JP7547630B2 - 試料ホルダおよび解析システム - Google Patents

試料ホルダおよび解析システム Download PDF

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Publication number
JP7547630B2
JP7547630B2 JP2023522004A JP2023522004A JP7547630B2 JP 7547630 B2 JP7547630 B2 JP 7547630B2 JP 2023522004 A JP2023522004 A JP 2023522004A JP 2023522004 A JP2023522004 A JP 2023522004A JP 7547630 B2 JP7547630 B2 JP 7547630B2
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Japan
Prior art keywords
sample
holder
holder shaft
rotation
shaft
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JP2023522004A
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English (en)
Japanese (ja)
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JPWO2022244055A5 (https=
JPWO2022244055A1 (https=
Inventor
浩之 浅倉
秀樹 菊池
紀恵 矢口
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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Publication of JPWO2022244055A5 publication Critical patent/JPWO2022244055A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20214—Rotation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31749—Focused ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2023522004A 2021-05-17 2021-05-17 試料ホルダおよび解析システム Active JP7547630B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/018607 WO2022244055A1 (ja) 2021-05-17 2021-05-17 試料ホルダおよび解析システム

Publications (3)

Publication Number Publication Date
JPWO2022244055A1 JPWO2022244055A1 (https=) 2022-11-24
JPWO2022244055A5 JPWO2022244055A5 (https=) 2024-02-14
JP7547630B2 true JP7547630B2 (ja) 2024-09-09

Family

ID=84141369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023522004A Active JP7547630B2 (ja) 2021-05-17 2021-05-17 試料ホルダおよび解析システム

Country Status (4)

Country Link
US (1) US20240266141A1 (https=)
JP (1) JP7547630B2 (https=)
DE (1) DE112021007286T5 (https=)
WO (1) WO2022244055A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119008367B (zh) * 2024-08-14 2025-09-19 北京大学 一种用于保护敏感样品的样品杆

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011090973A (ja) 2009-10-26 2011-05-06 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法
JP2014089936A (ja) 2012-10-31 2014-05-15 Hitachi High-Technologies Corp 電子ビーム顕微装置
JP2015018645A (ja) 2013-07-10 2015-01-29 株式会社日立ハイテクノロジーズ 試料ホールダおよび荷電粒子装置
JP2016100119A (ja) 2014-11-19 2016-05-30 新日鐵住金株式会社 試料ホルダー及び透過型電子顕微鏡による観察方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4654216B2 (ja) 2007-04-23 2011-03-16 株式会社日立ハイテクノロジーズ 荷電粒子線装置用試料ホールダ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011090973A (ja) 2009-10-26 2011-05-06 Hitachi High-Technologies Corp 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法
JP2014089936A (ja) 2012-10-31 2014-05-15 Hitachi High-Technologies Corp 電子ビーム顕微装置
JP2015018645A (ja) 2013-07-10 2015-01-29 株式会社日立ハイテクノロジーズ 試料ホールダおよび荷電粒子装置
JP2016100119A (ja) 2014-11-19 2016-05-30 新日鐵住金株式会社 試料ホルダー及び透過型電子顕微鏡による観察方法

Also Published As

Publication number Publication date
JPWO2022244055A1 (https=) 2022-11-24
DE112021007286T5 (de) 2024-01-25
WO2022244055A1 (ja) 2022-11-24
US20240266141A1 (en) 2024-08-08

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