JP7559997B2 - 変形検知センサ - Google Patents

変形検知センサ Download PDF

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Publication number
JP7559997B2
JP7559997B2 JP2024507694A JP2024507694A JP7559997B2 JP 7559997 B2 JP7559997 B2 JP 7559997B2 JP 2024507694 A JP2024507694 A JP 2024507694A JP 2024507694 A JP2024507694 A JP 2024507694A JP 7559997 B2 JP7559997 B2 JP 7559997B2
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JP
Japan
Prior art keywords
piezoelectric film
sensor
detection sensor
deformation detection
flexible substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
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JP2024507694A
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English (en)
Japanese (ja)
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JPWO2023176426A5 (https=
JPWO2023176426A1 (https=
Inventor
譲仁 奥冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2023176426A1 publication Critical patent/JPWO2023176426A1/ja
Priority to JP2024157967A priority Critical patent/JP7835255B2/ja
Publication of JPWO2023176426A5 publication Critical patent/JPWO2023176426A5/ja
Application granted granted Critical
Publication of JP7559997B2 publication Critical patent/JP7559997B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2024507694A 2022-03-14 2023-02-28 変形検知センサ Active JP7559997B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024157967A JP7835255B2 (ja) 2022-03-14 2024-09-12 変形検知センサ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022038838 2022-03-14
JP2022038838 2022-03-14
PCT/JP2023/007287 WO2023176426A1 (ja) 2022-03-14 2023-02-28 変形検知センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024157967A Division JP7835255B2 (ja) 2022-03-14 2024-09-12 変形検知センサ

Publications (3)

Publication Number Publication Date
JPWO2023176426A1 JPWO2023176426A1 (https=) 2023-09-21
JPWO2023176426A5 JPWO2023176426A5 (https=) 2024-09-20
JP7559997B2 true JP7559997B2 (ja) 2024-10-02

Family

ID=88023539

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2024507694A Active JP7559997B2 (ja) 2022-03-14 2023-02-28 変形検知センサ
JP2024157967A Active JP7835255B2 (ja) 2022-03-14 2024-09-12 変形検知センサ

Family Applications After (1)

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JP2024157967A Active JP7835255B2 (ja) 2022-03-14 2024-09-12 変形検知センサ

Country Status (4)

Country Link
US (1) US20240426591A1 (https=)
JP (2) JP7559997B2 (https=)
CN (1) CN118871757A (https=)
WO (1) WO2023176426A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012137897A1 (ja) 2011-04-08 2012-10-11 株式会社村田製作所 変位センサ、変位検出装置、および操作デバイス
JP2015118015A (ja) 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2016136565A1 (ja) 2015-02-27 2016-09-01 株式会社村田製作所 Ｒｆモジュール及びｒｆシステム
US20180238716A1 (en) 2017-02-09 2018-08-23 The University Of British Columbia Capacitive bending sensors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150185A (ja) * 1986-12-12 1988-06-22 ダイキン工業株式会社 ロボツトにおける角度制御装置
JP7156324B2 (ja) * 2019-05-14 2022-10-19 株式会社村田製作所 変形検知センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012137897A1 (ja) 2011-04-08 2012-10-11 株式会社村田製作所 変位センサ、変位検出装置、および操作デバイス
JP2015118015A (ja) 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2016136565A1 (ja) 2015-02-27 2016-09-01 株式会社村田製作所 Ｒｆモジュール及びｒｆシステム
US20180238716A1 (en) 2017-02-09 2018-08-23 The University Of British Columbia Capacitive bending sensors

Also Published As

Publication number Publication date
US20240426591A1 (en) 2024-12-26
JP7835255B2 (ja) 2026-03-25
CN118871757A (zh) 2024-10-29
JP2024163287A (ja) 2024-11-21
WO2023176426A1 (ja) 2023-09-21
JPWO2023176426A1 (https=) 2023-09-21

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