JPH01115033A - Gas discharge display device - Google Patents
Gas discharge display deviceInfo
- Publication number
- JPH01115033A JPH01115033A JP62270201A JP27020187A JPH01115033A JP H01115033 A JPH01115033 A JP H01115033A JP 62270201 A JP62270201 A JP 62270201A JP 27020187 A JP27020187 A JP 27020187A JP H01115033 A JPH01115033 A JP H01115033A
- Authority
- JP
- Japan
- Prior art keywords
- discharge space
- display device
- gas discharge
- discharge
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 abstract description 27
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 10
- 239000002994 raw material Substances 0.000 abstract description 6
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- 238000000465 moulding Methods 0.000 abstract description 3
- 238000010030 laminating Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910000600 Ba alloy Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052844 willemite Inorganic materials 0.000 description 1
Landscapes
- Gas-Filled Discharge Tubes (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、電離ガスの発光を利用するガス放電表示装置
に係り、特に、大画面、高輝度、高解像度を有するフル
カラーガス放電表示装置（壁かけ状超薄型テレビ）に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a gas discharge display device that utilizes light emission from an ionized gas, and particularly relates to a full-color gas discharge display device that has a large screen, high brightness, and high resolution ( (wall-mounted ultra-thin TV).
［従来の技術］
ガス放電表示装置では、放電空間内で封入ガスを電離さ
せ、電離ガス自体の発光、あるいは電離ガスで発生した
紫外線や電子を蛍光体に照射した時に発生する蛍光によ
って情報を表示する。したがって、ガス放電表示装置の
製造にあたっては、その放電空間構成体の作製技術が重
要な位置を占める。第２図は、蛍光体の発光を利用する
ガス放電表示装置の断面模式図である。装置は放電セル
１がマトリックス状に配置された放電空間構成体２を、
陽極３が形成されている面板４と陰極５が形成されてい
る基板６ではさんだ構造となっている。放電空間の壁面
には蛍光体７が塗布してあり、また１周囲は封着剤によ
り封止され、放電セルにはＸｓ、 Ｎｅ、あるいは、そ
れらの混合ガスが放電ガスとして封入されている。この
種の装置では。[Prior Art] In a gas discharge display device, a sealed gas is ionized in a discharge space, and information is displayed by light emission from the ionized gas itself or by fluorescence generated when a fluorescent material is irradiated with ultraviolet rays or electrons generated by the ionized gas. do. Therefore, in manufacturing a gas discharge display device, the technology for manufacturing the discharge space structure occupies an important position. FIG. 2 is a schematic cross-sectional view of a gas discharge display device that utilizes light emission from a phosphor. The device includes a discharge space structure 2 in which discharge cells 1 are arranged in a matrix,
It has a structure sandwiched between a face plate 4 on which an anode 3 is formed and a substrate 6 on which a cathode 5 is formed. A phosphor 7 is coated on the wall surface of the discharge space, and one periphery is sealed with a sealant, and the discharge cell is filled with Xs, Ne, or a mixture thereof as a discharge gas. In this kind of equipment.
陰極−陽極間に電圧を印荷して放電ガスに紫外線を発生
させ、蛍光体を発光されて情報を表示する。A voltage is applied between the cathode and the anode to generate ultraviolet rays in the discharge gas, causing the phosphors to emit light and display information.
また、放電空間の隔壁に蛍光体を塗布せず、単に放電ガ
スの発光自体により情報を表示する形式の装置もある。There is also a type of device that does not apply phosphor to the partition wall of the discharge space and displays information simply by emitting light from the discharge gas itself.
