JP7516353B2 - 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法 - Google Patents

湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法 Download PDF

Info

Publication number
JP7516353B2
JP7516353B2 JP2021510965A JP2021510965A JP7516353B2 JP 7516353 B2 JP7516353 B2 JP 7516353B2 JP 2021510965 A JP2021510965 A JP 2021510965A JP 2021510965 A JP2021510965 A JP 2021510965A JP 7516353 B2 JP7516353 B2 JP 7516353B2
Authority
JP
Japan
Prior art keywords
layer
cover layer
conductive path
strain gauge
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021510965A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021535390A5 (https=
JPWO2020043892A5 (https=
JP2021535390A (ja
Inventor
ジュウ,シアーン・チュイン
シー,ジーグオ
シュウ,レイ
エメリー,ジャン-クリストフ
Original Assignee
メトラー-トレド (チャンヂョウ) プレシジョン・インストゥルメント・カンパニー・リミテッド
メトラー-トレド (チャンヂョウ) メジャーメント・テクノロジー・カンパニー・リミテッド
メトラー-トレド・インターナショナル・トレーディング (シャンハイ) カンパニー,リミテッド
メトラー-トレド ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by メトラー-トレド (チャンヂョウ) プレシジョン・インストゥルメント・カンパニー・リミテッド, メトラー-トレド (チャンヂョウ) メジャーメント・テクノロジー・カンパニー・リミテッド, メトラー-トレド・インターナショナル・トレーディング (シャンハイ) カンパニー,リミテッド, メトラー-トレド ゲーエムベーハー filed Critical メトラー-トレド (チャンヂョウ) プレシジョン・インストゥルメント・カンパニー・リミテッド
Publication of JP2021535390A publication Critical patent/JP2021535390A/ja
Publication of JP2021535390A5 publication Critical patent/JP2021535390A5/ja
Publication of JPWO2020043892A5 publication Critical patent/JPWO2020043892A5/ja
Priority to JP2024001731A priority Critical patent/JP7689594B2/ja
Application granted granted Critical
Publication of JP7516353B2 publication Critical patent/JP7516353B2/ja
Priority to JP2024208118A priority patent/JP7820484B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2243Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being parallelogram-shaped
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/26Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2021510965A 2018-08-31 2019-08-30 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法 Active JP7516353B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024001731A JP7689594B2 (ja) 2018-08-31 2024-01-10 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法
JP2024208118A JP7820484B2 (ja) 2018-08-31 2024-11-29 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18191935.8 2018-08-31
EP18191935.8A EP3617683A1 (en) 2018-08-31 2018-08-31 Method of insulating a strain gauge against moisture penetration
PCT/EP2019/073246 WO2020043892A2 (en) 2018-08-31 2019-08-30 Moisture-insulated strain gauge and method of insulating a strain gauge against moisture penetration

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024001731A Division JP7689594B2 (ja) 2018-08-31 2024-01-10 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法

Publications (4)

Publication Number Publication Date
JP2021535390A JP2021535390A (ja) 2021-12-16
JP2021535390A5 JP2021535390A5 (https=) 2022-08-04
JPWO2020043892A5 JPWO2020043892A5 (https=) 2022-08-04
JP7516353B2 true JP7516353B2 (ja) 2024-07-16

Family

ID=63452514

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2021510965A Active JP7516353B2 (ja) 2018-08-31 2019-08-30 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法
JP2024001731A Active JP7689594B2 (ja) 2018-08-31 2024-01-10 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法
JP2024208118A Active JP7820484B2 (ja) 2018-08-31 2024-11-29 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024001731A Active JP7689594B2 (ja) 2018-08-31 2024-01-10 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法
JP2024208118A Active JP7820484B2 (ja) 2018-08-31 2024-11-29 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法

Country Status (8)

