JP7519267B2 - 剛性の変化に基づいて物体を選択的に保持及び解放する移送要素 - Google Patents

剛性の変化に基づいて物体を選択的に保持及び解放する移送要素 Download PDF

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JP7519267B2
JP7519267B2 JP2020179891A JP2020179891A JP7519267B2 JP 7519267 B2 JP7519267 B2 JP 7519267B2 JP 2020179891 A JP2020179891 A JP 2020179891A JP 2020179891 A JP2020179891 A JP 2020179891A JP 7519267 B2 JP7519267 B2 JP 7519267B2
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transfer
substrate
objects
temperature
transfer elements
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JP2021077877A5 (enExample
JP2021077877A (ja
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ヨンダ・ワン
チョンピン・ル
チャン・ワン
ノーリン・イー．・チャン
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パロ アルト リサーチ センター，エルエルシー
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Robotics (AREA)
  • Micromachines (AREA)
  • Die Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2020179891A 2019-11-12 2020-10-27 剛性の変化に基づいて物体を選択的に保持及び解放する移送要素 Active JP7519267B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/681,215 US11302561B2 (en) 2019-11-12 2019-11-12 Transfer elements that selectably hold and release objects based on changes in stiffness
US16/681,215 2019-11-12

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JP2021077877A JP2021077877A (ja) 2021-05-20
JP2021077877A5 JP2021077877A5 (enExample) 2023-11-07
JP7519267B2 true JP7519267B2 (ja) 2024-07-19

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US (1) US11302561B2 (enExample)
EP (1) EP3823011B1 (enExample)
JP (1) JP7519267B2 (enExample)
KR (1) KR102647518B1 (enExample)
CN (1) CN112864046B (enExample)
TW (1) TWI845786B (enExample)

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