以上の記述かられかるように、ガス放電表示装置におい
ては、その表示の輝度、解像度等は放電空間の形状に大
きく依存する。すなわち、ガス放電表示装置の製造にあ
たっては、その放電空間構成体の製造技術が重要な位置
を占める。とくに、フルカラーガス放電テレビは高輝度
、高解像度が要求されるため、高精度の放電空間構成体
作製技術が必要となる。ここで、４０インチサイズのフ
ルカラーガス放電テレビを想定したときの放電空間構成
体の構造を示しておくと、実用上十分な明るさをもつ放
電セルの形状は約０．８ｍｍ角、深さ１．５〜２ｍｍの
直方体の空間であり、放電空間構成体は隔壁を介してこ
の放電セルを垂直方向に約４８０セル、水平方向に約８
ｏＯセルを配列した構造となる。また、このセル数等は
、現用のＮＴＳＣ標準モードの画像の場合であり、今後
実用化されるＩＤＴＶ、ＥＤＴＶ、ＨＤＴＶでは放電セ
ルの微少化と放電セル数の大巾な増加が必要となる。ま
た一方、放電空間の数は、上記のように対角４０インチ
のフルカラーテレビでは数十五個の達するので、加工の
生産性が高いことも要求される。As can be seen from the above description, in a gas discharge display device, the display brightness, resolution, etc. largely depend on the shape of the discharge space. That is, in manufacturing a gas discharge display device, the manufacturing technology of the discharge space structure occupies an important position. In particular, since full-color gas discharge televisions require high brightness and high resolution, highly accurate discharge space structure fabrication technology is required. Here, to show the structure of the discharge space structure assuming a 40-inch full-color gas discharge television, the shape of a discharge cell with sufficient brightness for practical use is approximately 0.8 mm square and 1 mm deep. It is a rectangular parallelepiped space with a diameter of .5 to 2 mm, and the discharge space structure has approximately 480 cells in the vertical direction and approximately 8 cells in the horizontal direction through partition walls.
It has a structure in which oO cells are arranged. Further, this number of cells, etc. is for images in the current NTSC standard mode, and IDTV, EDTV, and HDTV that will be put into practical use in the future will require miniaturization of discharge cells and a large increase in the number of discharge cells. On the other hand, since the number of discharge spaces is several dozen in a 40-inch diagonal full-color television as described above, high processing productivity is also required.
ところで、従来のガス放電表示装置の放電空間は大別す
ると以下の二種の方法で構成されていた。By the way, the discharge spaces of conventional gas discharge display devices are constructed using the following two methods.
第１の方法は、例えばｒＰＤＰキャラクタデイスプレィ
」、電子技術、第２０巻、第１１号（１９７８）、１６
〜１９頁に示すように、研削、エツチング、レーザ照射
、超音波加工法により素材に貫通孔を開け、この貫通孔
を放電空間として利用する方法である。この場合、研削
法による加工では、孔の断面は円形となり、平面内の放
電空間の割合が低下するという問題点があり、また角形
の貫通孔については、生産性が低いという問題点があっ
た。エツチング法では、サイドエッチが起こるため、断
面形状が一定とならない（加工可能な素材の厚さは、孔
径を１ｍｍとした場合、約０．３ｍｍ以下となる）等の
問題があった。また、レーザ照射による穿孔では、孔の
周囲にダメージが残るという問題があり、超音波加工法
では、ホーンと称される加工部の消耗が激しいため、加
工の生産性が低いという問題点があった。The first method is, for example, "rPDP Character Display", Electronic Technology, Vol. 20, No. 11 (1978), 16
As shown on pages 19 to 19, this is a method in which a through hole is made in a material by grinding, etching, laser irradiation, or ultrasonic machining, and the through hole is used as a discharge space. In this case, when machining by the grinding method, the cross section of the hole becomes circular, which causes the problem that the proportion of the discharge space in the plane decreases, and the problem with square through holes is that productivity is low. . In the etching method, side etching occurs, so that the cross-sectional shape is not constant (the thickness of the material that can be processed is approximately 0.3 mm or less when the hole diameter is 1 mm). In addition, drilling by laser irradiation has the problem of leaving damage around the hole, and ultrasonic processing has the problem of low processing productivity because the processing part called the horn is severely worn out. Ta.