Country Link
US (1) US11841282B2 (https=)
EP (2) EP3617683A1 (https=)
JP (3) JP7516353B2 (https=)
KR (1) KR102699448B1 (https=)
CN (1) CN112912704A (https=)
DK (1) DK3844467T3 (https=)
IL (1) IL280992B1 (https=)
WO (1) WO2020043892A2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11698309B2 (en) * 2020-03-05 2023-07-11 Delta Electronics, Inc. Linear actuator
FR3116339B1 (fr) * 2020-11-16 2022-11-11 Commissariat Energie Atomique Jauge d’extensométrie inorganique
CN112629402B (zh) * 2020-12-31 2022-08-23 厦门市诺盛测控技术有限公司 一种焊点镀膜的应变计制备方法及其制备模版
JP7570975B2 (ja) * 2021-06-11 2024-10-22 ミネベアミツミ株式会社 ひずみゲージ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050155435A1 (en) 2002-07-25 2005-07-21 Mettler-Toledo Gmbh Moisture protection for an electromechanical transducer
JP2010243192A (ja) 2009-04-01 2010-10-28 A & D Co Ltd 歪ゲージとロードセル。

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3599139A (en) 1969-03-14 1971-08-10 Blh Electronics Strain gage protective cover
US4015326A (en) * 1975-02-18 1977-04-05 Brewer Engineering Laboratories, Inc. Method of mounting a strain gage to a surface
DE2728916A1 (de) * 1977-06-27 1979-01-18 Hottinger Messtechnik Baldwin Verfahren und vorrichtung zum abdecken eines dehnungsmesstreifens
JPS5920088B2 (ja) * 1978-08-24 1984-05-10 東芝テック株式会社 ロ−ドセル
JPS5542156U (https=) * 1978-09-14 1980-03-18
JPS5953147B2 (ja) 1978-09-20 1984-12-24 三菱電機株式会社 水平固定管の全姿勢円周溶接方法
EP0107966B2 (en) 1982-10-26 1991-12-27 Kabushiki Kaisha Ishida Koki Seisakusho Load cell and method for its manufacture
JPS5977325A (ja) * 1982-10-26 1984-05-02 Ishida Scales Mfg Co Ltd ロ−ドセル
JPS5987331A (ja) * 1982-11-10 1984-05-19 Ishida Scales Mfg Co Ltd ロ−ドセル
JPH0621825B2 (ja) * 1987-12-28 1994-03-23 株式会社寺岡精工 歪ゲージ式ロードセルの防湿構造
JPH02150537U (https=) 1989-05-24 1990-12-26
US4957177A (en) 1989-08-09 1990-09-18 Toledo Scale Corporation Enclosed moment-insensitive load cell
JPH0528947U (ja) 1992-09-22 1993-04-16 大和製衡株式会社 ロードセル
DE4236985C1 (de) * 1992-11-04 1994-02-24 Hottinger Messtechnik Baldwin Dehnungsmeßstreifen
DE4404716A1 (de) 1994-02-15 1995-08-17 Hottinger Messtechnik Baldwin Dehnungsmeßstreifen und Verfahren zur Herstellung eines Dehnungsmeßstreifens sowie Meßgrößenaufnehmer
JP3487675B2 (ja) * 1995-06-16 2004-01-19 松下電器産業株式会社 力学量センサの製造方法
JP2001091205A (ja) * 1999-07-22 2001-04-06 Sumitomo Metal Ind Ltd 物体搭載装置
DE29922560U1 (de) * 1999-12-22 2000-03-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80636 München Vorrichtung zur flächigen Messung von Betriebszustandsgrößen bei Maschinenkomponenten
DK1560011T3 (da) 2004-01-27 2010-05-31 Mettler Toledo Ag Strain-gauge med fugtighedsbeskyttelse ved hjælp af et uensartet, uorganisk lag på et udglattende polymerlag (ORMOCER) samt slidsindretning
ATE441843T1 (de) 2004-01-27 2009-09-15 Mettler Toledo Ag Kraftmesszelle mit dehnmessstreifen mit klebeschicht aus anorganisch-organischem hybrid- polymer (ormocer)
US7461560B2 (en) * 2005-03-28 2008-12-09 Microstrain, Inc. Strain gauge with moisture barrier and self-testing circuit
CA2955373A1 (en) 2014-08-01 2016-02-04 Western Michigan University Research Foundation Self-supported electronic devices
JP2017067764A (ja) 2015-09-29 2017-04-06 ミネベアミツミ株式会社 ひずみゲージ、荷重センサ、及びひずみゲージの製造方法
CN108242427B (zh) 2016-12-23 2020-05-12 光宝电子(广州)有限公司 电子制品的封装结构及封装工艺
US10359325B2 (en) * 2017-05-15 2019-07-23 Strain Measurement Devices, Inc. Thin film strain gauge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050155435A1 (en) 2002-07-25 2005-07-21 Mettler-Toledo Gmbh Moisture protection for an electromechanical transducer
JP2010243192A (ja) 2009-04-01 2010-10-28 A & D Co Ltd 歪ゲージとロードセル。

