JP7611295B2 - レシピエント及び高真空ポンプ - Google Patents
レシピエント及び高真空ポンプ Download PDFInfo
- Publication number
- JP7611295B2 JP7611295B2 JP2023081485A JP2023081485A JP7611295B2 JP 7611295 B2 JP7611295 B2 JP 7611295B2 JP 2023081485 A JP2023081485 A JP 2023081485A JP 2023081485 A JP2023081485 A JP 2023081485A JP 7611295 B2 JP7611295 B2 JP 7611295B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- recipient
- connection
- vacuum
- auxiliary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000004308 accommodation Effects 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 9
- 230000000295 complement effect Effects 0.000 claims description 8
- 239000007789 gas Substances 0.000 description 20
- 238000005086 pumping Methods 0.000 description 12
- 239000002826 coolant Substances 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 8
- 238000010276 construction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000010926 purge Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
- F04D29/602—Mounting in cavities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/50—Inlet or outlet
- F05D2250/52—Outlet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP22198845 | 2022-09-29 | ||
| EP22198845.4A EP4108932B1 (de) | 2022-09-29 | 2022-09-29 | Rezipient und system mit rezipient und hochvakuumpumpe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024050401A JP2024050401A (ja) | 2024-04-10 |
| JP7611295B2 true JP7611295B2 (ja) | 2025-01-09 |
Family
ID=83508788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023081485A Active JP7611295B2 (ja) | 2022-09-29 | 2023-05-17 | レシピエント及び高真空ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP4108932B1 (de) |
| JP (1) | JP7611295B2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4293232A1 (de) * | 2023-10-17 | 2023-12-20 | Pfeiffer Vacuum Technology AG | Pumpe |
| EP4726212A2 (de) | 2025-12-11 | 2026-04-15 | Pfeiffer Vacuum Technology AG | Vakuumpumpe |
| EP4707609A2 (de) | 2025-12-30 | 2026-03-11 | Pfeiffer Vacuum Technology AG | Rotor für eine turbomolekularpumpe und turbomolekularpumpe |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006020710A1 (de) | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gehäuse |
| JP2010529359A (ja) | 2007-06-11 | 2010-08-26 | オーリコン レイボルド バキューム ゲーエムベーハー | ターボ分子ポンプ |
| WO2020208375A1 (en) | 2019-04-11 | 2020-10-15 | Edwards Limited | Vacuum chamber module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| DE102007027352A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Massenspektrometer-Anordnung |
| DE102010032346A1 (de) * | 2010-07-27 | 2012-02-02 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe sowie Turbomolekularpumpen-System |
| DE202012000611U1 (de) * | 2012-01-21 | 2013-04-23 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
-
2022
- 2022-09-29 EP EP22198845.4A patent/EP4108932B1/de active Active
-
2023
- 2023-05-17 JP JP2023081485A patent/JP7611295B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006020710A1 (de) | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gehäuse |
| JP2010529359A (ja) | 2007-06-11 | 2010-08-26 | オーリコン レイボルド バキューム ゲーエムベーハー | ターボ分子ポンプ |
| WO2020208375A1 (en) | 2019-04-11 | 2020-10-15 | Edwards Limited | Vacuum chamber module |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4108932B1 (de) | 2024-11-06 |
| JP2024050401A (ja) | 2024-04-10 |
| EP4108932A1 (de) | 2022-12-28 |
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