JP7514982B2 - 磁気記録層中へのチタンの拡散を低減するように構成された下地層を有する磁気記録媒体 - Google Patents
磁気記録層中へのチタンの拡散を低減するように構成された下地層を有する磁気記録媒体 Download PDFInfo
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- JP7514982B2 JP7514982B2 JP2023113790A JP2023113790A JP7514982B2 JP 7514982 B2 JP7514982 B2 JP 7514982B2 JP 2023113790 A JP2023113790 A JP 2023113790A JP 2023113790 A JP2023113790 A JP 2023113790A JP 7514982 B2 JP7514982 B2 JP 7514982B2
- Authority
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- Prior art keywords
- layer
- magnetic recording
- underlayer
- recording medium
- mgo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010936 titanium Substances 0.000 title claims description 60
- 229910052719 titanium Inorganic materials 0.000 title claims description 54
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims description 52
- 238000009792 diffusion process Methods 0.000 title description 23
- 239000000463 material Substances 0.000 claims description 92
- 238000000034 method Methods 0.000 claims description 82
- 239000000654 additive Substances 0.000 claims description 70
- 230000000996 additive effect Effects 0.000 claims description 70
- 239000000758 substrate Substances 0.000 claims description 41
- 229910052742 iron Inorganic materials 0.000 claims description 33
- 229910052799 carbon Inorganic materials 0.000 claims description 29
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 16
- 229910005335 FePt Inorganic materials 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 241000849798 Nita Species 0.000 claims description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 229910052593 corundum Inorganic materials 0.000 claims description 8
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 238000013500 data storage Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 266
- YVRGRDDGRSFXCH-UHFFFAOYSA-N magnesium;dioxido(oxo)titanium Chemical compound [Mg+2].[O-][Ti]([O-])=O YVRGRDDGRSFXCH-UHFFFAOYSA-N 0.000 description 64
- 230000008569 process Effects 0.000 description 57
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 30
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 14
- 239000000395 magnesium oxide Substances 0.000 description 14
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 14
- 239000000314 lubricant Substances 0.000 description 11
- 229910052759 nickel Inorganic materials 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 230000006870 function Effects 0.000 description 7
- 229910052750 molybdenum Inorganic materials 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 7
- 229910003321 CoFe Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 229910052763 palladium Inorganic materials 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium(II) oxide Chemical compound [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910018979 CoPt Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000004590 computer program Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000002241 glass-ceramic Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- -1 such as Co Substances 0.000 description 3
- 238000000277 atomic layer chemical vapour deposition Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000005204 segregation Methods 0.000 description 2
- 230000020347 spindle assembly Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- YTPMCWYIRHLEGM-BQYQJAHWSA-N 1-[(e)-2-propylsulfonylethenyl]sulfonylpropane Chemical compound CCCS(=O)(=O)\C=C\S(=O)(=O)CCC YTPMCWYIRHLEGM-BQYQJAHWSA-N 0.000 description 1
- 229910001149 41xx steel Inorganic materials 0.000 description 1
- 229910015269 MoCu Inorganic materials 0.000 description 1
- 229910000943 NiAl Inorganic materials 0.000 description 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000002355 dual-layer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- VYQMZUUUGRXQHR-UHFFFAOYSA-N magnesium;oxygen(2-);titanium(4+) Chemical compound [O-2].[O-2].[Mg+2].[Ti+4] VYQMZUUUGRXQHR-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
