JP7540603B2 - 弾性波装置 - Google Patents

弾性波装置 Download PDF

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Publication number
JP7540603B2
JP7540603B2 JP2023540417A JP2023540417A JP7540603B2 JP 7540603 B2 JP7540603 B2 JP 7540603B2 JP 2023540417 A JP2023540417 A JP 2023540417A JP 2023540417 A JP2023540417 A JP 2023540417A JP 7540603 B2 JP7540603 B2 JP 7540603B2
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JP
Japan
Prior art keywords
electrode
wave device
electrode fingers
piezoelectric layer
elastic wave
Prior art date
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Active
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JP2023540417A
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English (en)
Japanese (ja)
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JPWO2023013742A5 (https=
JPWO2023013742A1 (https=
Inventor
翔 永友
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
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Publication of JPWO2023013742A1 publication Critical patent/JPWO2023013742A1/ja
Publication of JPWO2023013742A5 publication Critical patent/JPWO2023013742A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2023540417A 2021-08-04 2022-08-04 弾性波装置 Active JP7540603B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163229082P 2021-08-04 2021-08-04
US63/229,082 2021-08-04
PCT/JP2022/030014 WO2023013742A1 (ja) 2021-08-04 2022-08-04 弾性波装置

Publications (3)

Publication Number Publication Date
JPWO2023013742A1 JPWO2023013742A1 (https=) 2023-02-09
JPWO2023013742A5 JPWO2023013742A5 (https=) 2023-11-01
JP7540603B2 true JP7540603B2 (ja) 2024-08-27

Family

ID=85155778

Family Applications (1)

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JP2023540417A Active JP7540603B2 (ja) 2021-08-04 2022-08-04 弾性波装置

Country Status (4)

Country Link
US (1) US20230170873A1 (https=)
JP (1) JP7540603B2 (https=)
CN (1) CN116458063A (https=)
WO (1) WO2023013742A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12237826B2 (en) * 2018-06-15 2025-02-25 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
CN116686214A (zh) * 2020-12-17 2023-09-01 株式会社村田制作所 弹性波装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332880A (ja) 2002-05-16 2003-11-21 Fujitsu Media Device Kk 弾性表面波素子
JP2014110457A (ja) 2012-11-30 2014-06-12 Kyocera Corp 弾性波素子、分波器および通信モジュール
JP2019021997A (ja) 2017-07-12 2019-02-07 京セラ株式会社 弾性波素子、分波器および通信装置
WO2020209359A1 (ja) 2019-04-12 2020-10-15 株式会社村田製作所 弾性波装置
WO2021125013A1 (ja) 2019-12-19 2021-06-24 株式会社村田製作所 弾性波装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118285056A (zh) * 2021-11-19 2024-07-02 株式会社村田制作所 弹性波装置
JP2024114277A (ja) * 2023-02-13 2024-08-23 株式会社村田製作所 弾性波装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003332880A (ja) 2002-05-16 2003-11-21 Fujitsu Media Device Kk 弾性表面波素子
JP2014110457A (ja) 2012-11-30 2014-06-12 Kyocera Corp 弾性波素子、分波器および通信モジュール
JP2019021997A (ja) 2017-07-12 2019-02-07 京セラ株式会社 弾性波素子、分波器および通信装置
WO2020209359A1 (ja) 2019-04-12 2020-10-15 株式会社村田製作所 弾性波装置
WO2021125013A1 (ja) 2019-12-19 2021-06-24 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
CN116458063A (zh) 2023-07-18
WO2023013742A1 (ja) 2023-02-09
US20230170873A1 (en) 2023-06-01
JPWO2023013742A1 (https=) 2023-02-09

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