive unit 4 (4A and 4B) are driven, the pistons 411a and 411b are extended, and the moving tables 44a and 44b are advanced in a direction approaching each other, whereby the rotating body 53a. , 53b. The movement of the moving tables 44a and 44b is stopped when the stopper 42a stops at the receiving portion 48a. Then, immediately before or simultaneously with the stop of the moving tables 44a and 44b, the polishing tools 3a and 3b come into contact with the respective opposing disk surfaces of the glass disk 10 (FIG. 3), and the disk surface by the polishing tools 3a and 3b is contacted. Polishing is performed. In this polishing, the cylinder 231 of the arm up-and-down moving unit 23 is driven to vibrate the glass disk 10 up and down.
[0026]
In this way, when the polishing of the glass disk 10 is completed, the pistons 411a and 411b of the feed driving units 4A and 4B are retracted and the moving tables 44a and 44b are retracted. Further, the driving of the motor 51 is stopped to stop the rotation of the polishing tools 3a and 3b, the vertical vibration by the arm vertical movement unit 23 is stopped, and the glass disk setting position is slightly lowered. Then, the rocking piece 223 is tilted, and the glass disk 10 held between the arm pieces 211 and 212 is taken out by hand. Thus, a series of disk surface polishing operations for the glass disk 10 is completed.
[0027]
During polishing of the glass disk 10, the polishing liquid is supplied to the polishing tools 3a and 3b. The polishing liquid drops between the feed driving units 4A and 4B and is provided in the lower stage 9c of the support frame 9. It passes through the guide portion 91 (FIGS. 1 and 2) and is stored in the tank 92 (FIG. 1) below.
[0028]
As described above, in the glass disk polishing apparatus 1 of the present invention, in the pre-polishing step, the disk surface polishing by the grindstone (polishing tools 3a and 3b) can be performed in place of the conventional disk surface polishing by the lapping apparatus. As a result, the accuracy of surface roughness in the pre-polishing process can be improved, and therefore the time required to bring it to the mirror finish in the next polishing finishing process can be greatly shortened. The running cost can be reduced.
[0029]
In addition, compared to conventional lapping machines, the target surface accuracy can be obtained in a short time, and complicated abrasive management and polishing agent replacement work required for lapping with the lapping machine is not required, thereby improving workability. Thus, the running cost of the pre-polishing process itself can be greatly reduced.
[0030]
Further, by using a grindstone, the polishing method can be simplified, and therefore it is possible to realize automation of disk surface polishing, which has been difficult with a lapping apparatus. However, it is possible to reduce the size of the device, and to reduce the device cost and save space.
[0031]
Further, the amount of cut when the glass disk 10 is polished is determined by the feed amount of the polishing tools 3a and 3b, but the feed amount can be finely adjusted by the operation handle 431a of the feed drive units 4A and 4B. Polishing can be performed with extremely good dimensional accuracy.
[0032]
Further, when the glass disk 10 is polished, the polishing tools 3a and 3b are rotated in the same direction around the same rotation center axis, and the glass disk 10 is vibrated up and down. The place of contact with the polishing tools 3a and 3b changes one by one. For this reason, the contact of the glass disk surface with the polishing tools 3a and 3b can be made more uniform in a stable state, and hence the variation in surface roughness accuracy can be suppressed to be small, and high-quality polishing can be performed. Moreover, since both surfaces of the glass disk 10 are polished simultaneously, the pre-polishing step can be completed efficiently and in a short time.
[0033]
【The invention's effect】
Since this invention consists of an above-described structure, there can exist an effect which is demonstrated below.
[0034]
In this invention, in the pre-polishing step, instead of the disk surface polishing by conventional performed have lap apparatus, since the allow the disk surface polishing by a polishing tool (grindstone), the surface roughness of the pre-polishing step The accuracy can be improved, and therefore the time required to bring the mirror finish in the next polishing finishing process can be greatly shortened, and the running cost in the next process can be reduced.
[0035]
Compared to conventional lapping machines, the target surface accuracy can be obtained in a short time, and the complicated polishing agent management and polishing agent replacement work required for lapping with the lapping machine is not required. Therefore, the running cost in the pre-polishing process itself can be greatly reduced.
[0036]
Further, by using a grindstone, the polishing method can be simplified, and therefore it is possible to realize automation of disk surface polishing, which has been difficult with a lapping apparatus. However, it is possible to reduce the size of the device, and to reduce the device cost and save space.
[0037]
In this invention, when polishing a glass disk, is performed while oscillating the glass disk vertically, it is possible to further equalize the contact of the glass disc surface with respect to the grinding tool, thus, variations in the surface roughness of the precision Can be kept small, and high-quality polishing can be performed.
[0038]
Further, in the invention of this, the position between the polishing tool between the glass disk, since between the position away from the grinding tool and swingable, or by sandwiching the glass disc to the arm portion, taken from the arm portion Work can be performed easily and workability can be improved.
[0039]
Furthermore, in the invention of this, since the adjusted finely by operating the handle of the driver sends the feed amount of the grinding tool, can be polished at a very good dimensional accuracy.
[Brief description of the drawings]
FIG. 1 is a front view schematically showing an overall configuration of a glass disk polishing apparatus according to the present invention.
FIG. 2 is a partial side view of the glass disk polishing apparatus of the present invention.
FIG. 3 is a partial side view of the glass disk polishing apparatus of the present invention, showing a state where the polishing tool is separated from the glass disk.
FIG. 4 is a cross-sectional view illustrating a configuration of a feed driving unit.
FIG. 5 is a partial side view of the glass disk polishing apparatus of the present invention, showing a state where the polishing tool is in contact with the glass disk.
FIG. 6 is a front view showing a configuration of a disk support portion, and is a view showing a state in which a swing piece is made upright.
FIG. 7 is a front view showing a configuration of a disk support portion, and shows a state in which a swing piece is inclined.
FIG. 8 is a side cross-sectional view showing a configuration of a disk support portion.
FIG. 9 is a view taken along the arrow A in FIG. 2 and showing each step of glass disk polishing.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Glass disk grinding | polishing apparatus 3a Polishing tool 3b Polishing tool 4 Feed drive part 4A Feed drive part 4B Feed drive part 5 Rotation drive part 9 Support frame 9a Upper stage 9b Middle stage 9c Lower stage 9d Support wall 9e Hanging piece 10 Glass disk 20 Disk support part 21 Arm part 22 Arm swing part 23 Arm vertical movement part 41a Cylinder part 41b Cylinder part 42a Stopper 43a Position adjustment part 44a Movement table 44b Movement table 48a Receiving part 49a Interposing piece 51 Motor 52 Transmission mechanism 53a Rotating body 53b Rotating body 54a Driven body 54b Driven object 211 Arm piece 211a Roller 211b Roller 212 Arm piece 212a Roller 212b Roller 213 Bolt 214 Bolt 215 Restriction wall 221 Base 221a Projection 221b Projection 222 Cylinder 222a Piston 223 Oscillating piece 231 232 piston 410a cylinder body 411a piston 411b piston 431a operating handle 432a gear mechanism 433a screw shaft

