JP7706093B2 - 荷重センサ - Google Patents

荷重センサ Download PDF

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Publication number
JP7706093B2
JP7706093B2 JP2023500692A JP2023500692A JP7706093B2 JP 7706093 B2 JP7706093 B2 JP 7706093B2 JP 2023500692 A JP2023500692 A JP 2023500692A JP 2023500692 A JP2023500692 A JP 2023500692A JP 7706093 B2 JP7706093 B2 JP 7706093B2
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JP
Japan
Prior art keywords
dielectric
load
load sensor
protrusions
capacitance
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JP2023500692A
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English (en)
Japanese (ja)
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JPWO2022176588A1 (https=
JPWO2022176588A5 (https=
Inventor
唯 相原
進 浦上
祐太 森浦
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2023500692A 2021-02-17 2022-01-31 荷重センサ Active JP7706093B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021023571 2021-02-17
JP2021023571 2021-02-17
PCT/JP2022/003600 WO2022176588A1 (ja) 2021-02-17 2022-01-31 荷重センサ

Publications (3)

Publication Number Publication Date
JPWO2022176588A1 JPWO2022176588A1 (https=) 2022-08-25
JPWO2022176588A5 JPWO2022176588A5 (https=) 2024-11-15
JP7706093B2 true JP7706093B2 (ja) 2025-07-11

Family

ID=82931997

Family Applications (1)

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JP2023500692A Active JP7706093B2 (ja) 2021-02-17 2022-01-31 荷重センサ

Country Status (4)

Country Link
US (1) US12422315B2 (https=)
JP (1) JP7706093B2 (https=)
CN (1) CN116917706A (https=)
WO (1) WO2022176588A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022250939A1 (en) * 2021-05-27 2022-12-01 The University Of Chicago Strain-insensitive soft pressure sensor and method of measuring pressure

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060016275A1 (en) 2002-12-12 2006-01-26 Danfoss A/S Tactile sensor element and sensor array
US20130047747A1 (en) 2011-08-25 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Capacitive pressure sensor and input device including the same
JP2015187561A (ja) 2014-03-26 2015-10-29 株式会社日本自動車部品総合研究所 圧力センサ
WO2018096901A1 (ja) 2016-11-25 2018-05-31 パナソニックＩｐマネジメント株式会社 感圧素子および操舵装置
US20210041310A1 (en) 2018-03-01 2021-02-11 Universitat Basel Vizerektorat Forschung Dielectric elastomer transducer and corresponding fabrication process

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (FH), 88167 Maierhöfen Meßanordnung, vorzugsweise in Form einer Meßplattform
JP4429478B2 (ja) 2000-05-19 2010-03-10 ニッタ株式会社 力検出装置
JP3999707B2 (ja) * 2003-06-12 2007-10-31 ニッタ株式会社 静電容量型センサ
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP5821328B2 (ja) * 2010-07-26 2015-11-24 セイコーエプソン株式会社 電子機器装置、ロボットハンド及びロボット
JP2012108021A (ja) * 2010-11-18 2012-06-07 Seiko Epson Corp 検出装置、電子機器及びロボット
EP2824549B1 (en) * 2012-03-09 2019-08-07 Sony Corporation Sensor device, input device, and electronic apparatus
DE102014201434B4 (de) * 2014-01-27 2016-10-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Volumenkompressible kapazitive flächige flexible Sensormatte zur Messung von Druck oder Druckverteilungen und/oder zur Messung oder Detektion von Deformationen
CN105716748B (zh) * 2014-12-22 2020-08-21 松下知识产权经营株式会社 感压元件
JP6643647B2 (ja) * 2015-03-19 2020-02-12 パナソニックＩｐマネジメント株式会社 感圧素子
WO2018144772A1 (en) * 2017-02-03 2018-08-09 The Regents Of The University Of California Enhanced pressure sensing performance for pressure sensors
CN110446912B (zh) * 2017-03-23 2021-07-20 松下知识产权经营株式会社 触觉传感器以及构成该触觉传感器的触觉传感器单元
CN207976237U (zh) * 2018-04-10 2018-10-16 太原工业学院 基于锯齿结构的柔性压力传感器
WO2020003688A1 (ja) * 2018-06-28 2020-01-02 株式会社ワコム 圧力検出素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060016275A1 (en) 2002-12-12 2006-01-26 Danfoss A/S Tactile sensor element and sensor array
US20130047747A1 (en) 2011-08-25 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Capacitive pressure sensor and input device including the same
JP2015187561A (ja) 2014-03-26 2015-10-29 株式会社日本自動車部品総合研究所 圧力センサ
WO2018096901A1 (ja) 2016-11-25 2018-05-31 パナソニックＩｐマネジメント株式会社 感圧素子および操舵装置
US20210041310A1 (en) 2018-03-01 2021-02-11 Universitat Basel Vizerektorat Forschung Dielectric elastomer transducer and corresponding fabrication process

Also Published As

Publication number Publication date
US12422315B2 (en) 2025-09-23
CN116917706A (zh) 2023-10-20
WO2022176588A1 (ja) 2022-08-25
JPWO2022176588A1 (https=) 2022-08-25
US20230384174A1 (en) 2023-11-30

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