JP2021184384A5 - - Google Patents

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Publication number
JP2021184384A5
JP2021184384A5 JP2021084285A JP2021084285A JP2021184384A5 JP 2021184384 A5 JP2021184384 A5 JP 2021184384A5 JP 2021084285 A JP2021084285 A JP 2021084285A JP 2021084285 A JP2021084285 A JP 2021084285A JP 2021184384 A5 JP2021184384 A5 JP 2021184384A5
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JP
Japan
Prior art keywords
cage
direction parallel
elastic element
holder comprises
alignment axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021084285A
Other languages
English (en)
Japanese (ja)
Other versions
JP7631653B2 (ja
JP2021184384A (ja
Filing date
Publication date
Priority claimed from EP20175865.3A external-priority patent/EP3913654A1/en
Application filed filed Critical
Publication of JP2021184384A publication Critical patent/JP2021184384A/ja
Publication of JP2021184384A5 publication Critical patent/JP2021184384A5/ja
Application granted granted Critical
Publication of JP7631653B2 publication Critical patent/JP7631653B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021084285A 2020-05-20 2021-05-19 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡 Active JP7631653B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20175865.3A EP3913654A1 (en) 2020-05-20 2020-05-20 Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
EP20175865.3 2020-05-20

Publications (3)

Publication Number Publication Date
JP2021184384A JP2021184384A (ja) 2021-12-02
JP2021184384A5 true JP2021184384A5 (enExample) 2024-12-17
JP7631653B2 JP7631653B2 (ja) 2025-02-19

Family

ID=70802723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021084285A Active JP7631653B2 (ja) 2020-05-20 2021-05-19 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡

Country Status (4)

Country Link
US (1) US11773905B2 (enExample)
EP (1) EP3913654A1 (enExample)
JP (1) JP7631653B2 (enExample)
CN (1) CN113707521B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102682399B1 (ko) * 2022-03-03 2024-07-05 한국기초과학지원연구원 투과전자현미경 시스템

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209566A (en) * 1966-12-30 1970-10-21 Gen Motors Corp Energy absorbers
US4056305A (en) * 1976-04-26 1977-11-01 International Telephone And Telegraph Corporation Single optical fiber connector utilizing elastomeric alignment device
EP0050213B1 (de) * 1980-10-18 1984-08-08 SKF GmbH Selbstausrichtende Lagerung
US4434962A (en) * 1981-02-27 1984-03-06 Ciba-Geigy Corporation Flange having an outer and an inner circumferential sealing face and apparatus, comprising such flange, for producing enveloping casts about elongated bodies
JPS5826439A (ja) * 1981-08-11 1983-02-16 Internatl Precision Inc 電子線装置の対物レンズ
SE439081B (sv) * 1984-01-20 1985-05-28 Wladimir Wladimiroff Anordning for elastisk fixering av breckliga ror
JP2000315471A (ja) * 1999-04-28 2000-11-14 Jeol Ltd 試料ホルダ支持装置
NL1025737C2 (nl) 2004-03-16 2005-09-19 Bosch Gmbh Robert Regelmethode voor een continu variabele transmissie.
KR100661986B1 (ko) * 2005-05-09 2006-12-27 리 빙-환 진공 또는 저압 환경에서의 기체 조작 및 이의 관찰을 위한장치
EP2019414B1 (en) * 2007-07-27 2010-06-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Magnetic lens assembly
CN101794061A (zh) * 2010-03-05 2010-08-04 圆展科技股份有限公司 镜头连接装置
DE102012025399A1 (de) * 2012-12-24 2014-06-26 Sauter Feinmechanik Gmbh Ausrichtvorrichtung, Ausrichtelement für eine solche Ausrichtvorrichtung und Ausrichtverfahren
US10410827B2 (en) * 2017-05-03 2019-09-10 Fei Company Gun lens design in a charged particle microscope

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