第２の方法は１例えば「８型子面構成パルスメモリーカ
ラーパネルの試作と大型化の問題点」。The second method is 1, for example, ``prototype production of an 8-inch side configuration pulse memory color panel and problems with increasing its size''.
テレビジョン学会技術報告、（昭和６１．１１゜１３）
、３７−４２頁に示す゛ように、厚膜プロセスにより放
°電空間を構成する方法である。この方法はスクリーン
印刷等の厚膜プロセスによって、セラミックスの原膜を
形成し、放電空間を構成するものであるが、１回の厚膜
プロセスで構成できる放電空間の深さが約０．０５ｍｍ
と薄いため、たとえば、深さ１ｍｍの放電空間を構成す
るのに２０回のプロセスの繰り返しが必要となる。通常
、厚膜プロセスでは、乾燥、焼成、焼鈍など、長時間の
工程が必要であるため、この方法の生産性は低く、かつ
、プロセスを繰り返すため、孔の断面が一定とならない
という問題があった。Television Society Technical Report, (1986.11.13)
, pp. 37-42, this is a method of constructing a discharge space using a thick film process. This method uses a thick film process such as screen printing to form a raw ceramic film to form a discharge space, but the depth of the discharge space that can be created with one thick film process is approximately 0.05 mm.
Because the material is so thin, for example, it is necessary to repeat the process 20 times to construct a discharge space with a depth of 1 mm. Normally, thick film processes require long processes such as drying, firing, and annealing, so the productivity of this method is low, and since the process is repeated, there is a problem that the cross section of the pores is not constant. Ta.
［発明が解決しようとする問題点］
以上示したように、従来技術は、大画面、高輝度、高解
像度を有するフルカラーテレビを代表例とするようなガ
ス放電表示装置の放電空間を構成する技術としては、加
工の生産性が低いという問題点があった。[Problems to be Solved by the Invention] As shown above, the prior art is a technology for configuring the discharge space of a gas discharge display device, typically a full-color television with a large screen, high brightness, and high resolution. However, there was a problem that processing productivity was low.
本発明の目的は、断面積が０．０４〜
３ 、０ ｍ ｍ ”、深さが０ 、２〜５ 、０ ｍ
ｍと大容積である放電セルにより構成された放電空間
を生産性高く作製する技術に基づき、高品質、低価格の
ガス放電表示装置を提供することにある。The object of the present invention is to have a cross-sectional area of 0.04~3.0 mm'' and a depth of 0.2~5.0 m.
The object of the present invention is to provide a high-quality, low-cost gas discharge display device based on a technology for manufacturing a discharge space constituted by discharge cells having a large volume of m with high productivity.
［問題点を解決するための手段］
上記目的は、例えばコルゲート法等により、セラミック
スの薄板を波状に成型加工した後に、これを平面板状セ
ラミックスと交互に接着により積層してゆくという方法
を放電空間構成体の製造法として用いることにより達成
される。[Means for Solving the Problems] The above purpose is to develop a method in which a thin ceramic plate is molded into a wavy shape using, for example, the corrugating method, and then laminated alternately with flat ceramic plates by adhesive bonding. This is achieved by using it as a method for manufacturing a space structure.
［作用］
本発明の放電空間構成体の製造プロセスを模式的に第１
図（ａ）〜（ｄ）に示す。原料シート（素材薄板）１１
を、成型ロール１２を通して加工することにより、矩形
波型シート１３を作製する。ついで、この矩形波型シー
トと隔壁シート１４を組合せて接着成型し、放電空間構
成体母材、すなわち集積ブロック１５とする。このブロ
ックをカッター１６等を用いて、所定の厚さにスライス
カットして放電空間構成体２を作製する。尚、あらかじ
め原料シートの巾を放電空間構成体の厚さにしておけば
、スライスカットの工程は不要となる。[Function] The manufacturing process of the discharge space structure of the present invention is schematically shown in the first example.