- G11B5/73911—Inorganic substrates
- G11B5/73917—Metallic substrates, i.e. elemental metal or metal alloy substrates
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7375—Non-polymeric layer under the lowermost magnetic recording layer for heat-assisted or thermally-assisted magnetic recording [HAMR, TAMR]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0005—Arrangements, methods or circuits
- G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
Landscapes
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/886,244 | 2022-08-11 | ||
| US17/886,244 US11900978B1 (en) | 2022-08-11 | 2022-08-11 | Magnetic recording medium with underlayer configured to reduce diffusion of titanium into a magnetic recording layer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2024025674A JP2024025674A (ja) | 2024-02-26 |
| JP2024025674A5 JP2024025674A5 (enExample) | 2024-04-22 |
| JP7514982B2 true JP7514982B2 (ja) | 2024-07-11 |
Family
ID=89846562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023113790A Active JP7514982B2 (ja) | 2022-08-11 | 2023-07-11 | 磁気記録層中へのチタンの拡散を低減するように構成された下地層を有する磁気記録媒体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11900978B1 (enExample) |
| JP (1) | JP7514982B2 (enExample) |
| CN (1) | CN117594073A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12412598B2 (en) * | 2023-09-01 | 2025-09-09 | Western Digital Technologies, Inc. | Media underlayer structure for heat-assisted magnetic recording and media fabrication methods therefor |
| US12308056B2 (en) * | 2023-10-12 | 2025-05-20 | Western Digital Technologies, Inc. | Magnetic recording medium with magnesium-titanium oxide (MTO) layer formed using pulsed direct current sputter deposition |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2011165232A (ja) | 2010-02-04 | 2011-08-25 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP2013149315A (ja) | 2012-01-19 | 2013-08-01 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
| JP2016522957A (ja) | 2013-09-30 | 2016-08-04 | シーゲイト テクノロジー エルエルシーＳｅａｇａｔｅ Ｔｅｃｈｎｏｌｏｇｙ ＬＬＣ | ＭｇＯ−Ｔｉ（ＯＮ）中間層を含む磁気スタック |
| US20220139422A1 (en) | 2020-11-04 | 2022-05-05 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (hamr) medium with multilayered underlayer for the recording layer |
| US20220154093A1 (en) | 2020-11-18 | 2022-05-19 | Western Digital Technologies, Inc. | High thermal stability lubricants |
| US11437064B1 (en) | 2021-08-06 | 2022-09-06 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (HAMR) medium with optical-coupling multilayer between the recording layer and heat-sink layer |
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| US6579590B2 (en) | 2001-11-16 | 2003-06-17 | Hitachi Global Storage Technologies Netherlands B.V. | Thermally-assisted magnetic recording disk with multilayered thermal barrier |
| JP4255826B2 (ja) | 2003-12-26 | 2009-04-15 | 株式会社東芝 | 磁気記録媒体及び磁気記録媒体の製造方法並びに磁気記録再生装置 |
| US7869162B2 (en) | 2007-02-16 | 2011-01-11 | Seagate Technology Llc | Thin film structure with controlled lateral thermal spreading in the thin film |
| US9076476B2 (en) | 2011-09-23 | 2015-07-07 | Carnegie Mellon University | Thin film media structure for perpendicular magnetic recording and storage devices made therewith |
| US8941950B2 (en) * | 2012-05-23 | 2015-01-27 | WD Media, LLC | Underlayers for heat assisted magnetic recording (HAMR) media |
| US8993134B2 (en) | 2012-06-29 | 2015-03-31 | Western Digital Technologies, Inc. | Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates |
| JP6083163B2 (ja) | 2012-09-11 | 2017-02-22 | 富士電機株式会社 | 垂直磁気記録媒体およびその製造方法 |
| CN105027202B (zh) * | 2012-09-27 | 2018-04-13 | 希捷科技有限公司 | 包含TiN‑X中间层的磁堆 |
| US9236078B2 (en) | 2012-10-10 | 2016-01-12 | Agency For Science Technology And Research | Recording medium for heat-assisted-magnetic-recording (HAMR) and method for manufacturing the same |
| JP6145332B2 (ja) | 2013-06-20 | 2017-06-07 | 昭和電工株式会社 | 磁気記録媒体、磁気記憶装置 |
