CN118871757A - 变形探测传感器 - Google Patents

变形探测传感器 Download PDF

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Publication number
CN118871757A
CN118871757A CN202380027022.4A CN202380027022A CN118871757A CN 118871757 A CN118871757 A CN 118871757A CN 202380027022 A CN202380027022 A CN 202380027022A CN 118871757 A CN118871757 A CN 118871757A
Authority
CN
China
Prior art keywords
piezoelectric film
main surface
sensor
detection sensor
deformation detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380027022.4A
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English (en)
Chinese (zh)
Inventor
奥富让仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN118871757A publication Critical patent/CN118871757A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN202380027022.4A 2022-03-14 2023-02-28 变形探测传感器 Pending CN118871757A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022038838 2022-03-14
JP2022-038838 2022-03-14
PCT/JP2023/007287 WO2023176426A1 (ja) 2022-03-14 2023-02-28 変形検知センサ

Publications (1)

Publication Number Publication Date
CN118871757A true CN118871757A (zh) 2024-10-29

Family

ID=88023539

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380027022.4A Pending CN118871757A (zh) 2022-03-14 2023-02-28 变形探测传感器

Country Status (4)

Country Link
US (1) US20240426591A1 (https=)
JP (2) JP7559997B2 (https=)
CN (1) CN118871757A (https=)
WO (1) WO2023176426A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150185A (ja) * 1986-12-12 1988-06-22 ダイキン工業株式会社 ロボツトにおける角度制御装置
EP2696163B1 (en) 2011-04-08 2018-05-23 Murata Manufacturing Co., Ltd. Displacement sensor, displacement detecting apparatus, and operation device
JP5689523B1 (ja) 2013-12-18 2015-03-25 日本写真印刷株式会社 圧力検出器を備えたタッチパネル
WO2016136565A1 (ja) 2015-02-27 2016-09-01 株式会社村田製作所 Ｒｆモジュール及びｒｆシステム
US10670429B2 (en) 2017-02-09 2020-06-02 The University Of British Columbia Capacitive bending sensors
JP7156324B2 (ja) * 2019-05-14 2022-10-19 株式会社村田製作所 変形検知センサ

Also Published As

Publication number Publication date
US20240426591A1 (en) 2024-12-26
JP7835255B2 (ja) 2026-03-25
JP2024163287A (ja) 2024-11-21
WO2023176426A1 (ja) 2023-09-21
JPWO2023176426A1 (https=) 2023-09-21
JP7559997B2 (ja) 2024-10-02

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