Shown in Figures (a) to (d). Raw material sheet (material thin plate) 11
A rectangular corrugated sheet 13 is produced by processing it through a forming roll 12. Next, this rectangular corrugated sheet and the partition sheet 14 are combined and adhesively molded to form a discharge space structure base material, that is, an integrated block 15. This block is sliced to a predetermined thickness using a cutter 16 or the like to produce the discharge space structure 2. Incidentally, if the width of the raw material sheet is set in advance to the thickness of the discharge space structure, the step of slicing becomes unnecessary.
［実施例］
以下、本発明の一実施例を第１図（ａ）〜（ｄ）と対応
させて説明する。[Example] Hereinafter, an example of the present invention will be described in correspondence with FIGS. 1(a) to (d).
原料シート１１として長さ５０ｃｍ、巾１０ｃ ｍ 、
厚さ０．２ｍｍの未焼結セラミックス（ＡＱ２０３９０
％、Ｓｉ０２５％、Ｍｇ０５％の組成を持つグリーンシ
ート）を用い、超硬合金製の成型ロール１２を通過させ
て断面正方形状波型シート１３を作成した。この時、正
方形の一辺寸法は０．８１ｍｍであった。予備乾燥の後
、空気中で１５５０℃、１時間、炉内温度分布プラスマ
イナス２％の電気炉を用いて焼成し、矩形波型セラミッ
クシートを完成した。この時、セラミックシートは等方
的に焼きしまり、−辺の寸法は均一に０．８ｍｍとなっ
た。次に、あらかじめ同一素材を用いて作成した厚さ０
．１ｍｍのセラミックス製隔壁シート１４と、この波型
シートを交互に組合せ位置決め後、ガラスペーストを用
いて加熱液 ′着し、放電空間構成体用集積ブロック
１５を作製した。この後、ワイヤーソーを用いて、厚さ
２ｍｍにスライスカットして放電空間構成体とした。The raw material sheet 11 has a length of 50 cm, a width of 10 cm,
Unsintered ceramics (AQ20390) with a thickness of 0.2 mm
%, Si025%, Mg05%) was passed through a forming roll 12 made of cemented carbide to create a corrugated sheet 13 having a square cross section. At this time, one side dimension of the square was 0.81 mm. After preliminary drying, it was fired in air at 1550° C. for 1 hour using an electric furnace with an internal temperature distribution of plus or minus 2% to complete a rectangularly corrugated ceramic sheet. At this time, the ceramic sheet was baked isotropically, and the -side dimension was uniformly 0.8 mm. Next, a thickness of 0 was created using the same material in advance.
．． After 1 mm ceramic partition sheets 14 and these corrugated sheets were alternately combined and positioned, they were heated and deposited using glass paste to produce an integrated block 15 for a discharge space structure. Thereafter, using a wire saw, slices were cut to a thickness of 2 mm to obtain a discharge space structure.
つぎに、この放電空間構成体の壁面に、紫外線励起緑色
蛍光体：Ｍｎ添加Ｚｎ２ＳｉＯ４を塗布し、上面に陽極
マトリックスを形成した表示ガラス板。Next, an ultraviolet-excited green phosphor: Mn-added Zn2SiO4 was applied to the wall surface of this discharge space structure, and an anode matrix was formed on the upper surface of the display glass plate.
下面に陰極マトリックスを形成したガラス基板を接着し
、Ｘｅガスを封入してガス放電表示装置を作製した。陽
極はＮｉの蒸着膜、陰極はＢａ合金膜である。このよう
にして作製した装置を動作させたところ、画面の輝度は
約１５０ｆＬと実用上十分な明るさであり、かつ、表示
セル間のクロストークが無く１機械的強度も十分である
というガス放電表示装置として要求される仕様を満足す
る結果が得られた。このことにより、上記方法によるガ
ス放電表示装置の放電空間構成体が製造できることが実
証された。A glass substrate with a cathode matrix formed on the bottom surface was adhered and Xe gas was sealed to produce a gas discharge display device. The anode is a deposited Ni film, and the cathode is a Ba alloy film. When the device fabricated in this way was operated, the screen brightness was approximately 150 fL, which was sufficient for practical use, and there was no crosstalk between display cells, and the mechanical strength was also sufficient. Results were obtained that satisfied the specifications required for a display device. This proves that the discharge space structure of a gas discharge display device can be manufactured by the above method.
