JPH01113191A - レーザビーム位置検出装置 - Google Patents
レーザビーム位置検出装置Info
- Publication number
- JPH01113191A JPH01113191A JP62266598A JP26659887A JPH01113191A JP H01113191 A JPH01113191 A JP H01113191A JP 62266598 A JP62266598 A JP 62266598A JP 26659887 A JP26659887 A JP 26659887A JP H01113191 A JPH01113191 A JP H01113191A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- ultrasonic
- optical axis
- medium
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 235000010627 Phaseolus vulgaris Nutrition 0.000 abstract 1
- 244000046052 Phaseolus vulgaris Species 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 238000000418 atomic force spectrum Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62266598A JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62266598A JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113191A true JPH01113191A (ja) | 1989-05-01 |
| JPH0520195B2 JPH0520195B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=17433038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62266598A Granted JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01113191A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6332752B2 (en) | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
| JP2009519132A (ja) * | 2005-12-15 | 2009-05-14 | トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | 光学要素の状態識別又は状態変化識別方法及びレーザ装置 |
| WO2010077506A3 (en) * | 2008-12-08 | 2010-09-16 | Electro Scientific Industries, Inc | Controlling dynamic and thermal loads on laser beam positioning system to achieve high throughput laser processing of workpiece features |
| WO2021145357A1 (ja) * | 2020-01-15 | 2021-07-22 | パナソニックＩｐマネジメント株式会社 | レーザ装置及びそれを用いたレーザ加工装置 |
| US12188477B2 (en) | 2020-10-09 | 2025-01-07 | Edwards Japan Limited | Vacuum pump and rotating cylinder provided in vacuum pump |
-
1987
- 1987-10-23 JP JP62266598A patent/JPH01113191A/ja active Granted
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6332752B2 (en) | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
| US6953317B2 (en) | 1997-06-27 | 2005-10-11 | Ebara Corporation | Turbo-molecular pump |
| JP2009519132A (ja) * | 2005-12-15 | 2009-05-14 | トルンプフ ヴェルクツォイクマシーネン ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | 光学要素の状態識別又は状態変化識別方法及びレーザ装置 |
| WO2010077506A3 (en) * | 2008-12-08 | 2010-09-16 | Electro Scientific Industries, Inc | Controlling dynamic and thermal loads on laser beam positioning system to achieve high throughput laser processing of workpiece features |
| US8680430B2 (en) | 2008-12-08 | 2014-03-25 | Electro Scientific Industries, Inc. | Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features |
| WO2021145357A1 (ja) * | 2020-01-15 | 2021-07-22 | パナソニックＩｐマネジメント株式会社 | レーザ装置及びそれを用いたレーザ加工装置 |
| JPWO2021145357A1 (enrdf_load_stackoverflow) * | 2020-01-15 | 2021-07-22 | ||
| US12188477B2 (en) | 2020-10-09 | 2025-01-07 | Edwards Japan Limited | Vacuum pump and rotating cylinder provided in vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0520195B2 (enrdf_load_stackoverflow) | 1993-03-18 |
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