CN119768670A - 载荷传感器以及载荷传感器的制造方法 - Google Patents

载荷传感器以及载荷传感器的制造方法 Download PDF

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Publication number
CN119768670A
CN119768670A CN202380061990.7A CN202380061990A CN119768670A CN 119768670 A CN119768670 A CN 119768670A CN 202380061990 A CN202380061990 A CN 202380061990A CN 119768670 A CN119768670 A CN 119768670A
Authority
CN
China
Prior art keywords
surface portion
load sensor
thickness direction
piezoelectric vibrator
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380061990.7A
Other languages
English (en)
Chinese (zh)
Inventor
室崎裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN119768670A publication Critical patent/CN119768670A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
CN202380061990.7A 2022-09-29 2023-08-28 载荷传感器以及载荷传感器的制造方法 Pending CN119768670A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022156312 2022-09-29
JP2022-156312 2022-09-29
PCT/JP2023/031038 WO2024070393A1 (ja) 2022-09-29 2023-08-28 荷重センサ及び荷重センサの製造方法

Publications (1)

Publication Number Publication Date
CN119768670A true CN119768670A (zh) 2025-04-04

Family

ID=90477089

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380061990.7A Pending CN119768670A (zh) 2022-09-29 2023-08-28 载荷传感器以及载荷传感器的制造方法

Country Status (4)

Country Link
US (1) US20250180414A1 (cg-RX-API-DMAC7.html)
JP (1) JP7755241B2 (cg-RX-API-DMAC7.html)
CN (1) CN119768670A (cg-RX-API-DMAC7.html)
WO (1) WO2024070393A1 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4243222B1 (de) * 2022-03-09 2024-05-15 WEZAG GmbH & Co. KG Crimpzangen-kraftsensor und crimpzange

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541849A (en) * 1968-05-08 1970-11-24 James P Corbett Oscillating crystal force transducer system
JP2001099859A (ja) * 1999-09-30 2001-04-13 Matsushita Electric Ind Co Ltd 加速度センサ
JP2010276532A (ja) * 2009-05-29 2010-12-09 Piezo Parts Kk 応力センサ
EP3467462B1 (en) * 2016-06-06 2023-09-06 National University Corporation Nagoya University Wide-range load sensor using quartz resonator

Also Published As

Publication number Publication date
JPWO2024070393A1 (cg-RX-API-DMAC7.html) 2024-04-04
WO2024070393A1 (ja) 2024-04-04
JP7755241B2 (ja) 2025-10-16
US20250180414A1 (en) 2025-06-05

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