JPH01258339A - Manufacture of discharge gap constituting body and gas discharge display device - Google Patents

Manufacture of discharge gap constituting body and gas discharge display device

Info

Publication number
JPH01258339A
JPH01258339A JP8501488A JP8501488A JPH01258339A JP H01258339 A JPH01258339 A JP H01258339A JP 8501488 A JP8501488 A JP 8501488A JP 8501488 A JP8501488 A JP 8501488A JP H01258339 A JPH01258339 A JP H01258339A
Authority
JP
Japan
Prior art keywords
discharge
mold
display device
glass
discharge space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8501488A
Other languages
Japanese (ja)
Inventor
Kazushige Imagawa
今川 一重
Akizo Toda
尭三 戸田
Kikuo Fukushima
福島 喜久男
Shigeo Kubota
窪田 重男
Shinsaku Nakamura
中村 進作
Keiichi Kanebori
恵一 兼堀
Yasushi Ikuta
生田 靖
Shinichi Shinada
品田 真一
Masakazu Fukushima
正和 福島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8501488A priority Critical patent/JPH01258339A/en
Publication of JPH01258339A publication Critical patent/JPH01258339A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a high quality but less expensive gas discharge display device by fabricating a discharge gap constituting body in such a way that a mold is made by the precision machining of a graphite plate, fine ceramic powder is filled in the gap thereof and the mold is released after heating, dissolving and cooling the powder. CONSTITUTION:Graphite plates 11, each having a thickness equal to the length of one side of a discharge cell 1, are laid on top of each other and grooved, using a wire processing machine 12 and the like, except for the width of other sides. Thereafter, the plates 11 are overhauled and a mold for a discharge gap constituting body 2 is formed, using a spacer and the like. The mold so made is housed in a frame 13 having a bottom and the fine powder 14 of ceramics such as glass is filled in a gap. Then, the powder is heated, dissolved and then cooled in a oxygen free environment, thereby obtaining a glass block 15. Furthermore, the glass block 15 is burnt in an oxygen and the graphite is thereby removed. Thereafter, the block 15 is sliced to the length of the discharge cell 1 by means of a wire saw 16 and the like, thereby obtaining the constituting body 2. A fluorescent material T is applied to the wall surface of the body 2 and a xenon gas is sealed in the cell 1 bonded with a glass display board 4 having an anode 5 and a glass substrate 6 with a cathode 5, and a gas discharge display device can be thereby fabricated with high productivity.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電離ガスの発光を利用するガス放電標示装置
に係り、特に、大画面、高輝度、高解像度を有するフル
カラーガス放電表示装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas discharge display device that utilizes light emission from ionized gas, and particularly relates to a full-color gas discharge display device that has a large screen, high brightness, and high resolution. .

〔従来の技術〕[Conventional technology]

ガス放電表示装置では、放電空間内で、封入ガスを電離
させ、電離ガス自体の発光、あるいは、電離ガスで発生
した紫外線や電子を蛍光体に照射した時に発生する蛍光
によって情報を表示する。
In a gas discharge display device, a sealed gas is ionized in a discharge space, and information is displayed by the light emission of the ionized gas itself or by the fluorescence generated when a phosphor is irradiated with ultraviolet rays or electrons generated by the ionized gas.

したがって、ガス放電表示装置の製造にあたっては、そ
の放電空間構成体の作製技術が重要である。
Therefore, in manufacturing a gas discharge display device, the technology for manufacturing the discharge space structure is important.

第1図は蛍光体の発光を利用するガス放電表示装置の断
面の模式図である。マトリックス状に配置された放電セ
ル1を有する放電空間構成体2を、陽極3が形成されて
いる表示板4と陰極5が形成されている基板6とで挟ん
だ構造となっている。
FIG. 1 is a schematic cross-sectional view of a gas discharge display device that utilizes light emission from a phosphor. It has a structure in which a discharge space structure 2 having discharge cells 1 arranged in a matrix is sandwiched between a display plate 4 on which an anode 3 is formed and a substrate 6 on which a cathode 5 is formed.

