JP7631653B2 - 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡 - Google Patents

軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡 Download PDF

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Publication number
JP7631653B2
JP7631653B2 JP2021084285A JP2021084285A JP7631653B2 JP 7631653 B2 JP7631653 B2 JP 7631653B2 JP 2021084285 A JP2021084285 A JP 2021084285A JP 2021084285 A JP2021084285 A JP 2021084285A JP 7631653 B2 JP7631653 B2 JP 7631653B2
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Japan
Prior art keywords
elastic elements
alignment axis
jacket
outer jacket
axial alignment
Prior art date
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JP2021084285A
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English (en)
Japanese (ja)
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JP2021184384A (ja
JP2021184384A5 (enExample
Inventor
プレウン，ドナ
マリア シュミット キャスペル
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FEI Co
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FEI Co
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Publication of JP2021184384A5 publication Critical patent/JP2021184384A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/76—Sealings of ball or roller bearings
    • F16C33/768—Sealings of ball or roller bearings between relatively stationary parts, i.e. static seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/76—Sealings of ball or roller bearings
    • F16C33/761—Sealings of ball or roller bearings specifically for bearings with purely axial load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1413—Means for interchanging parts of the lens, e. g. pole pieces within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/03—Mounting, supporting, spacing or insulating electrodes
    • H01J2237/032—Mounting or supporting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/1405—Constructional details
    • H01J2237/1415—Bores or yokes, i.e. magnetic circuit in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2021084285A 2020-05-20 2021-05-19 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡 Active JP7631653B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20175865.3A EP3913654A1 (en) 2020-05-20 2020-05-20 Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
EP20175865.3 2020-05-20

Publications (3)

Publication Number Publication Date
JP2021184384A JP2021184384A (ja) 2021-12-02
JP2021184384A5 JP2021184384A5 (enExample) 2024-12-17
JP7631653B2 true JP7631653B2 (ja) 2025-02-19

Family

ID=70802723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021084285A Active JP7631653B2 (ja) 2020-05-20 2021-05-19 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡

Country Status (4)

Country Link
US (1) US11773905B2 (enExample)
EP (1) EP3913654A1 (enExample)
JP (1) JP7631653B2 (enExample)
CN (1) CN113707521B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102682399B1 (ko) * 2022-03-03 2024-07-05 한국기초과학지원연구원 투과전자현미경 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090039280A1 (en) 2007-07-27 2009-02-12 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Magnetic lens assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209566A (en) * 1966-12-30 1970-10-21 Gen Motors Corp Energy absorbers
US4056305A (en) * 1976-04-26 1977-11-01 International Telephone And Telegraph Corporation Single optical fiber connector utilizing elastomeric alignment device
EP0050213B1 (de) * 1980-10-18 1984-08-08 SKF GmbH Selbstausrichtende Lagerung
US4434962A (en) * 1981-02-27 1984-03-06 Ciba-Geigy Corporation Flange having an outer and an inner circumferential sealing face and apparatus, comprising such flange, for producing enveloping casts about elongated bodies
JPS5826439A (ja) * 1981-08-11 1983-02-16 Internatl Precision Inc 電子線装置の対物レンズ
SE439081B (sv) * 1984-01-20 1985-05-28 Wladimir Wladimiroff Anordning for elastisk fixering av breckliga ror
JP2000315471A (ja) * 1999-04-28 2000-11-14 Jeol Ltd 試料ホルダ支持装置
NL1025737C2 (nl) 2004-03-16 2005-09-19 Bosch Gmbh Robert Regelmethode voor een continu variabele transmissie.
KR100661986B1 (ko) * 2005-05-09 2006-12-27 리 빙-환 진공 또는 저압 환경에서의 기체 조작 및 이의 관찰을 위한장치
CN101794061A (zh) * 2010-03-05 2010-08-04 圆展科技股份有限公司 镜头连接装置
DE102012025399A1 (de) * 2012-12-24 2014-06-26 Sauter Feinmechanik Gmbh Ausrichtvorrichtung, Ausrichtelement für eine solche Ausrichtvorrichtung und Ausrichtverfahren
US10410827B2 (en) * 2017-05-03 2019-09-10 Fei Company Gun lens design in a charged particle microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090039280A1 (en) 2007-07-27 2009-02-12 Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh Magnetic lens assembly

Also Published As

Publication number Publication date
CN113707521A (zh) 2021-11-26
JP2021184384A (ja) 2021-12-02
CN113707521B (zh) 2025-09-02
US20210366684A1 (en) 2021-11-25
EP3913654A1 (en) 2021-11-24
US11773905B2 (en) 2023-10-03

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