JP2021184384A5 - - Google Patents
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- Publication number
- JP2021184384A5 JP2021184384A5 JP2021084285A JP2021084285A JP2021184384A5 JP 2021184384 A5 JP2021184384 A5 JP 2021184384A5 JP 2021084285 A JP2021084285 A JP 2021084285A JP 2021084285 A JP2021084285 A JP 2021084285A JP 2021184384 A5 JP2021184384 A5 JP 2021184384A5
- Authority
- JP
- Japan
- Prior art keywords
- cage
- direction parallel
- elastic element
- holder comprises
- alignment axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP20175865.3A EP3913654A1 (en) | 2020-05-20 | 2020-05-20 | Axial alignment assembly, and charged particle microscope comprising such an alignment assembly |
| EP20175865.3 | 2020-05-20 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021184384A JP2021184384A (ja) | 2021-12-02 |
| JP2021184384A5 true JP2021184384A5 (enExample) | 2024-12-17 |
| JP7631653B2 JP7631653B2 (ja) | 2025-02-19 |
Family
ID=70802723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021084285A Active JP7631653B2 (ja) | 2020-05-20 | 2021-05-19 | 軸方向位置合わせ組立体、およびそのような位置合わせ組立体を備えた荷電粒子顕微鏡 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11773905B2 (enExample) |
| EP (1) | EP3913654A1 (enExample) |
| JP (1) | JP7631653B2 (enExample) |
| CN (1) | CN113707521B (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102682399B1 (ko) * | 2022-03-03 | 2024-07-05 | 한국기초과학지원연구원 | 투과전자현미경 시스템 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1209566A (en) * | 1966-12-30 | 1970-10-21 | Gen Motors Corp | Energy absorbers |
| US4056305A (en) * | 1976-04-26 | 1977-11-01 | International Telephone And Telegraph Corporation | Single optical fiber connector utilizing elastomeric alignment device |
| EP0050213B1 (de) * | 1980-10-18 | 1984-08-08 | SKF GmbH | Selbstausrichtende Lagerung |
| US4434962A (en) * | 1981-02-27 | 1984-03-06 | Ciba-Geigy Corporation | Flange having an outer and an inner circumferential sealing face and apparatus, comprising such flange, for producing enveloping casts about elongated bodies |
| JPS5826439A (ja) * | 1981-08-11 | 1983-02-16 | Internatl Precision Inc | 電子線装置の対物レンズ |
| SE439081B (sv) * | 1984-01-20 | 1985-05-28 | Wladimir Wladimiroff | Anordning for elastisk fixering av breckliga ror |
| JP2000315471A (ja) * | 1999-04-28 | 2000-11-14 | Jeol Ltd | 試料ホルダ支持装置 |
| NL1025737C2 (nl) | 2004-03-16 | 2005-09-19 | Bosch Gmbh Robert | Regelmethode voor een continu variabele transmissie. |
| KR100661986B1 (ko) * | 2005-05-09 | 2006-12-27 | 리 빙-환 | 진공 또는 저압 환경에서의 기체 조작 및 이의 관찰을 위한장치 |
| EP2019414B1 (en) * | 2007-07-27 | 2010-06-30 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Magnetic lens assembly |
| CN101794061A (zh) * | 2010-03-05 | 2010-08-04 | 圆展科技股份有限公司 | 镜头连接装置 |
| DE102012025399A1 (de) * | 2012-12-24 | 2014-06-26 | Sauter Feinmechanik Gmbh | Ausrichtvorrichtung, Ausrichtelement für eine solche Ausrichtvorrichtung und Ausrichtverfahren |
| US10410827B2 (en) * | 2017-05-03 | 2019-09-10 | Fei Company | Gun lens design in a charged particle microscope |
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2020
- 2020-05-20 EP EP20175865.3A patent/EP3913654A1/en active Pending
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2021
- 2021-05-18 CN CN202110540499.5A patent/CN113707521B/zh active Active
- 2021-05-19 JP JP2021084285A patent/JP7631653B2/ja active Active
- 2021-05-20 US US17/325,946 patent/US11773905B2/en active Active