放電空間構成体2の壁面には蛍光体7が塗布してあり、
また周囲は封着剤により封止され、放電セルにはX 凰
、 N a、あるいは、それらの混合ガスが放電ガスと
して封入されている。この種の装置では、陰極、陽極間
の電圧を印加して放電ガスに紫外線を発生させ、蛍光体
を発光させて情報を表示する。また、放電空間構成体2
の壁面に蛍光体7を塗布せず、単に、放電ガスの発光自
体により情報を表示する形式の装置もある。
A phosphor 7 is coated on the wall surface of the discharge space structure 2.
Further, the surrounding area is sealed with a sealant, and the discharge cell is filled with X 凰, Na, or a mixture thereof as a discharge gas. In this type of device, a voltage is applied between a cathode and an anode to generate ultraviolet rays in a discharge gas, causing a phosphor to emit light and display information. In addition, the discharge space structure 2
There is also a type of device that does not coat the wall surface with the phosphor 7 and simply displays information by emitting light from the discharge gas itself.

以上の記述かられかるように、ガス放電表示装置におい
ては、その表示の輝度、解像度等は放電空間の形状に大
きく依存する。すなわち、ガス放電表示装置の製造にあ
たっては、その放電空間構成体の製造技術が重要な位置
を占める。とくに、フルカラーガス放電テレビは高輝度
、高解像度が要求れる為、高精度の放電空間構成体作製
技術が必要となる。ここで、40インチサイズのフルカ
ラーガス放電テレビを想定した時の放電空間構成体の構
造を示しておくと、実用上十分な明るさをもつ放電セル
の形状は約0.8 rra角、深さ1.5〜2IInの
直方体の空間であり、放電空間構成体は隔壁を介してこ
の放電セルを垂直方向に約480セル、水平方向に約8
00セルを配列した構造となる。また、このセル数等は
、現用のNTSC標準モードの画像の場合であり、今後
実用化されるIDTV、EDTV、HDTVでは放電セ
ルの微少化、すなわち、放電セル数の増大が必要となる
As can be seen from the above description, in a gas discharge display device, the display brightness, resolution, etc. largely depend on the shape of the discharge space. That is, in manufacturing a gas discharge display device, the manufacturing technology of the discharge space structure occupies an important position. In particular, since full-color gas discharge televisions require high brightness and high resolution, highly accurate discharge space structure fabrication technology is required. Here, to show the structure of the discharge space structure assuming a 40-inch full-color gas discharge television, the shape of a discharge cell with sufficient brightness for practical use is about 0.8 rra square and depth. It is a rectangular parallelepiped space of 1.5 to 2 IIn, and the discharge space structure includes approximately 480 cells in the vertical direction and approximately 8 cells in the horizontal direction through partition walls.
It has a structure in which 00 cells are arranged. Further, this number of cells, etc. is for images in the current NTSC standard mode, and IDTV, EDTV, and HDTV that will be put into practical use in the future will require miniaturization of discharge cells, that is, an increase in the number of discharge cells.

又一方、上記した対角40インチのフルカラーテレビで
は放電セル数が数十力価に達するので、加工の生産性が
高いことも要求される。
On the other hand, in the above-mentioned 40-inch diagonal full-color television, the number of discharge cells reaches tens of titers, so high processing productivity is also required.

ところで、従来のガス放電表示装置の放電空間は大別す
ると以下の2種の方法で構成されていた。
By the way, the discharge spaces of conventional gas discharge display devices are constructed using the following two types of methods.

第1の方法は、研削、エツチング、レーザ照射。The first method is grinding, etching, and laser irradiation.