Claims (1)

In a glass disk polishing apparatus for polishing the surface of a glass disk,
An arm portion for gripping the glass disk rotatably on its outer peripheral end surface;
A polishing tool disposed on each of both surfaces of the glass disk gripped by the arm part;
A feed drive unit for allowing the polishing tool to freely contact and separate from the opposing disk surface;
A rotational drive unit for rotationally driving the polishing tool;
An arm up-and-down moving unit for moving up and down the glass disk held by the arm unit;
An arm swinging portion that enables the glass disk held by the arm portion to swing between a polishing position between polishing tools and a spaced position apart from the polishing tool;
Have
The arm swinging part is provided with an arm part at the top and mounted and fixed on the upper surface of the arm vertical movement part, and moves up and down integrally by the arm vertical movement part, and through the arm swinging part that moves up and down. The arm moves up and down,
The arm swinging portion is tilted to a separated position away from the polishing tool, and in this posture, the arm portion grips the glass disk rotatably on the outer peripheral end surface, and then the arm swinging portion is kept upright to maintain the polishing position. Then, the polishing tool arranged to face each of both surfaces of the gripped glass disk is moved by the feed drive unit and brought into contact with the disk surface, the polishing tool is rotated, and the glass disk is vibrated up and down, Polish both sides of the disc simultaneously,
A glass disk polishing apparatus characterized by that.

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