JPH01100098A - 炭化ケイ素ウィスカの製造方法 - Google Patents
炭化ケイ素ウィスカの製造方法Info
- Publication number
- JPH01100098A JPH01100098A JP25743687A JP25743687A JPH01100098A JP H01100098 A JPH01100098 A JP H01100098A JP 25743687 A JP25743687 A JP 25743687A JP 25743687 A JP25743687 A JP 25743687A JP H01100098 A JPH01100098 A JP H01100098A
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- compound
- carbide whiskers
- production
- molar ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25743687A JPH01100098A (ja) | 1987-10-14 | 1987-10-14 | 炭化ケイ素ウィスカの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25743687A JPH01100098A (ja) | 1987-10-14 | 1987-10-14 | 炭化ケイ素ウィスカの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01100098A true JPH01100098A (ja) | 1989-04-18 |
| JPH03360B2 JPH03360B2 (OSRAM) | 1991-01-07 |
Family
ID=17306331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25743687A Granted JPH01100098A (ja) | 1987-10-14 | 1987-10-14 | 炭化ケイ素ウィスカの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01100098A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101531426B1 (ko) * | 2007-03-01 | 2015-06-24 | 가부시키가이샤 니콘 | 펠리클 프레임 장치, 마스크, 노광 방법, 노광 장치, 및 디바이스의 제조 방법 |
-
1987
- 1987-10-14 JP JP25743687A patent/JPH01100098A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101531426B1 (ko) * | 2007-03-01 | 2015-06-24 | 가부시키가이샤 니콘 | 펠리클 프레임 장치, 마스크, 노광 방법, 노광 장치, 및 디바이스의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03360B2 (OSRAM) | 1991-01-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |