JP7510396B2 - 光電変換装置、その製造方法及び機器 - Google Patents

光電変換装置、その製造方法及び機器 Download PDF

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Publication number
JP7510396B2
JP7510396B2 JP2021132950A JP2021132950A JP7510396B2 JP 7510396 B2 JP7510396 B2 JP 7510396B2 JP 2021132950 A JP2021132950 A JP 2021132950A JP 2021132950 A JP2021132950 A JP 2021132950A JP 7510396 B2 JP7510396 B2 JP 7510396B2
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impurity region
photoelectric conversion
impurity
region
conversion device
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Japanese (ja)
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JP2023027686A (ja
JP2023027686A5 (https=
Inventor
大貴 白髭
寛 関根
駿一 若嶋
銀二郎 豊口
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Canon Inc
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Canon Inc
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Priority to JP2021132950A priority Critical patent/JP7510396B2/ja
Priority to US17/886,552 priority patent/US12543392B2/en
Publication of JP2023027686A publication Critical patent/JP2023027686A/ja
Publication of JP2023027686A5 publication Critical patent/JP2023027686A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8033—Photosensitive area

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2021132950A 2021-08-17 2021-08-17 光電変換装置、その製造方法及び機器 Active JP7510396B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021132950A JP7510396B2 (ja) 2021-08-17 2021-08-17 光電変換装置、その製造方法及び機器
US17/886,552 US12543392B2 (en) 2021-08-17 2022-08-12 Photoelectric conversion device, manufacturing method thereof, and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021132950A JP7510396B2 (ja) 2021-08-17 2021-08-17 光電変換装置、その製造方法及び機器

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JP2023027686A JP2023027686A (ja) 2023-03-02
JP2023027686A5 JP2023027686A5 (https=) 2023-06-27
JP7510396B2 true JP7510396B2 (ja) 2024-07-03

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12477853B2 (en) 2022-01-01 2025-11-18 Canon Kabushiki Kaisha Photoelectric conversion apparatus and photoelectric conversion system
JP7786823B2 (ja) 2022-01-01 2025-12-16 キヤノン株式会社 光電変換装置及び光電変換システム
US12581761B2 (en) 2022-01-01 2026-03-17 Canon Kabushiki Kaisha Photoelectric conversion apparatus and photoelectric conversion system
JP7799488B2 (ja) 2022-01-01 2026-01-15 キヤノン株式会社 光電変換装置、光電変換システム、および機器
JP2024111701A (ja) 2023-02-06 2024-08-19 キヤノン株式会社 光電変換装置および機器
JP2025169064A (ja) * 2024-04-30 2025-11-12 キヤノン株式会社 光電変換装置および機器

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JP2019009425A (ja) 2017-06-26 2019-01-17 キヤノン株式会社 固体撮像装置及びその製造方法
JP2020141122A (ja) 2019-02-25 2020-09-03 キヤノン株式会社 光電変換装置、撮像システム及び移動体
JP2021090022A (ja) 2019-12-06 2021-06-10 ソニーセミコンダクタソリューションズ株式会社 撮像素子および撮像装置
US20210210532A1 (en) 2020-01-03 2021-07-08 Taiwan Semiconductor Manufacturing Co., Ltd. Image sensor with overlap of backside trench isolation structure and vertical transfer gate

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JP5956840B2 (ja) 2012-06-20 2016-07-27 キヤノン株式会社 固体撮像装置及びカメラ
JP6174902B2 (ja) 2012-09-14 2017-08-02 キヤノン株式会社 固体撮像装置及びカメラ
JP6417197B2 (ja) 2014-11-27 2018-10-31 キヤノン株式会社 固体撮像装置
JP2018092976A (ja) 2016-11-30 2018-06-14 キヤノン株式会社 撮像装置
JP6957157B2 (ja) 2017-01-26 2021-11-02 キヤノン株式会社 固体撮像装置、撮像システム、および固体撮像装置の製造方法
JP6840555B2 (ja) 2017-01-30 2021-03-10 キヤノン株式会社 固体撮像装置及び撮像システム
JP6949563B2 (ja) 2017-06-02 2021-10-13 キヤノン株式会社 固体撮像装置、撮像システム及び移動体
US10818715B2 (en) 2017-06-26 2020-10-27 Canon Kabushiki Kaisha Solid state imaging device and manufacturing method thereof
JP6987562B2 (ja) 2017-07-28 2022-01-05 キヤノン株式会社 固体撮像素子
JP7066392B2 (ja) 2017-12-14 2022-05-13 キヤノン株式会社 撮像装置
JP7108421B2 (ja) 2018-02-15 2022-07-28 キヤノン株式会社 撮像装置及び撮像システム
JP2020021775A (ja) 2018-07-30 2020-02-06 キヤノン株式会社 固体撮像装置及び撮像システム
JP7237622B2 (ja) 2019-02-05 2023-03-13 キヤノン株式会社 光電変換装置
JP7652543B2 (ja) 2020-07-29 2025-03-27 キヤノン株式会社 光電変換装置
JP7534902B2 (ja) 2020-09-23 2024-08-15 キヤノン株式会社 光電変換装置、撮像装置、半導体装置及び光電変換システム
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006191100A (ja) 2004-12-28 2006-07-20 Dongbuanam Semiconductor Inc Ｃｍｏｓイメージセンサー及びその製造方法
JP2019009425A (ja) 2017-06-26 2019-01-17 キヤノン株式会社 固体撮像装置及びその製造方法
JP2020141122A (ja) 2019-02-25 2020-09-03 キヤノン株式会社 光電変換装置、撮像システム及び移動体
JP2021090022A (ja) 2019-12-06 2021-06-10 ソニーセミコンダクタソリューションズ株式会社 撮像素子および撮像装置
US20210210532A1 (en) 2020-01-03 2021-07-08 Taiwan Semiconductor Manufacturing Co., Ltd. Image sensor with overlap of backside trench isolation structure and vertical transfer gate

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US12543392B2 (en) 2026-02-03
JP2023027686A (ja) 2023-03-02
US20230053980A1 (en) 2023-02-23

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