JP7483951B2 - 加熱装置 - Google Patents

加熱装置 Download PDF

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Publication number
JP7483951B2
JP7483951B2 JP2022578272A JP2022578272A JP7483951B2 JP 7483951 B2 JP7483951 B2 JP 7483951B2 JP 2022578272 A JP2022578272 A JP 2022578272A JP 2022578272 A JP2022578272 A JP 2022578272A JP 7483951 B2 JP7483951 B2 JP 7483951B2
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Japan
Prior art keywords
plate
heating
fixing
hole
heating device
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Active
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JP2022578272A
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English (en)
Japanese (ja)
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JPWO2022163444A1 (https=
Inventor
浩幸 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2022163444A1 publication Critical patent/JPWO2022163444A1/ja
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Publication of JP7483951B2 publication Critical patent/JP7483951B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/02—Moulds or cores; Details thereof or accessories therefor with incorporated heating or cooling means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Resistance Heating (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2022578272A 2021-01-26 2022-01-18 加熱装置 Active JP7483951B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021010679 2021-01-26
JP2021010679 2021-01-26
PCT/JP2022/001671 WO2022163444A1 (ja) 2021-01-26 2022-01-18 加熱装置

Publications (2)

Publication Number Publication Date
JPWO2022163444A1 JPWO2022163444A1 (https=) 2022-08-04
JP7483951B2 true JP7483951B2 (ja) 2024-05-15

Family

ID=82653408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022578272A Active JP7483951B2 (ja) 2021-01-26 2022-01-18 加熱装置

Country Status (3)

Country Link
JP (1) JP7483951B2 (https=)
CN (1) CN116724664B (https=)
WO (1) WO2022163444A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184557A (ja) 2000-12-12 2002-06-28 Ibiden Co Ltd 半導体製造・検査装置用ヒータ
JP2004111289A (ja) 2002-09-20 2004-04-08 Sumitomo Electric Ind Ltd セラミックスヒータ及びその製造方法
JP2016207595A (ja) 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3572412B2 (ja) * 2001-11-12 2004-10-06 坂口電熱株式会社 ホットプレート
JP2005032842A (ja) * 2003-07-08 2005-02-03 Ibiden Co Ltd 電極構造およびセラミック接合体
JP6626277B2 (ja) * 2015-07-01 2019-12-25 株式会社アガツマ 綿菓子製造装置
KR20200021818A (ko) * 2018-08-21 2020-03-02 세메스 주식회사 가열 플레이트, 이를 구비하는 기판 열처리 장치 및 가열 플레이트의 제조 방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184557A (ja) 2000-12-12 2002-06-28 Ibiden Co Ltd 半導体製造・検査装置用ヒータ
JP2004111289A (ja) 2002-09-20 2004-04-08 Sumitomo Electric Ind Ltd セラミックスヒータ及びその製造方法
JP2016207595A (ja) 2015-04-28 2016-12-08 日本特殊陶業株式会社 加熱装置

Also Published As

Publication number Publication date
JPWO2022163444A1 (https=) 2022-08-04
WO2022163444A1 (ja) 2022-08-04
CN116724664A (zh) 2023-09-08
CN116724664B (zh) 2026-04-21

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