JP7620482B2 - 液体吐出ヘッド用基板及び記録装置 - Google Patents

液体吐出ヘッド用基板及び記録装置 Download PDF

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Publication number
JP7620482B2
JP7620482B2 JP2021064795A JP2021064795A JP7620482B2 JP 7620482 B2 JP7620482 B2 JP 7620482B2 JP 2021064795 A JP2021064795 A JP 2021064795A JP 2021064795 A JP2021064795 A JP 2021064795A JP 7620482 B2 JP7620482 B2 JP 7620482B2
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Japan
Prior art keywords
substrate
layer
ejection head
liquid ejection
insulating
Prior art date
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Application number
JP2021064795A
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English (en)
Japanese (ja)
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JP2022160188A (ja
JP2022160188A5 (enExample
Inventor
進哉 岩橋
建 安田
譲 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021064795A priority Critical patent/JP7620482B2/ja
Priority to US17/708,730 priority patent/US11981133B2/en
Publication of JP2022160188A publication Critical patent/JP2022160188A/ja
Publication of JP2022160188A5 publication Critical patent/JP2022160188A5/ja
Application granted granted Critical
Publication of JP7620482B2 publication Critical patent/JP7620482B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

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  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2021064795A 2021-04-06 2021-04-06 液体吐出ヘッド用基板及び記録装置 Active JP7620482B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021064795A JP7620482B2 (ja) 2021-04-06 2021-04-06 液体吐出ヘッド用基板及び記録装置
US17/708,730 US11981133B2 (en) 2021-04-06 2022-03-30 Liquid discharge head substrate and printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021064795A JP7620482B2 (ja) 2021-04-06 2021-04-06 液体吐出ヘッド用基板及び記録装置

Publications (3)

Publication Number Publication Date
JP2022160188A JP2022160188A (ja) 2022-10-19
JP2022160188A5 JP2022160188A5 (enExample) 2024-02-27
JP7620482B2 true JP7620482B2 (ja) 2025-01-23

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021064795A Active JP7620482B2 (ja) 2021-04-06 2021-04-06 液体吐出ヘッド用基板及び記録装置

Country Status (2)

Country Link
US (1) US11981133B2 (enExample)
JP (1) JP7620482B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7760311B2 (ja) 2021-09-29 2025-10-27 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び液体吐出ヘッド用基板の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017113905A (ja) 2015-12-21 2017-06-29 キヤノン株式会社 記録素子基板、記録ヘッド、及び記録装置
JP2019010830A (ja) 2017-06-30 2019-01-24 キヤノン株式会社 半導体装置、その製造方法、液体吐出ヘッド及び液体吐出装置
JP2019142052A (ja) 2018-02-19 2019-08-29 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP2019194005A (ja) 2018-04-27 2019-11-07 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド用基板の製造方法、および液体吐出ヘッド

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH091803A (ja) 1995-06-20 1997-01-07 Canon Inc インクジェットヘッド、該インクジェットヘッドを用いたヘッドカートリッジ、インクジェット記録装置およびヘッドキット
US9096059B2 (en) 2012-12-27 2015-08-04 Canon Kabushiki Kaisha Substrate for inkjet head, inkjet head, and inkjet printing apparatus
JP6150519B2 (ja) 2012-12-27 2017-06-21 キヤノン株式会社 インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法、インクジェット記録装置、およびインクジェット記録ヘッド用基板における個別部分と他の個別部分との電気的分離方法
JP6566709B2 (ja) 2015-05-07 2019-08-28 キヤノン株式会社 インクジェット記録ヘッド用基板

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017113905A (ja) 2015-12-21 2017-06-29 キヤノン株式会社 記録素子基板、記録ヘッド、及び記録装置
JP2019010830A (ja) 2017-06-30 2019-01-24 キヤノン株式会社 半導体装置、その製造方法、液体吐出ヘッド及び液体吐出装置
JP2019142052A (ja) 2018-02-19 2019-08-29 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP2019194005A (ja) 2018-04-27 2019-11-07 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド用基板の製造方法、および液体吐出ヘッド

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Publication number Publication date
US11981133B2 (en) 2024-05-14
JP2022160188A (ja) 2022-10-19
US20220314619A1 (en) 2022-10-06

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