以上の実施例をふまえて、本発明の技術と従来技術の生
産性を比較してみると、たとえば５通常の化学エツチン
グ法のみで貫通孔を作製する方法では、エツチング速度
が遅いこと、０．２〜０．３ｍｍ厚の薄板を重ね合せる
工程が必要となることから考えて５本発明の技術の方が
製造時間は約１／１０以下となるものと計算される。ま
た膜厚プロセスを用いる方法と比べても、放電空間の深
さが０．２ｍｍ以上の場合、同様に１／１０以下と試算
された。Based on the above examples, when we compare the productivity of the technology of the present invention and the conventional technology, we find that, for example, 5. In the method of creating through holes using only the ordinary chemical etching method, the etching speed is slow; Considering that the process of overlapping thin plates with a thickness of 2 to 0.3 mm is required, it is calculated that the manufacturing time of the technology of the present invention will be about 1/10 or less. Also, compared to the method using a film thickness process, it was similarly calculated to be 1/10 or less when the depth of the discharge space is 0.2 mm or more.
ところで４上記の実施例では原料シートとしていわゆる
セラミックス、なかんずくアルミナ系のものを示したが
、他のセラミックス、たとえば。By the way, in the above embodiment, so-called ceramics, especially alumina-based ones, were used as the raw material sheets, but other ceramics, for example, may also be used.
シリカ系のフォルステライト、ジルコニア等を素材とし
ても本発明の効果は実現できる。The effects of the present invention can also be achieved using silica-based forsterite, zirconia, or the like as a material.
なお、いわゆるガラス板を加熱軟化させつつ成型し、放
電空間構成体を作製する場合においても、本発明による
方法が非常に効果的であることはいうまでもない。It goes without saying that the method according to the present invention is very effective even when forming a so-called glass plate while softening it by heating to produce a discharge space structure.
本実施例では、陽極にはＮｉ、陰極にはＢａ合金、蛍光
体にはＺ ｎ ２ Ｓ ｉ Ｏ４（Ｍ ｎ ） 、接着
剤には低融点ガラスペーストを用いたが、本発明の効果
は、これら電極、蛍光体、および接着剤の材料や作製法
に制限を受けるものではない。In this example, Ni was used for the anode, Ba alloy was used for the cathode, Zn 2 Si O 4 (M n ) was used for the phosphor, and low melting point glass paste was used for the adhesive. There are no restrictions on the materials or manufacturing methods of these electrodes, phosphors, and adhesives.
又、波型断面形状を三角形、台形等にしても本発明の効
果は十分に実現可能である。Furthermore, the effects of the present invention can be fully realized even if the wave cross-sectional shape is triangular, trapezoidal, or the like.
［発明の効果〕
以上、説明したように、本発明によれば、ガス放電表示
装置の放電空間構成体を、高精度で、かつ、高い生産性
をもって製造することが可能となり、ガス放電表示装置
の高画質化、低コスト化が達成できるという効果がある
。とくに、開発の要望が強い壁掛は式大画面フルカラー
テレどの実現に効果がある。[Effects of the Invention] As described above, according to the present invention, it is possible to manufacture the discharge space structure of a gas discharge display device with high precision and high productivity, and the discharge space structure of a gas discharge display device can be manufactured with high precision and high productivity. This has the effect of achieving higher image quality and lower costs. In particular, wall-mounted devices, which are in high demand for development, are effective in realizing large-screen, full-color televisions.
