JPH0520195B2 - - Google Patents
Info
- Publication number
- JPH0520195B2 JPH0520195B2 JP62266598A JP26659887A JPH0520195B2 JP H0520195 B2 JPH0520195 B2 JP H0520195B2 JP 62266598 A JP62266598 A JP 62266598A JP 26659887 A JP26659887 A JP 26659887A JP H0520195 B2 JPH0520195 B2 JP H0520195B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- optical axis
- ultrasonic
- optical system
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62266598A JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62266598A JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113191A JPH01113191A (ja) | 1989-05-01 |
| JPH0520195B2 true JPH0520195B2 (enrdf_load_stackoverflow) | 1993-03-18 |
Family
ID=17433038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62266598A Granted JPH01113191A (ja) | 1987-10-23 | 1987-10-23 | レーザビーム位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01113191A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6332752B2 (en) | 1997-06-27 | 2001-12-25 | Ebara Corporation | Turbo-molecular pump |
| EP1963045B1 (de) * | 2005-12-15 | 2009-11-04 | Trumpf Werkzeugmaschinen GmbH + Co. KG | Verfahren und laseranordnung mit einer vorrichtung zur zustandserkennung eines optischen elements |
| US8680430B2 (en) | 2008-12-08 | 2014-03-25 | Electro Scientific Industries, Inc. | Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features |
| WO2021145357A1 (ja) * | 2020-01-15 | 2021-07-22 | パナソニックＩｐマネジメント株式会社 | レーザ装置及びそれを用いたレーザ加工装置 |
| JP2022062902A (ja) | 2020-10-09 | 2022-04-21 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる回転円筒体 |
-
1987
- 1987-10-23 JP JP62266598A patent/JPH01113191A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01113191A (ja) | 1989-05-01 |
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