KR102647518B1 - 강도의 변화에 기초하여 물체를 선택가능하게 보유 및 해제하는 전사 요소 - Google Patents

강도의 변화에 기초하여 물체를 선택가능하게 보유 및 해제하는 전사 요소 Download PDF

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KR102647518B1
KR102647518B1 KR1020200143236A KR20200143236A KR102647518B1 KR 102647518 B1 KR102647518 B1 KR 102647518B1 KR 1020200143236 A KR1020200143236 A KR 1020200143236A KR 20200143236 A KR20200143236 A KR 20200143236A KR 102647518 B1 KR102647518 B1 KR 102647518B1
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transfer
objects
substrate
elements
temperature
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KR20210057667A (ko
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왕 윤다
루 젱핑
왕 퀴안
이. 창 노린
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팔로 알토 리서치 센터 인코포레이티드
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Robotics (AREA)
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  • Die Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020200143236A 2019-11-12 2020-10-30 강도의 변화에 기초하여 물체를 선택가능하게 보유 및 해제하는 전사 요소 Active KR102647518B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/681,215 US11302561B2 (en) 2019-11-12 2019-11-12 Transfer elements that selectably hold and release objects based on changes in stiffness
US16/681,215 2019-11-12

Publications (2)

Publication Number Publication Date
KR20210057667A KR20210057667A (ko) 2021-05-21
KR102647518B1 true KR102647518B1 (ko) 2024-03-15

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Country Link
US (1) US11302561B2 (enExample)
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