WO2023176426A1 - 変形検知センサ - Google Patents

変形検知センサ Download PDF

Info

Publication number
WO2023176426A1
WO2023176426A1 PCT/JP2023/007287 JP2023007287W WO2023176426A1 WO 2023176426 A1 WO2023176426 A1 WO 2023176426A1 JP 2023007287 W JP2023007287 W JP 2023007287W WO 2023176426 A1 WO2023176426 A1 WO 2023176426A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric film
sensor
base material
main surface
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/007287
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
譲仁 奥冨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2024507694A priority Critical patent/JP7559997B2/ja
Priority to CN202380027022.4A priority patent/CN118871757A/zh
Publication of WO2023176426A1 publication Critical patent/WO2023176426A1/ja
Priority to US18/823,755 priority patent/US20240426591A1/en
Priority to JP2024157967A priority patent/JP7835255B2/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Definitions

  • the present invention relates to a deformation detection sensor that detects deformation of a flexible base material.
  • a bending deformation sensor described in Patent Document 1 As an invention related to a conventional deformation detection sensor, for example, a bending deformation sensor described in Patent Document 1 is known.
  • This bending deformation sensor includes a first piezoelectric film, a second piezoelectric film, and an elastic body.
  • the elastic body has a first main surface and a second main surface.
  • the first piezoelectric film is provided on the first main surface.
  • the second piezoelectric film is provided on the second main surface.
  • an object of the present invention is to provide a deformation detection sensor that can improve the sensitivity of detecting deformation of a flexible base material.
  • a deformation detection sensor includes: A bendable flexible base material having an upper main surface and a lower main surface of the base material arranged in the vertical direction; a first sensor provided on the main surface of the base material and including a first piezoelectric film; a second sensor provided on the lower main surface of the base material and including a second piezoelectric film; It is equipped with The thickness of the second piezoelectric film in the vertical direction is larger than the thickness of the first piezoelectric film in the vertical direction, When the flexible base material is bent to protrude upward or downward, the first sensor and the second sensor are bent. Deformation detection sensor.
  • the sensitivity of detecting deformation of a flexible base material can be improved.
  • FIG. 1 is a front view of the deformation detection sensor 10.
  • FIG. 2 is an exploded view of the deformation detection sensor 10.
  • FIG. 3 is a front view of the deformation detection sensor 10 when the flexible base material 12 is bent.
  • FIG. 4 is a graph showing the waveforms of the first signal Sig1 and the second signal Sig2.
  • FIG. 5 is a graph showing the waveform of the difference ⁇ .
  • FIG. 6 is a front view of a deformation detection sensor 1010 according to a comparative example.
  • FIG. 7 is a front view of the deformation detection sensor 10a.
  • FIG. 8 is a front view of the deformation detection sensor 10a when the flexible base material 12 is bent.
  • FIG. 9 is a front view of the deformation detection sensor 10b.
  • FIG. 1 is a front view of the deformation detection sensor 10.
  • FIG. 2 is an exploded view of the deformation detection sensor 10.
  • FIG. 3 is a front view of the deformation detection sensor 10 when the flexible base material 12 is bent.
  • direction is defined as follows.
  • the direction in which the upper main surface S1 of the flexible base material 12 and the lower main surface S2 of the flexible base material 12 in an unbent state as shown in FIG. 1 are lined up is defined as the up-down direction.
  • the direction in which the bending line L (see FIGS. 2 and 3) extends when the flexible base material 12 is bent is defined as the front-back direction.
  • a direction perpendicular to the up-down direction and the front-back direction is defined as the left-right direction. Note that the definition of direction in this specification is an example. Therefore, the direction in which the deformation detection sensor 10 is actually used does not need to match the direction in this specification.
  • the vertical direction in FIG. 1 may be reversed.
  • the left-right direction in FIG. 1 may be reversed.
  • the front and rear directions in FIG. 1 may be reversed.
  • the deformation detection sensor 10 detects bending of the flexible base material 12.
  • the deformation detection sensor 10 includes a flexible base material 12, a first sensor 11, a second sensor 21, and an arithmetic circuit 50, as shown in FIGS. 1 and 2.
  • the flexible base material 12 is a flexible sheet.
  • the flexible base material 12 has a base material upper main surface S1 and a base material lower main surface S2 that are arranged in the vertical direction.
  • the flexible base material 12 has a rectangular shape having short sides extending in the front-rear direction and long sides extending in the left-right direction, as shown in FIG. 2 when viewed in the up-down direction.
  • the flexible base material 12 can be bent along the bending line L, as shown in FIG.
  • the bending line L connects the midpoints of the two long sides of the flexible base material 12.
  • the flexible base material 12 is bent so as to protrude downward when viewed in the front-rear direction.
  • the first sensor 11 is provided on the main surface S1 of the base material.