超音波加工法により素材に貫通孔を開け、これを放電空
間として利用する方法である。この場合、研削法による
加工では孔の断面は円形となり、平面内の放電空間の割
合が低下するという問題点があった。また、角型の貫通
孔については、生産性が極端に低いという問題点があっ
た。エツチング法では、サイドエッチが起る為、断面形
状が一定とならず、又加工可能な素材の厚さは孔径II
に対して約0.3 m以下となる、等の問題があった。
This method uses ultrasonic machining to create a through hole in the material and uses this as a discharge space. In this case, when machining is performed by the grinding method, the cross section of the hole becomes circular, resulting in a problem that the proportion of the discharge space within the plane decreases. Furthermore, there is a problem in that the productivity of square through holes is extremely low. In the etching method, side etching occurs, so the cross-sectional shape is not constant, and the thickness of the material that can be processed is limited to the hole diameter II.
There were problems such as the distance being approximately 0.3 m or less.

また、レーザ照射による穿孔では、孔の周囲等にダメー
ジが残るという問題があり、超音波加工法ではホーンと
称される加工部の消耗が激しい為、加工の生産性が低い
という問題点があった。
In addition, drilling by laser irradiation has the problem of leaving damage around the hole, and ultrasonic processing has the problem of low processing productivity because the processing part called the horn is severely worn out. Ta.

第2の方法は厚膜プロセスにより放電空間を構成する方
法である。この方法はスクリーン印刷等の厚膜プロセス
によってセラミックスの厚膜を形成し、放電空間を構成
するものであるが、1回のプロセスで構成できる放電空
間の深さが約0.05mと薄い為、例えば、深さ1a+
+の放電空間を構成するのに20回のプロセスの繰り返
しが必要となる。
The second method is to configure the discharge space by a thick film process. In this method, a thick ceramic film is formed using a thick film process such as screen printing to form a discharge space, but since the depth of the discharge space that can be created in one process is only about 0.05 m, For example, depth 1a+
It takes 20 repetitions of the process to construct the positive discharge space.

通常、厚膜プロセスでは、乾燥、焼成、焼鈍過程など、
長時間の工程が必要である為、この方法の生産性は低く
、かつ、プロセスを繰り返す為、孔の断面が一定となら
ないという問題点があった。
Typically, thick film processes include drying, baking, annealing processes, etc.
Since the process requires a long time, the productivity of this method is low, and since the process is repeated, there is a problem that the cross section of the hole is not constant.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

前述したように、従来技術は、大画面、高輝度。 As mentioned above, the conventional technology is large screen, high brightness.

高解像度を有するフルカラーテレビを代表例とするよう
なガス放電表示装置の放電空間を構成する技術としては
、加工の生産性が低いという問題点があった。
Techniques for configuring the discharge space of a gas discharge display device, typified by a full-color television with high resolution, have had the problem of low processing productivity.

本発明の目的は、断面積が0.04〜3m2.深さが0
.2〜5mと大容積である放電セルにより構成された放
電空間を生産性高く作製する技術に基づき高品質、低価
格のガス放電表示装置を提供することにある。
The object of the present invention is to have a cross-sectional area of 0.04 to 3 m2. depth is 0
.. The object of the present invention is to provide a high-quality, low-cost gas discharge display device based on a technology for manufacturing a discharge space constituted by discharge cells having a large volume of 2 to 5 m with high productivity.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的は、耐熱性に優れ、加工も容易なグラファイト
板を精密加工して放電空間構成体の「型」とし、この型
の空隙に300メツシユ以下の大きさに粉砕したガラス
等のセラミックス微粉末を充填、この後、電気炉中等に
おいて酸素成分等を排除しつつ、加熱溶解、冷却してガ
ラスブロックを形成した後グラファイト部分を除去して
放電空間構成体を作製することにより達成される。
The above purpose is to precisely machine a graphite plate, which has excellent heat resistance and is easy to process, to create a "mold" for the discharge space structure, and fill the voids of this mold with fine ceramic powder such as glass crushed to a size of 300 mesh or less. After that, the glass block is formed by heating, melting, and cooling while excluding oxygen components in an electric furnace or the like, and then the graphite portion is removed to produce a discharge space structure.

〔作用〕 本発明の作用を第2図(a)〜第2図(c)を用いて説
明する。
[Operation] The operation of the present invention will be explained using FIGS. 2(a) to 2(c).