第１図は本発明の一実施例の説明図、第２図はガス放電
表示装置の断面の模式図である。
１・・・放電セル、２・・・放電空間、３・・・陽極、
４・・・面板、５・・・陰極、６・・・基板、７・・・
蛍光体、１１・・・原料シート、１２・・・成型ロール
、１３・・・波型シート、１４・・・隔壁シート、１５
・・・集積ブロック、１６・・・カッター。FIG. 1 is an explanatory diagram of an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional diagram of a gas discharge display device. DESCRIPTION OF SYMBOLS 1...Discharge cell, 2...Discharge space, 3...Anode,
4... Face plate, 5... Cathode, 6... Substrate, 7...
Phosphor, 11... Raw material sheet, 12... Molding roll, 13... Corrugated sheet, 14... Partition sheet, 15
...accumulation block, 16...cutter.
Claims (1)
波状構造とした後、これを組合せることによって構成し
た空隙を放電空間として利用することを特徴とするガス
放電表示装置。 ２、特許請求の範囲第１項において、構成される放電空
間の端形が、波長０．２〜１．５ｍｍの正方形及び台形
、ないしは、長辺の長さが ０．４〜２．０ｍｍで短辺の長さが０．２〜１．５ｍｍ
の長方形及び台形であることを特徴とするガス放電表示
装置。[Claims] 1. A gas discharge display characterized in that a single continuous ceramic thin plate is molded into a wavy structure and then the voids formed by combining these are used as a discharge space. Device. 2. In claim 1, the end shape of the discharge space is a square or trapezoid with a wavelength of 0.2 to 1.5 mm, or a long side length of 0.4 to 2.0 mm. Short side length is 0.2-1.5mm
A gas discharge display device characterized in that it has a rectangular shape and a trapezoidal shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62270201A JPH01115033A (en) | 1987-10-28 | 1987-10-28 | Gas discharge display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62270201A JPH01115033A (en) | 1987-10-28 | 1987-10-28 | Gas discharge display device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01115033A true JPH01115033A (en) | 1989-05-08 |
Family
ID=17482938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62270201A Pending JPH01115033A (en) | 1987-10-28 | 1987-10-28 | Gas discharge display device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01115033A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114429A (en) * | 1988-10-24 | 1990-04-26 | Fujitsu General Ltd | Recess forming method for fluorescent substance layer of color display pdp |
| JPH0359928A (en) * | 1989-07-27 | 1991-03-14 | Matsushita Electric Ind Co Ltd | Gas discharge display element and its manufacture |
| US5316112A (en) * | 1991-04-20 | 1994-05-31 | Bridgestone Corporation | Restricted passage system in vibration damping device |
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-
1987
- 1987-10-28 JP JP62270201A patent/JPH01115033A/en active Pending
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|---|---|---|---|---|
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| JPH0359928A (en) * | 1989-07-27 | 1991-03-14 | Matsushita Electric Ind Co Ltd | Gas discharge display element and its manufacture |
| US5316112A (en) * | 1991-04-20 | 1994-05-31 | Bridgestone Corporation | Restricted passage system in vibration damping device |
| US9885959B2 (en) | 2003-04-09 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator |
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| US9891539B2 (en) | 2005-05-12 | 2018-02-13 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US9429851B2 (en) | 2005-05-12 | 2016-08-30 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
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| US9857599B2 (en) | 2007-10-24 | 2018-01-02 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
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| US9178155B2 (en) | 2008-10-10 | 2015-11-03 | Nikon Corporation | Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element |
| JP5533659B2 (en) * | 2008-10-10 | 2014-06-25 | 株式会社ニコン | Flexible substrate, display element manufacturing method, and display element manufacturing apparatus |
| WO2010041403A1 (en) * | 2008-10-10 | 2010-04-15 | 株式会社ニコン | Flexible substrate, method for manufacturing display element and apparatus for manufacturing display element |
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