  • the first sensor 11 outputs a first signal Sig1 that detects deformation of the flexible base material 12.
  • the first sensor 11 includes a first piezoelectric film 14 , a first upper electrode 16 , and a first lower electrode 18 .
  • the first piezoelectric film 14 is a flexible sheet.
  • the first piezoelectric film 14 has a first upper main surface S11 and a first lower main surface S12. As shown in FIG. 2, the first piezoelectric film 14 has a rectangular shape having short sides extending in the front-rear direction and long sides extending in the left-right direction when viewed in the up-down direction.
  • the first piezoelectric film 14 generates an electric charge by expanding and contracting together with the flexible base material 12.
  • the first piezoelectric film 14 is, for example, a film formed from a chiral polymer.
  • the chiral polymer is, for example, polylactic acid (PLA), particularly L-type polylactic acid (PLLA).
  • PLLA which is a chiral polymer, has a main chain having a helical structure. When PLLA is uniaxially stretched and its molecules are oriented, it exhibits piezoelectricity.
  • the first piezoelectric film 14 has a piezoelectric constant of d14.
  • the uniaxially stretched PLLA generates a voltage when the first piezoelectric film 14 is stretched or compressed in the left-right direction.
  • the first piezoelectric film 14 generates a positive voltage when stretched in the left-right direction.
  • the first piezoelectric film 14 generates a negative voltage when compressed in the left-right direction.
  • the magnitude of the voltage depends on the differential value of the amount of deformation of the first piezoelectric film 14 due to expansion or compression.
  • the uniaxial stretching direction Da of the first piezoelectric film 14 forms an angle of 45 degrees with respect to each of the front-back direction and the left-right direction.
  • This 45 degrees includes, for example, an angle including approximately 45 degrees ⁇ 10 degrees.
  • the first piezoelectric film 14 may be a film formed from a ion-polarized ferroelectric material such as PVDF that has been subjected to a poling process or PZT.
  • the first upper electrode 16 is a ground electrode. Therefore, the first upper electrode 16 is connected to the ground potential.
  • the first upper electrode 16 is provided on the first upper main surface S11.
  • the first upper electrode 16 covers the entire first upper main surface S11. Therefore, the length of the first piezoelectric film 14 in the left-right direction is equal to the length of the first upper electrode 16 in the left-right direction.
  • the length of the first piezoelectric film 14 in the front-rear direction is equal to the length of the first upper electrode 16 in the front-rear direction.
  • the second sensor 21 overlaps the first sensor 11 when viewed in the vertical direction. Thereby, the deformation detection sensor 10 can be made smaller.
  • FIG. 7 is a front view of the deformation detection sensor 10a.
  • FIG. 8 is a front view of the deformation detection sensor 10a when the flexible base material 12 is bent.
  • the deformation detection sensor 10a is different from the deformation detection sensor 10 in the position of the first sensor 11 and the position of the second sensor 21. More specifically, the second sensor 21 does not overlap the first sensor 11 when viewed in the vertical direction. However, the first piezoelectric film 14 is compressed when the flexible base material 12 is bent. The second piezoelectric film 24 is stretched when the flexible base material 12 is bent.
  • the other structure of the deformation detection sensor 10a is the same as that of the deformation detection sensor 10, so a description thereof will be omitted.
  • the deformation detection sensor 10a can have the same effects as the deformation detection sensor 10.
  • the deformation detection sensor according to the present invention is not limited to the deformation detection sensors 10, 10a, and 10b, and can be modified within the scope of the gist. Furthermore, the structures of the deformation detection sensors 10, 10a, and 10b may be combined arbitrarily.
  • first piezoelectric film 14, the second piezoelectric film 24, the third piezoelectric film 34, and the fourth piezoelectric film 44 may be films other than those formed from chiral polymers.
  • the uniaxial stretching direction Db of the second piezoelectric film 24 may not be parallel to the uniaxial stretching direction Da of the first piezoelectric film 14.
  • the uniaxial stretching direction Db of the second piezoelectric film 24 may be orthogonal to the uniaxial stretching direction Da of the first piezoelectric film 14.
  • the polarity of the potential of the second signal Sig2 is the same as the polarity of the potential of the first signal Sig1. Therefore, the arithmetic circuit 50 adds the potential of the first signal Sig1 and the potential of the second signal Sig2.
  • first lower electrode 18 and the second upper electrode 26 may be connected to the ground potential.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
PCT/JP2023/007287 2022-03-14 2023-02-28 変形検知センサ Ceased WO2023176426A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2024507694A JP7559997B2 (ja) 2022-03-14 2023-02-28 変形検知センサ
CN202380027022.4A CN118871757A (zh) 2022-03-14 2023-02-28 变形探测传感器
US18/823,755 US20240426591A1 (en) 2022-03-14 2024-09-04 Deformation detection sensor
JP2024157967A JP7835255B2 (ja) 2022-03-14 2024-09-12 変形検知センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022038838 2022-03-14
JP2022-038838 2022-03-14