あらかじめ放電セル断面形状の一辺の長さの厚みに加工
されたグラファイト板11を重ね合わせて十分に固定す
る。次に、ワイヤー放電加工機12等を用いて、放電セ
ル断面形状の他の一辺の長さの巾に溝入れ一体加工を行
なう。
Graphite plates 11, which have been processed in advance to have a thickness equal to the length of one side of the cross-sectional shape of the discharge cell, are overlapped and sufficiently fixed. Next, using a wire electric discharge machine 12 or the like, integral grooving is performed on the width of the other side of the discharge cell cross-sectional shape.

次にグラファイト板11を分解し、グラファイト板間に
スペーサ等を用いて、ガス放電表示装置の空間パターン
状に配置固定する。これにより放電空間構成体作製の型
が出来る。
Next, the graphite plates 11 are disassembled, and spacers or the like are used between the graphite plates to arrange and fix them in a spatial pattern of a gas discharge display device. This creates a mold for producing the discharge space structure.

次にこれを底付きのワク13におさめ、空隙部にガラス
等のセラミックス微粉末を十分に充填する。
Next, this is placed in a bottomed workpiece 13, and the cavity is sufficiently filled with ceramic fine powder such as glass.

次に、これを無酸素中でガラスの溶解温度以上に加熱す
るが、この時グラファイトは「型」として確保され、冷
却されたガラスブロック15の中に残る。このガラスブ
ロック15中のグラファイトは酸素中での加熱燃焼等で
取除く、その後、放電セルの長さ(厚さ)にワイヤーソ
ー16等を用いてスライスすれば放電空間構成体が完成
する。
This is then heated above the melting temperature of the glass in an oxygen-free atmosphere, at which time the graphite is retained as a "mold" and remains in the cooled glass block 15. The graphite in the glass block 15 is removed by heating and burning in oxygen, and then the discharge space structure is completed by slicing the glass block to the length (thickness) of the discharge cell using a wire saw 16 or the like.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図、第2図(a)〜第2
図(c)および第3図により詳細に説明する。
An embodiment of the present invention will be described below with reference to FIGS. 1 and 2(a) to 2.
This will be explained in detail with reference to FIG. 3(c) and FIG.

高密度グラファイトブロックを、縦30m、横52mn
、厚さIIに加工し、これを40枚組合せ固定した後、
0.2 m巾の放電加工ワイヤー12を用いて1m間隔
のスリットを上端より25nnの長さに切込み、溝入れ
加工を行った。次にこのグラファイト板11を分離し、
1枚ずつ長さ方向に交互に0.5 rtaずつずらし、
かつ下部すなわちスリットのない部分に厚さ0.25 
rmのグラファイト板からなるスペーサをはさんでグラ
ファイト板11の間にも空隙を設けて「型」としく第2
図(a))これを80薗角深さ50m++の底付きグラ
ファイト製ルツボ13に入れて固定した。このルツボの
中にソーダ石灰ガラス微粉末を投入、「型」の空隙を完
全に満したことを確認し更に「型」上20IInまで充
填した後、シリコンユニット電気炉にセットした。窒素
ガス中箱囲気で1200℃。
High-density graphite block, 30m long and 52m wide
, after processing to thickness II and fixing 40 pieces together,
Grooving was performed by cutting slits at 1 m intervals to a length of 25 nn from the upper end using a 0.2 m wide electrical discharge machining wire 12. Next, this graphite plate 11 is separated,
Alternately shift each sheet by 0.5 rta in the length direction,
And the thickness is 0.25 at the lower part, that is, the part without slits.
A spacer made of graphite plates of rm is sandwiched between the graphite plates 11, and a gap is also provided between the graphite plates 11 to serve as a "mold".
Figure (a)) This was placed in a graphite crucible 13 with a bottom of 80 mm and depth of 50 m++ and fixed. Fine soda-lime glass powder was put into this crucible, and it was confirmed that the void in the "mold" was completely filled, and after filling up to 20 IIn above the "mold", the crucible was set in a silicon unit electric furnace. 1200℃ in a nitrogen gas box.

