JP7755241B2 - 荷重センサ及び荷重センサの製造方法 - Google Patents

荷重センサ及び荷重センサの製造方法

Info

Publication number
JP7755241B2
JP7755241B2 JP2024549896A JP2024549896A JP7755241B2 JP 7755241 B2 JP7755241 B2 JP 7755241B2 JP 2024549896 A JP2024549896 A JP 2024549896A JP 2024549896 A JP2024549896 A JP 2024549896A JP 7755241 B2 JP7755241 B2 JP 7755241B2
Authority
JP
Japan
Prior art keywords
surface portion
housing
upper housing
load sensor
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024549896A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024070393A1 (cg-RX-API-DMAC7.html
JPWO2024070393A5 (cg-RX-API-DMAC7.html
Inventor
裕一 室▲崎▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2024070393A1 publication Critical patent/JPWO2024070393A1/ja
Publication of JPWO2024070393A5 publication Critical patent/JPWO2024070393A5/ja
Application granted granted Critical
Publication of JP7755241B2 publication Critical patent/JP7755241B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
JP2024549896A 2022-09-29 2023-08-28 荷重センサ及び荷重センサの製造方法 Active JP7755241B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022156312 2022-09-29
JP2022156312 2022-09-29
PCT/JP2023/031038 WO2024070393A1 (ja) 2022-09-29 2023-08-28 荷重センサ及び荷重センサの製造方法

Publications (3)

Publication Number Publication Date
JPWO2024070393A1 JPWO2024070393A1 (cg-RX-API-DMAC7.html) 2024-04-04
JPWO2024070393A5 JPWO2024070393A5 (cg-RX-API-DMAC7.html) 2025-04-22
JP7755241B2 true JP7755241B2 (ja) 2025-10-16

Family

ID=90477089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024549896A Active JP7755241B2 (ja) 2022-09-29 2023-08-28 荷重センサ及び荷重センサの製造方法

Country Status (4)

Country Link
US (1) US20250180414A1 (cg-RX-API-DMAC7.html)
JP (1) JP7755241B2 (cg-RX-API-DMAC7.html)
CN (1) CN119768670A (cg-RX-API-DMAC7.html)
WO (1) WO2024070393A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4243222B1 (de) * 2022-03-09 2024-05-15 WEZAG GmbH & Co. KG Crimpzangen-kraftsensor und crimpzange

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541849A (en) 1968-05-08 1970-11-24 James P Corbett Oscillating crystal force transducer system
JP2001099859A (ja) 1999-09-30 2001-04-13 Matsushita Electric Ind Co Ltd 加速度センサ
JP2010276532A (ja) 2009-05-29 2010-12-09 Piezo Parts Kk 応力センサ
WO2017213059A1 (ja) 2016-06-06 2017-12-14 国立大学法人名古屋大学 水晶振動子を用いたワイドレンジ荷重センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541849A (en) 1968-05-08 1970-11-24 James P Corbett Oscillating crystal force transducer system
JP2001099859A (ja) 1999-09-30 2001-04-13 Matsushita Electric Ind Co Ltd 加速度センサ
JP2010276532A (ja) 2009-05-29 2010-12-09 Piezo Parts Kk 応力センサ
WO2017213059A1 (ja) 2016-06-06 2017-12-14 国立大学法人名古屋大学 水晶振動子を用いたワイドレンジ荷重センサ

Also Published As

Publication number Publication date
JPWO2024070393A1 (cg-RX-API-DMAC7.html) 2024-04-04
WO2024070393A1 (ja) 2024-04-04
CN119768670A (zh) 2025-04-04
US20250180414A1 (en) 2025-06-05

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