CN116917706A - 负荷传感器 - Google Patents

负荷传感器 Download PDF

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Publication number
CN116917706A
CN116917706A CN202280015411.0A CN202280015411A CN116917706A CN 116917706 A CN116917706 A CN 116917706A CN 202280015411 A CN202280015411 A CN 202280015411A CN 116917706 A CN116917706 A CN 116917706A
Authority
CN
China
Prior art keywords
dielectric
load
protrusions
load sensor
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280015411.0A
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English (en)
Chinese (zh)
Inventor
相原唯
浦上进
森浦祐太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN116917706A publication Critical patent/CN116917706A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
CN202280015411.0A 2021-02-17 2022-01-31 负荷传感器 Pending CN116917706A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021023571 2021-02-17
JP2021-023571 2021-02-17
PCT/JP2022/003600 WO2022176588A1 (ja) 2021-02-17 2022-01-31 荷重センサ

Publications (1)

Publication Number Publication Date
CN116917706A true CN116917706A (zh) 2023-10-20

Family

ID=82931997

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280015411.0A Pending CN116917706A (zh) 2021-02-17 2022-01-31 负荷传感器

Country Status (4)

Country Link
US (1) US12422315B2 (https=)
JP (1) JP7706093B2 (https=)
CN (1) CN116917706A (https=)
WO (1) WO2022176588A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022250939A1 (en) * 2021-05-27 2022-12-01 The University Of Chicago Strain-insensitive soft pressure sensor and method of measuring pressure

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012108021A (ja) * 2010-11-18 2012-06-07 Seiko Epson Corp 検出装置、電子機器及びロボット
US20130047747A1 (en) * 2011-08-25 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Capacitive pressure sensor and input device including the same
US20160273987A1 (en) * 2015-03-19 2016-09-22 Panasonic Intellectual Property Management Co., Ltd. Pressure sensing element including electrode having protrusion
CN207976237U (zh) * 2018-04-10 2018-10-16 太原工业学院 基于锯齿结构的柔性压力传感器
CN109923388A (zh) * 2016-11-25 2019-06-21 松下知识产权经营株式会社 压敏元件以及转向装置
CN110446912A (zh) * 2017-03-23 2019-11-12 松下知识产权经营株式会社 触觉传感器以及构成该触觉传感器的触觉传感器单元
CN112236656A (zh) * 2018-06-28 2021-01-15 株式会社和冠 压力检测元件

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (FH), 88167 Maierhöfen Meßanordnung, vorzugsweise in Form einer Meßplattform
JP4429478B2 (ja) 2000-05-19 2010-03-10 ニッタ株式会社 力検出装置
ATE440319T1 (de) 2002-12-12 2009-09-15 Danfoss As Berührungssensorelement und sensorgruppe
JP3999707B2 (ja) * 2003-06-12 2007-10-31 ニッタ株式会社 静電容量型センサ
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP5821328B2 (ja) * 2010-07-26 2015-11-24 セイコーエプソン株式会社 電子機器装置、ロボットハンド及びロボット
EP2824549B1 (en) * 2012-03-09 2019-08-07 Sony Corporation Sensor device, input device, and electronic apparatus
DE102014201434B4 (de) * 2014-01-27 2016-10-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Volumenkompressible kapazitive flächige flexible Sensormatte zur Messung von Druck oder Druckverteilungen und/oder zur Messung oder Detektion von Deformationen
JP2015187561A (ja) 2014-03-26 2015-10-29 株式会社日本自動車部品総合研究所 圧力センサ
CN105716748B (zh) * 2014-12-22 2020-08-21 松下知识产权经营株式会社 感压元件
WO2018144772A1 (en) * 2017-02-03 2018-08-09 The Regents Of The University Of California Enhanced pressure sensing performance for pressure sensors
WO2019166635A1 (en) 2018-03-01 2019-09-06 Universität Basel Vizerektorat Forschung Dielectric elastomer transducer and corresponding fabrication process

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012108021A (ja) * 2010-11-18 2012-06-07 Seiko Epson Corp 検出装置、電子機器及びロボット
US20130047747A1 (en) * 2011-08-25 2013-02-28 Samsung Electro-Mechanics Co., Ltd. Capacitive pressure sensor and input device including the same
US20160273987A1 (en) * 2015-03-19 2016-09-22 Panasonic Intellectual Property Management Co., Ltd. Pressure sensing element including electrode having protrusion
CN109923388A (zh) * 2016-11-25 2019-06-21 松下知识产权经营株式会社 压敏元件以及转向装置
CN110446912A (zh) * 2017-03-23 2019-11-12 松下知识产权经营株式会社 触觉传感器以及构成该触觉传感器的触觉传感器单元
CN207976237U (zh) * 2018-04-10 2018-10-16 太原工业学院 基于锯齿结构的柔性压力传感器
CN112236656A (zh) * 2018-06-28 2021-01-15 株式会社和冠 压力检测元件

Also Published As

Publication number Publication date
US12422315B2 (en) 2025-09-23
WO2022176588A1 (ja) 2022-08-25
JPWO2022176588A1 (https=) 2022-08-25
JP7706093B2 (ja) 2025-07-11
US20230384174A1 (en) 2023-11-30

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