2時間保持した後除冷してガラスブロック15を作製し
く第2図b))、引続き今度は空気中で800℃まで昇
温加熱してグラファイトを燃焼除去した。この貫通長孔
付きのガラスブロック15を、ダイヤモンドワイヤーソ
ー16で厚さ1.5 mに仕上げ、放電空間構成体2を
作製した(第2図(C))。
After being held for 2 hours, the glass block 15 was prepared by slowly cooling the glass block 15 (FIG. 2b)), and then heating it in air to 800° C. to burn off the graphite. This glass block 15 with long through holes was finished to a thickness of 1.5 m using a diamond wire saw 16 to produce a discharge space structure 2 (FIG. 2(C)).

以上の方法で作製した放電空間構成体2の光学顕微鏡写
真を第3図に示す、第3図かられかるように、放電空間
構成体は0.8m−11a角、深さ1.5 mの空孔が
1.0 mピッチで無欠陥で配列した構造となっている
。又、加工の公差は±0.005 %であった。
FIG. 3 shows an optical micrograph of the discharge space structure 2 produced by the above method. As can be seen from FIG. It has a structure in which holes are arranged at a pitch of 1.0 m without defects. Furthermore, the processing tolerance was ±0.005%.

つぎに、この放電空間構成体2の壁面に、紫外線励起緑
色蛍光体(Mn添加ZnzSiOa)7を塗布し、上面
に陽極マトリックスを形成したガラス表示板4、下面に
陰極マトリックスを形成したガラス基板6を接着し、X
eガスをを封入してガス放電表示装置を作製した(第1
図)。陽極3はNi膜、陰極5はBa金属膜である。こ
のようにして作製した装置を動作させたところ、画面輝
度約150fLと実用上十分な明るさであり、かつ、表
示セル間のクロストークも無く、機械的強度も十分であ
るという、ガス放電表示装置として要求 lされる基本
的仕様を満足する結果が得られた。
Next, an ultraviolet-excited green phosphor (Mn-doped ZnzSiOa) 7 is applied to the wall surface of this discharge space structure 2, and a glass display plate 4 with an anode matrix formed on the upper surface and a glass substrate 6 with a cathode matrix formed on the lower surface are coated. Glue the
A gas discharge display device was manufactured by filling e-gas (first
figure). The anode 3 is a Ni film, and the cathode 5 is a Ba metal film. When the device fabricated in this manner was operated, it was found that the screen brightness was approximately 150 fL, which was sufficient for practical use, and there was no crosstalk between display cells, and the mechanical strength was sufficient. Results were obtained that satisfied the basic specifications required for the device.

本発明の技術と従来技術の生産性を比較することはやや
困難であると思われるが、例えば1通常の化学エツチン
グ法のみで貫通孔を作製する方法では、エツチング速度
が遅いこと、また0、2m程度の薄板作製が限界である
ため、積み重ね型にならざるを得ないなどの問題点があ
ることから考えて、本発明の技術的優位はかなり高い。
Although it may be somewhat difficult to compare the productivity of the technology of the present invention and the conventional technology, for example, 1. the method of creating through holes using only the usual chemical etching method has a slow etching speed; The technical superiority of the present invention is quite high considering that there are problems such as the fact that the production of thin plates of about 2 m is the limit and the stacking type has no choice but to be used.

尚、本発明は実施例に用いた陽極、陰極材料。In addition, the present invention refers to the anode and cathode materials used in the examples.

蛍光体剤等によって制限を受けるものでないことはいう
までもない。
Needless to say, this is not limited by the phosphor agent or the like.