| US10276192B2 (en) | 2013-07-11 | 2019-04-30 | Western Digital Technologies, Inc. | Perpendicular magnetic recording medium |
| US9177585B1 (en) | 2013-10-23 | 2015-11-03 | WD Media, LLC | Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording |
| US9822441B2 (en) | 2015-03-31 | 2017-11-21 | WD Media, LLC | Iridium underlayer for heat assisted magnetic recording media |
| SG11201708016SA (en) | 2015-06-02 | 2017-12-28 | Fuji Electric Co Ltd | Method for producing magnetic recording medium |
| US10347281B2 (en) * | 2015-06-02 | 2019-07-09 | Western Digital Technologies, Inc. | Structures and methods for templated growth of high areal density heat assisted magnetic recording media |
| SG10201604026QA (en) | 2015-07-16 | 2017-02-27 | Agency Science Tech & Res | Recording medium for heat assisted magnetic recording and method of forming the same |
| US10276201B1 (en) | 2015-11-02 | 2019-04-30 | WD Media, LLC | Dual phase MgO-X seed layers for heat assisted magnetic recording media |
| US9530445B1 (en) | 2016-01-21 | 2016-12-27 | HGST Netherlands B.V. | Perpendicular heat-assisted magnetic recording (HAMR) medium with a perovskite oxide intermediate layer |
| US9754618B1 (en) | 2016-04-22 | 2017-09-05 | WD Media, LLC | Heat-assisted magnetic recording (HAMR) medium including a split heat-sink structure (SHSS) |
| US20180218752A1 (en) | 2017-02-01 | 2018-08-02 | Seagate Technology Llc | Heat assisted recording media including mutli-layer granular heatsink |
| JP6832189B2 (ja) | 2017-02-21 | 2021-02-24 | 昭和電工株式会社 | 磁気記録媒体及び磁気記録再生装置 |
| US10439133B2 (en) | 2017-03-13 | 2019-10-08 | Samsung Electronics Co., Ltd. | Method and system for providing a magnetic junction having a low damping hybrid free layer |
| US20180286441A1 (en) | 2017-03-28 | 2018-10-04 | Seagate Technology Llc | Heat assisted magnetic recording (hamr) media with exchange tuning layer |
| US10650854B1 (en) * | 2017-04-17 | 2020-05-12 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (HAMR) medium with improved corrosion resistance |
| JP7246232B2 (ja) | 2019-03-29 | 2023-03-27 | Ｊｘ金属株式会社 | スパッタリングターゲット部材、スパッタリングターゲット、スパッタリングターゲット部材の製造方法、及びスパッタ膜の製造方法 |
| US11521658B2 (en) * | 2019-06-25 | 2022-12-06 | Sandisk Technologies Llc | Binary weighted voltage encoding scheme for supporting multi-bit input precision |
| US20230005503A1 (en) | 2021-07-01 | 2023-01-05 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (hamr) media with magnesium trapping layer |
| US11763845B2 (en) | 2021-12-08 | 2023-09-19 | Seagate Technology Llc | Magnetic stack including non-magnetic seed layer for hard disk drive media |
-
2022
- 2022-08-11 US US17/886,244 patent/US11900978B1/en active Active
-
2023
- 2023-07-11 CN CN202310843224.8A patent/CN117594073A/zh active Pending
- 2023-07-11 JP JP2023113790A patent/JP7514982B2/ja active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011165232A (ja) | 2010-02-04 | 2011-08-25 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記憶装置 |
| JP2013149315A (ja) | 2012-01-19 | 2013-08-01 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
| JP2016522957A (ja) | 2013-09-30 | 2016-08-04 | シーゲイト テクノロジー エルエルシーＳｅａｇａｔｅ Ｔｅｃｈｎｏｌｏｇｙ ＬＬＣ | ＭｇＯ−Ｔｉ（ＯＮ）中間層を含む磁気スタック |
| US20220139422A1 (en) | 2020-11-04 | 2022-05-05 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (hamr) medium with multilayered underlayer for the recording layer |
| US20220154093A1 (en) | 2020-11-18 | 2022-05-19 | Western Digital Technologies, Inc. | High thermal stability lubricants |
| US11437064B1 (en) | 2021-08-06 | 2022-09-06 | Western Digital Technologies, Inc. | Heat-assisted magnetic recording (HAMR) medium with optical-coupling multilayer between the recording layer and heat-sink layer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117594073A (zh) | 2024-02-23 |
| US20240055019A1 (en) | 2024-02-15 |
| US11900978B1 (en) | 2024-02-13 |
| JP2024025674A (ja) | 2024-02-26 |
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