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US18/823,755 Continuation US20240426591A1 (en) 2022-03-14 2024-09-04 Deformation detection sensor

Publications (1)

Publication Number Publication Date
WO2023176426A1 true WO2023176426A1 (ja) 2023-09-21

Family

ID=88023539

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/007287 Ceased WO2023176426A1 (ja) 2022-03-14 2023-02-28 変形検知センサ

Country Status (4)

Country Link
US (1) US20240426591A1 (https=)
JP (2) JP7559997B2 (https=)
CN (1) CN118871757A (https=)
WO (1) WO2023176426A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150185A (ja) * 1986-12-12 1988-06-22 ダイキン工業株式会社 ロボツトにおける角度制御装置
WO2012137897A1 (ja) * 2011-04-08 2012-10-11 株式会社村田製作所 変位センサ、変位検出装置、および操作デバイス
JP2015118015A (ja) * 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2016136565A1 (ja) * 2015-02-27 2016-09-01 株式会社村田製作所 Ｒｆモジュール及びｒｆシステム
US20180238716A1 (en) * 2017-02-09 2018-08-23 The University Of British Columbia Capacitive bending sensors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7156324B2 (ja) * 2019-05-14 2022-10-19 株式会社村田製作所 変形検知センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150185A (ja) * 1986-12-12 1988-06-22 ダイキン工業株式会社 ロボツトにおける角度制御装置
WO2012137897A1 (ja) * 2011-04-08 2012-10-11 株式会社村田製作所 変位センサ、変位検出装置、および操作デバイス
JP2015118015A (ja) * 2013-12-18 2015-06-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2016136565A1 (ja) * 2015-02-27 2016-09-01 株式会社村田製作所 Ｒｆモジュール及びｒｆシステム
US20180238716A1 (en) * 2017-02-09 2018-08-23 The University Of British Columbia Capacitive bending sensors

Also Published As

Publication number Publication date
US20240426591A1 (en) 2024-12-26
JP7835255B2 (ja) 2026-03-25
CN118871757A (zh) 2024-10-29
JP2024163287A (ja) 2024-11-21
JPWO2023176426A1 (https=) 2023-09-21
JP7559997B2 (ja) 2024-10-02

Similar Documents

Publication Publication Date Title
US10248232B2 (en) Press sensor and electronic device
JP6156587B2 (ja) タッチ式入力装置、電子機器
US10656729B2 (en) Pressing detector and electronic device
JPWO2015041198A1 (ja) 押圧検出センサ
WO2023176426A1 (ja) 変形検知センサ
JP5804213B2 (ja) 変位検出センサおよび操作入力装置
JP2017033505A (ja) タッチ式入力装置
US11619555B2 (en) Pressure detection sensor and electronic device
US20200240809A1 (en) Displacement detection sensor and flexible device
US11847289B2 (en) Pressing force detection device
JP7806872B2 (ja) センサユニット
JP6708315B2 (ja) 押圧センサ及び押圧検出装置
JP7548468B2 (ja) センサ
JP7559985B2 (ja) 電子機器
JP7473084B2 (ja) 曲げセンサ
JP7729483B2 (ja) 変形検知センサ及び電子機器
WO2023199838A1 (ja) フロースイッチ及びフロースイッチ取付方法
WO2016098652A1 (ja) 押圧検知装置
JP7658515B2 (ja) センサモジュール
WO2020080323A1 (ja) 筐体構造
US20220244114A1 (en) Bending sensor and electronic apparatus
JP7302750B2 (ja) 電子機器
WO2025142329A1 (ja) 押圧センサ、押圧点検出方法、及び押圧点検出プログラム
JPWO2023223732A5 (https=)
WO2025205098A1 (ja) センサ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23770384

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2024507694

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 202380027022.4

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 23770384

Country of ref document: EP

Kind code of ref document: A1