〔発明の効果〕〔Effect of the invention〕

以上、説明により明らかなように、本発明によればガス
放電表示装置の放電空間構成体が高精度で、かつ、高い
生産性を持って製造することが可能となり、ガス放電表
示装置の高画質化、低コスト化が達成できるという効果
がある。とくに、近年開発が望まれている壁かけ型の大
画面フルカラーテレどの実現に効果がある。
As is clear from the above description, according to the present invention, the discharge space structure of a gas discharge display device can be manufactured with high precision and high productivity, and the gas discharge display device can have high image quality. This has the effect of achieving greater efficiency and lower costs. In particular, it is effective in realizing wall-mounted large-screen full-color televisions, which have been desired to be developed in recent years.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はガス放電表示装置の断面の模式図、第2図(a
)〜第2図(、)は本発明の一実施例の製造工程の模式
図、第3図は本発明の一実施例により作製した放電空間
構成体の光学顕微鏡写真である。 1・・・放電セル(空間)、2・・・放電空間構成体、
3・・・陽極、4・・・表示板、5・・・陰極、6・・
・基板、7・・・蛍光体、11・・・グラファイト板、
12・・・ワイヤー加工機(部分)13・・・ワク(ル
ツボ)、14・・・ガラス粉末、15・・・ガラスブロ
ック、16・・・ワイヤ87  図 第 28
Figure 1 is a schematic cross-sectional view of a gas discharge display device, and Figure 2 (a
) to FIG. 2(, ) are schematic diagrams of the manufacturing process according to an embodiment of the present invention, and FIG. 3 is an optical micrograph of a discharge space structure produced according to an embodiment of the present invention. 1... Discharge cell (space), 2... Discharge space structure,
3... Anode, 4... Display board, 5... Cathode, 6...
-Substrate, 7...phosphor, 11...graphite plate,
12... Wire processing machine (part) 13... Work (crucible), 14... Glass powder, 15... Glass block, 16... Wire 87 Figure 28

Claims (1)

【特許請求の範囲】 1、放電空間に相当する部分の「型」のまわりにガラス
等のセラミックス粉末を単独あるいは混合して充填し、
これを加熱溶解冷却した後、「型」部を除去して放電空
間とすることを特徴とする放電空間構成体の製造方法。 2、上記「型」の構成材料はグラファイトである特許請
求の範囲第1項記載の放電空間構成体の製造方法。 3、放電空間の形状が辺長0.2〜1.5mmの正方形
、ないしは長辺の長さが0.4〜2.0mm、短辺の長
さが0.2〜1.5mmの長方形である放電空間構成体
を有することを特徴とするガス放電表示装置。
[Claims] 1. Filling the "mold" in the part corresponding to the discharge space with ceramic powder such as glass alone or in combination;
A method for manufacturing a discharge space structure, which comprises heating, melting, cooling, and then removing a "mold" portion to form a discharge space. 2. The method for manufacturing a discharge space structure according to claim 1, wherein the constituent material of the "mold" is graphite. 3. The shape of the discharge space is a square with a side length of 0.2 to 1.5 mm, or a rectangle with a long side length of 0.4 to 2.0 mm and a short side length of 0.2 to 1.5 mm. A gas discharge display device characterized by having a discharge space structure.
JP8501488A 1988-04-08 1988-04-08 Manufacture of discharge gap constituting body and gas discharge display device Pending JPH01258339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8501488A JPH01258339A (en) 1988-04-08 1988-04-08 Manufacture of discharge gap constituting body and gas discharge display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8501488A JPH01258339A (en) 1988-04-08 1988-04-08 Manufacture of discharge gap constituting body and gas discharge display device

Publications (1)

Publication Number Publication Date
JPH01258339A true JPH01258339A (en) 1989-10-16

Family

ID=13846890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8501488A Pending JPH01258339A (en) 1988-04-08 1988-04-08 Manufacture of discharge gap constituting body and gas discharge display device

Country Status (1)

Country Link
JP (1) JPH01258339A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100228780B1 (en) * 1995-09-13 1999-11-01 김영남 Fabricating method of barrier of flat panel display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100228780B1 (en) * 1995-09-13 1999-11-01 김영남 Fabricating method of barrier of flat panel display device

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