CN113707521B - 轴向对准组件和包含此类对准组件的带电粒子显微镜 - Google Patents

轴向对准组件和包含此类对准组件的带电粒子显微镜

Info

Publication number
CN113707521B
CN113707521B CN202110540499.5A CN202110540499A CN113707521B CN 113707521 B CN113707521 B CN 113707521B CN 202110540499 A CN202110540499 A CN 202110540499A CN 113707521 B CN113707521 B CN 113707521B
Authority
CN
China
Prior art keywords
axial alignment
alignment assembly
sheath
alignment axis
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110540499.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN113707521A (zh
Inventor
P·多纳
C·M·斯密特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of CN113707521A publication Critical patent/CN113707521A/zh
Application granted granted Critical
Publication of CN113707521B publication Critical patent/CN113707521B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/76—Sealings of ball or roller bearings
    • F16C33/768—Sealings of ball or roller bearings between relatively stationary parts, i.e. static seals
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/76—Sealings of ball or roller bearings
    • F16C33/761—Sealings of ball or roller bearings specifically for bearings with purely axial load
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H01J37/1413—Means for interchanging parts of the lens, e. g. pole pieces within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/03—Mounting, supporting, spacing or insulating electrodes
    • H01J2237/032—Mounting or supporting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/1405—Constructional details
    • H01J2237/1415—Bores or yokes, i.e. magnetic circuit in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN202110540499.5A 2020-05-20 2021-05-18 轴向对准组件和包含此类对准组件的带电粒子显微镜 Active CN113707521B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20175865.3A EP3913654A1 (en) 2020-05-20 2020-05-20 Axial alignment assembly, and charged particle microscope comprising such an alignment assembly
EP20175865.3 2020-05-20

Publications (2)

Publication Number Publication Date
CN113707521A CN113707521A (zh) 2021-11-26
CN113707521B true CN113707521B (zh) 2025-09-02

Family

ID=70802723

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110540499.5A Active CN113707521B (zh) 2020-05-20 2021-05-18 轴向对准组件和包含此类对准组件的带电粒子显微镜

Country Status (4)

Country Link
US (1) US11773905B2 (enExample)
EP (1) EP3913654A1 (enExample)
JP (1) JP7631653B2 (enExample)
CN (1) CN113707521B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102682399B1 (ko) * 2022-03-03 2024-07-05 한국기초과학지원연구원 투과전자현미경 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4730138A (en) * 1984-01-20 1988-03-08 Wladimir Wladimiroff Coaxial mounting method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209566A (en) * 1966-12-30 1970-10-21 Gen Motors Corp Energy absorbers
US4056305A (en) * 1976-04-26 1977-11-01 International Telephone And Telegraph Corporation Single optical fiber connector utilizing elastomeric alignment device
EP0050213B1 (de) * 1980-10-18 1984-08-08 SKF GmbH Selbstausrichtende Lagerung
US4434962A (en) * 1981-02-27 1984-03-06 Ciba-Geigy Corporation Flange having an outer and an inner circumferential sealing face and apparatus, comprising such flange, for producing enveloping casts about elongated bodies
JPS5826439A (ja) * 1981-08-11 1983-02-16 Internatl Precision Inc 電子線装置の対物レンズ
JP2000315471A (ja) * 1999-04-28 2000-11-14 Jeol Ltd 試料ホルダ支持装置
NL1025737C2 (nl) 2004-03-16 2005-09-19 Bosch Gmbh Robert Regelmethode voor een continu variabele transmissie.
KR100661986B1 (ko) * 2005-05-09 2006-12-27 리 빙-환 진공 또는 저압 환경에서의 기체 조작 및 이의 관찰을 위한장치
EP2019414B1 (en) * 2007-07-27 2010-06-30 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Magnetic lens assembly
CN101794061A (zh) * 2010-03-05 2010-08-04 圆展科技股份有限公司 镜头连接装置
DE102012025399A1 (de) * 2012-12-24 2014-06-26 Sauter Feinmechanik Gmbh Ausrichtvorrichtung, Ausrichtelement für eine solche Ausrichtvorrichtung und Ausrichtverfahren
US10410827B2 (en) * 2017-05-03 2019-09-10 Fei Company Gun lens design in a charged particle microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4730138A (en) * 1984-01-20 1988-03-08 Wladimir Wladimiroff Coaxial mounting method

Also Published As

Publication number Publication date
CN113707521A (zh) 2021-11-26
JP7631653B2 (ja) 2025-02-19
JP2021184384A (ja) 2021-12-02
US20210366684A1 (en) 2021-11-25
EP3913654A1 (en) 2021-11-24
US11773905B2 (en) 2023-10-03

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