Also Published As

Publication number Publication date
IL280992A (en) 2021-04-29
EP3617683A1 (en) 2020-03-04
EP3844467B1 (en) 2025-10-01
JP2024038304A (ja) 2024-03-19
JP2025027088A (ja) 2025-02-26
KR20210049144A (ko) 2021-05-04
IL280992B1 (en) 2026-04-01
EP3844467A2 (en) 2021-07-07
CN112912704A (zh) 2021-06-04
WO2020043892A2 (en) 2020-03-05
JP2021535390A (ja) 2021-12-16
JP7689594B2 (ja) 2025-06-06
KR102699448B1 (ko) 2024-08-30
DK3844467T3 (da) 2026-01-12
US20210262873A1 (en) 2021-08-26
JP7820484B2 (ja) 2026-02-25
US11841282B2 (en) 2023-12-12
WO2020043892A3 (en) 2020-04-16

Similar Documents

Publication Publication Date Title
JP7689594B2 (ja) 湿気絶縁ひずみゲージ、および湿気の侵入に対してひずみゲージを絶縁する方法
CN100588924C (zh) 用于机电传感器的防潮保护
US7215870B2 (en) Moisture protection for an electromechanical transducer
US4064744A (en) Strain sensorextensiometer
US4649759A (en) Force transducer
CN114414123B (zh) 一种异形金属基底上的应变传感器芯片及其原位制备方法
GB2369889A (en) Strain sensing device
JP2005214969A (ja) 力計測セルの変形可能な本体へのひずみゲージの接着技術
CN110873616A (zh) 防潮应变片及其制备方法
US7732721B2 (en) Nickel alloy precision force transducer with strain gauge elements
JPH0570770B2 (https=)
US5962792A (en) Beam strain gauge
US7347109B2 (en) Load cell with foil strain gauge
US4464419A (en) Process for a low back-action, quasi-hermetic covering of susceptible physical structures
JP2549815B2 (ja) 半導体加速度センサおよびその試験方法
JPH08122359A (ja) 半導体加速度センサとその製造方法および試験方法
Lynch Strain measurement
US4318072A (en) Precision resistor with improved temperature characteristics
US20210190606A1 (en) Strain gages and methods for manufacturing thereof
Schmaljohann et al. Thin film sensors for measuring small forces
RU2391640C1 (ru) Тензорезисторный датчик давления на основе тонкопленочной нано- и микроэлектромеханической системы
WO2021126261A1 (en) Strain gages and methods for manufacturing thereof
JPH1138038A (ja) 加速度センサ
WO2011012711A1 (en) Strain gage and process of manufacture and method of installation
JP4059306B2 (ja) サーボ式静電容量型真空センサ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220727

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220727

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230719

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230728

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20231023

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20231220

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240110

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240401

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240604

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240605

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240701

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240703

R150 Certificate of patent or registration of utility model

Ref document number: 7516353

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150