JP7588580B2 - 酸素センサ及びそれを具備する微小機械電気素子 - Google Patents
酸素センサ及びそれを具備する微小機械電気素子 Download PDFInfo
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- JP7588580B2 JP7588580B2 JP2021508925A JP2021508925A JP7588580B2 JP 7588580 B2 JP7588580 B2 JP 7588580B2 JP 2021508925 A JP2021508925 A JP 2021508925A JP 2021508925 A JP2021508925 A JP 2021508925A JP 7588580 B2 JP7588580 B2 JP 7588580B2
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- electrode
- oxygen
- solid electrolyte
- electrolyte membrane
- membrane
- Prior art date
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- 229910052760 oxygen Inorganic materials 0.000 title claims description 274
- 239000001301 oxygen Substances 0.000 title claims description 274
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 272
- 239000012528 membrane Substances 0.000 claims description 185
- 239000007784 solid electrolyte Substances 0.000 claims description 129
- 238000005259 measurement Methods 0.000 claims description 33
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 16
- 229910052749 magnesium Inorganic materials 0.000 claims description 8
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 6
- 229910052788 barium Inorganic materials 0.000 claims description 6
- 229910052791 calcium Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052746 lanthanum Inorganic materials 0.000 claims description 6
- 229910052748 manganese Inorganic materials 0.000 claims description 6
- 229910052712 strontium Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910052684 Cerium Inorganic materials 0.000 claims description 4
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 4
- 229910052691 Erbium Inorganic materials 0.000 claims description 4
- 229910052693 Europium Inorganic materials 0.000 claims description 4
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 4
- 229910052689 Holmium Inorganic materials 0.000 claims description 4
- 229910052765 Lutetium Inorganic materials 0.000 claims description 4
- 229910052779 Neodymium Inorganic materials 0.000 claims description 4
- 229910052772 Samarium Inorganic materials 0.000 claims description 4
- 229910052771 Terbium Inorganic materials 0.000 claims description 4
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 4
- 229910052790 beryllium Inorganic materials 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052706 scandium Inorganic materials 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000010416 ion conductor Substances 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052763 palladium Inorganic materials 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910000473 manganese(VI) oxide Inorganic materials 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 67
- 229910001882 dioxygen Inorganic materials 0.000 description 67
- 239000000463 material Substances 0.000 description 30
- 239000007789 gas Substances 0.000 description 22
- 238000012360 testing method Methods 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 10
- 230000009471 action Effects 0.000 description 8
- 238000005086 pumping Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 150000002926 oxygen Chemical class 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/409—Oxygen concentration cells
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024063710A JP2024074981A (ja) | 2019-03-22 | 2024-04-11 | 酸素センサ及びそれを具備する微小機械電気素子 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019054098 | 2019-03-22 | ||
| JP2019054098 | 2019-03-22 | ||
| PCT/JP2020/009431 WO2020195681A1 (ja) | 2019-03-22 | 2020-03-05 | 酸素センサ及びそれを具備する微小機械電気素子 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024063710A Division JP2024074981A (ja) | 2019-03-22 | 2024-04-11 | 酸素センサ及びそれを具備する微小機械電気素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2020195681A1 JPWO2020195681A1 (enrdf_load_stackoverflow) | 2020-10-01 |
| JP7588580B2 true JP7588580B2 (ja) | 2024-11-22 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021508925A Active JP7588580B2 (ja) | 2019-03-22 | 2020-03-05 | 酸素センサ及びそれを具備する微小機械電気素子 |
| JP2024063710A Pending JP2024074981A (ja) | 2019-03-22 | 2024-04-11 | 酸素センサ及びそれを具備する微小機械電気素子 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024063710A Pending JP2024074981A (ja) | 2019-03-22 | 2024-04-11 | 酸素センサ及びそれを具備する微小機械電気素子 |
Country Status (2)
| Country | Link |
|---|---|
| JP (2) | JP7588580B2 (enrdf_load_stackoverflow) |
| WO (1) | WO2020195681A1 (enrdf_load_stackoverflow) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090007637A1 (en) | 2007-07-06 | 2009-01-08 | National Taiwan University Of Science & Technology | Gas sensor |
| US20140318960A1 (en) | 2013-04-25 | 2014-10-30 | Wisenstech Inc. | Micromachined oxygen sensor and method of making the same |
| WO2016111110A1 (ja) | 2015-01-07 | 2016-07-14 | 三井金属鉱業株式会社 | 配向性アパタイト型酸化物イオン伝導体及びその製造方法 |
| WO2017099963A1 (en) | 2015-12-09 | 2017-06-15 | Honeywell International Inc. | Electrochemical sensor and electronics on a ceramic substrate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145342A (en) * | 1980-04-14 | 1981-11-12 | Toray Ind Inc | Solid-electrolyte oximeter |
| JPS5797439A (en) * | 1980-12-09 | 1982-06-17 | Toray Ind Inc | Oxygen sensor |
| JPS6024445A (ja) * | 1983-07-20 | 1985-02-07 | Toyota Motor Corp | 空燃比検出器 |
| JPS62129753A (ja) * | 1985-11-29 | 1987-06-12 | Yokogawa Electric Corp | 固体電解質を用いた分析装置 |
-
2020
- 2020-03-05 WO PCT/JP2020/009431 patent/WO2020195681A1/ja active Application Filing
- 2020-03-05 JP JP2021508925A patent/JP7588580B2/ja active Active
-
2024
- 2024-04-11 JP JP2024063710A patent/JP2024074981A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090007637A1 (en) | 2007-07-06 | 2009-01-08 | National Taiwan University Of Science & Technology | Gas sensor |
| US20140318960A1 (en) | 2013-04-25 | 2014-10-30 | Wisenstech Inc. | Micromachined oxygen sensor and method of making the same |
| WO2016111110A1 (ja) | 2015-01-07 | 2016-07-14 | 三井金属鉱業株式会社 | 配向性アパタイト型酸化物イオン伝導体及びその製造方法 |
| WO2017099963A1 (en) | 2015-12-09 | 2017-06-15 | Honeywell International Inc. | Electrochemical sensor and electronics on a ceramic substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020195681A1 (enrdf_load_stackoverflow) | 2020-10-01 |
| WO2020195681A1 (ja) | 2020-10-01 |
| JP2024074981A (ja) | 2024-05-31 |
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